不同安装模态对嵌入式时栅测量误差的影响

孙世政; 周清松; 韩宇; 何泽银

doi:10.37188/OPE.20202810.2290

您当前的位置：

首页 >

文章列表页 >

不同安装模态对嵌入式时栅测量误差的影响

微纳技术与精密机械 | 更新时间：2020-11-16

- 不同安装模态对嵌入式时栅测量误差的影响
- Effect of different mounting modes on embedded time grating measuring errors
- 光学精密工程 2020年28卷第10期页码：2290-2300
- 作者机构：
  
  重庆交通大学机电与车辆工程学院, 重庆 400074
- 作者简介：
  
  [ "孙世政(1986-), 男, 山东烟台人, 副教授, 硕士生导师, 2012年于重庆理工大学获得硕士学位, 2015年于合肥工业大学获得博士学位, 主要研究方向为精密仪器与机械、智能传感技术。E-mail:ssz091011@163.com" ]
  [ "周清松(1993-), 男, 重庆人, 硕士, 2020年于重庆交通大学获得硕士学位, 主要研究方向为智能传感技术。E-mail:zhouqingsong11@126.com" ]
- 基金信息：
  
  中国博士后科学基金面上项目资助(2018M633626XB);重庆市重点实验室开放课题基金资助项目(CKLURTSIC-RFKT-201806);交通工程应用机器人重庆市工程实验室开放课题(CELTEAR-KFKT-201805)
- DOI：10.37188/OPE.20202810.2290
  中图分类号： TH712
- 收稿日期：2020-04-16，
  
  修回日期：2020-06-10，
  
  录用日期：2020-6-10，
  
  纸质出版日期：2020-10-25
- 稿件说明：
移动端阅览
孙世政, 周清松, 韩宇, 等. 不同安装模态对嵌入式时栅测量误差的影响[J]. 光学精密工程, 2020,28(10):2290-2300.

Shi-zheng SUN, Qing-song ZHOU, Yu HAN, et al. Effect of different mounting modes on embedded time grating measuring errors[J]. Optics and precision engineering, 2020, 28(10): 2290-2300.
孙世政, 周清松, 韩宇, 等. 不同安装模态对嵌入式时栅测量误差的影响[J]. 光学精密工程, 2020,28(10):2290-2300. DOI： 10.37188/OPE.20202810.2290.

Shi-zheng SUN, Qing-song ZHOU, Yu HAN, et al. Effect of different mounting modes on embedded time grating measuring errors[J]. Optics and precision engineering, 2020, 28(10): 2290-2300. DOI： 10.37188/OPE.20202810.2290.

摘要

为提高嵌入式时栅传感器测量精度，对不同安装模态下测量精度进行了表征。从嵌入式时栅传感器传感机理出发，分析了安装气隙变化、径向安装偏差和轴向安装偏差对传感器测量精度的影响规律，建立了不同安装模态的误差模型。对传感器不同安装模态进行了模拟仿真与实验验证。仿真与实验结果表明：不同安装模态均会影响传感器测量精度，其中径向安装对传感器测量误差影响最大，气隙间距变化对传感器测量误差影响其次，轴向安装对传感器测量误差影响最小；三种安装模态对测量误差的影响均体现在对一次和二次误差的影响上；在气隙间距为0.2 mm无径向与轴向安装偏差时嵌入式时栅测量误差峰峰值为100.8"。本研究对指导嵌入式时栅传感器安装，降低安装误差，提升测量精度具有重要的理论与现实意义。

Abstract

In this study

the measurement accuracy of an embedded time-grating sensor was characterized for different mounting modes. Based on the sensing mechanism of the embedded time-grating sensor

the effects of variations in the mounting air gap

radial mounting

and axial mounting on the measurement accuracy of the sensor were analyzed

and the sensing measurement model was established for different mounting modes. Simulation and experimental verifications of the mounting modes of the sensor were performed. The simulation and experimental results showed that different mounting modes influenced the measurement accuracy of the sensor

with radial mounting having the most significant effect on the measurement error of the sensor

followed by air gap spacing and axial mounting. This study has significant theoretical and practical implications in guiding the installation

minimizing the installation errors

and improving the measurement accuracy of embedded time-grating sensors.

关键词

Keywords

references

王亚洲 , 于海 , 易进 , 等 . 图像式角位移测量的光栅偏心度监测系统 . 光学精密工程 , 2020 . 28 ( 5 ): 1038 - 1045 . http://ope.lightpublishing.cn/thesisDetails?columnId=2125222&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=2125222&Fpath=&index=-1&l=zh .

Y ZH WANG , H YU , J YI , 等 . Grating eccentricity monitoring system for image-based angular displacement measurement . Opt. Precision Eng. , 2020 . 28 ( 5 ): 1038 - 1045 . http://ope.lightpublishing.cn/thesisDetails?columnId=2125222&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=2125222&Fpath=&index=-1&l=zh .

韩庆阳 , 陈赟 , 张红胜 , 等 . 耐高温增量式光电编码器的研制 . 光学精密工程 , 2019 . 27 ( 7 ): 1458 - 1464 . http://ope.lightpublishing.cn/thesisDetails?columnId=1428219&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=1428219&Fpath=&index=-1&l=zh .

Q Y HAN , Y CHEN , H SH ZHANG , 等 . Development of high-temperature resistant incremental encoder . Opt. Precision Eng. , 2019 . 27 ( 7 ): 1458 - 1464 . http://ope.lightpublishing.cn/thesisDetails?columnId=1428219&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=1428219&Fpath=&index=-1&l=zh .

