基于纳米测量机的微结构三维坐标测量

吴俊杰

doi:10.37188/OPE.20202810.2252

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基于纳米测量机的微结构三维坐标测量

微纳技术与精密机械 | 更新时间：2020-11-16

- 基于纳米测量机的微结构三维坐标测量
- Three-dimensional coordinate measurement of microstructures based on nano measuring machine
- 光学精密工程 2020年28卷第10期页码：2252-2259
- 作者机构：
  
  上海市计量测试技术研究院机械与制造计量技术研究所, 上海 201203
- 作者简介：
  
  [ "吴俊杰(1989-), 男, 浙江金华人, 博士。2011年、2014年分别于中国计量大学获得学士、硕士学位, 2018年于上海交通大学获得博士学位, 现为上海市计量测试技术研究院与哈尔滨工业大学联合培养博士后。主要从事微纳米测量及仪器开发方面的研究。E-mail:wujunjie@simt.com.cn" ]
- 基金信息：
  
  上海市市场监督管理局科技项目资助(2019-02);上海市青年科技英才扬帆计划资助项目(19YF1441700);国家重点研发计划资助项目(2019YFB2004904)
- DOI：10.37188/OPE.20202810.2252
  中图分类号： TH711
- 收稿日期：2020-04-07，
  
  修回日期：2020-05-11，
  
  录用日期：2020-5-11，
  
  纸质出版日期：2020-10-25
- 稿件说明：
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吴俊杰. 基于纳米测量机的微结构三维坐标测量[J]. 光学精密工程, 2020,28(10):2252-2259.

Jun-jie WU. Three-dimensional coordinate measurement of microstructures based on nano measuring machine[J]. Optics and precision engineering, 2020, 28(10): 2252-2259.
吴俊杰. 基于纳米测量机的微结构三维坐标测量[J]. 光学精密工程, 2020,28(10):2252-2259. DOI： 10.37188/OPE.20202810.2252.

Jun-jie WU. Three-dimensional coordinate measurement of microstructures based on nano measuring machine[J]. Optics and precision engineering, 2020, 28(10): 2252-2259. DOI： 10.37188/OPE.20202810.2252.

摘要

针对当前微纳米测量中存在的微结构跨尺度、高精度测量及高深宽比结构多参数表征问题，基于纳米测量机和微接触测头构建了纳米坐标测量系统。通过对测头与定位平台机械、电气及软件接口的设计，实现测头与平台的集成，并利用标准球对测量系统进行校准。为保证测量结果的可溯源性，对定位平台三轴激光干涉仪的激光器进行了拍频。最后，利用搭建的测量系统对高度10

m，2 mm的超高台阶及硅臂卡爪的侧壁倾角进行了测量，表明系统具备大尺寸结构的高精度测量和复杂MEMS器件特征尺寸的精确表征能力。

Abstract

To realize the trans-scale and high-precision measurement of microstructures

as well as to perform multiple geometrical parameter characterizations of some high-aspect-ratio structures

a nano coordinate measurement system was developed based on a nano measurement machine and a micro tactile probe. The mechanical

electrical

and software interfaces between the probe and positioning platform were designed. After the integration of the probe and positioning platform

the measurement system was calibrated using a standard micro ball. To ensure traceability of the measurement results

the laser sources of three interferometers in the positioning platform were also calibrated using the laser beat frequency. Finally

ultra-high steps with heights of 10

m and 2 mm and the sidewall angle of a silicon arm were measured using the developed system. The experiments indicated that the system can accurately measure large-size structures and complex MEMS devices.

关键词

Keywords

references

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