于连栋 , 鲍文慧 , 赵会宁 , 等 . 新型圆光栅测角误差补偿方法及其应用 . 光学精密工程 , 2019 . 27 ( 8 ): 1719 - 1726 . http://ope.lightpublishing.cn/thesisDetails?columnId=1428903&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=1428903&Fpath=&index=-1&l=zh .

L D YU , W H BAO , H N ZHAO , 等 . Application and novel angle measurement error compensation method of circular gratings . Opt. Precision Eng. , 2019 . 27 ( 8 ): 1719 - 1726 . http://ope.lightpublishing.cn/thesisDetails?columnId=1428903&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=1428903&Fpath=&index=-1&l=zh .

娄志峰 , 郝秀朋 , 刘力 , 等 . 圆光栅配合自准直仪测量主轴径向运动误差 . 光学精密工程 , 2019 . 27 ( 9 ): 2053 - 2061 . http://ope.lightpublishing.cn/thesisDetails?columnId=1427395&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=1427395&Fpath=&index=-1&l=zh .

ZH F LOU , X P HAO , L LIU , 等 . Spindle radial motion error measurement using a circular grating and a autocollimator . Opt. Precision Eng. , 2019 . 27 ( 9 ): 2053 - 2061 . http://ope.lightpublishing.cn/thesisDetails?columnId=1427395&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=1427395&Fpath=&index=-1&l=zh .

卜倩倩 , 王丹 , 邱云 , 等 . 基于MEMS辅助的显示与LCD工艺 . 液晶与显示 , 2020 . 35 ( 5 ): 430 - 436 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yjyxs202005003 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yjyxs202005003 .

Q Q BU , D WANG , Y QIU , 等 . MEMS based display and LCD technology . Chinese Journal of Liquid Crystals and Displays , 2020 . 35 ( 5 ): 430 - 436 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yjyxs202005003 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yjyxs202005003 .

彭东林 , 李彦 , 付敏 , 等 . 用于极端和特殊条件下机械传动误差检测的寄生式时栅研究 . 仪器仪表学报 , 2013 . 34 ( 2 ): 359 - 365 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yqyb201302018 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yqyb201302018 .

D L PENG , Y LI , M FU , 等 . Study on parasitic time grating sensors used for mechanical transmission error measurement under harsh and special environment . Chinese Journal of Scientific Instrument , 2013 . 34 ( 2 ): 359 - 365 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yqyb201302018 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yqyb201302018 .

彭东林 , 付敏 , 陈锡侯 , 等 . 典型位移传感器分类研究与时栅传感器特点分析 . 机械工程学报 , 2018 . 54 ( 10 ): 36 - 42 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jxgcxb201810006 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jxgcxb201810006 .

D L PENG , M FU , X H CHEN , 等 . Classification study on typical displacement sensors and analysis on the characteristics of time grating sensors . Journal of Mechanical Engineering , 2018 . 54 ( 10 ): 36 - 42 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jxgcxb201810006 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jxgcxb201810006 .

武亮 , 彭东林 , 汤其富 , 等 . 寄生式时栅位移传感器测量原理与结构优化 . 仪器仪表学报 , 2016 . 17 ( 5 ): 976 - 984 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yqyb201605003 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yqyb201605003 .

L WU , D L PENG , Q F TANG , 等 . Measurement principle and structure optimization of parasitic time grating displacement sensor . Chinese Journal of Scientific Instrument , 2016 . 17 ( 5 ): 976 - 984 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yqyb201605003 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yqyb201605003 .

杨洪涛 , 章刘沙 , 费业泰 , 等 . 寄生式时栅角位移传感器误差源分析与验证 . 华中科技大学学报(自然科学版) , 2016 . 44 ( 6 ): 40 - 45 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=hzlgdxxb201606008 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=hzlgdxxb201606008 .

H T YANG , L SH ZHANG , Y T FEI , 等 . Error source analysis and verification of parasitic time grating angular displacement sensor . Journal of Huazhong University of Science of Technology(Natural Science Edition) , 2016 . 44 ( 6 ): 40 - 45 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=hzlgdxxb201606008 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=hzlgdxxb201606008 .

刘小康 , 彭凯 , 王先全 , 等 . 纳米时栅位移传感器的理论模型与误差分析 . 仪器仪表学报 , 2014 . 35 ( 5 ): 1136 - 1142 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yqyb201405024 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yqyb201405024 .

X K LIU , K PENG , X Q WANG , 等 . Theoretical model and error analysis of nanometer time grating displacement sensor . Chinese Journal of Scientific Instrument , 2014 . 35 ( 5 ): 1136 - 1142 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yqyb201405024 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yqyb201405024 .

刘小康 , 蒲红吉 , 郑方燕 , 等 . 纳米时栅位移传感器电场分布与误差特性研究 . 仪器仪表学报 , 2013 . 34 ( 10 ): 2257 - 2264 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yqyb201310015 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yqyb201310015 .

X K LIU , H J PU , F Y ZHENG , 等 . Research on electric field distribution and error characteristics of the nanometer time grating displacement sensor . Chinese Journal of Scientific Instrument , 2013 . 34 ( 10 ): 2257 - 2264 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yqyb201310015 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yqyb201310015 .

范兵 , 陈锡侯 , 肖朝晖 , 等 . 磁场式位移传感器误差的数理模型研究 . 仪器仪表学报 , 2016 . 17 ( 5 ): 985 - 992 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yqyb201605004 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yqyb201605004 .

B FAN , X H CHEN , CH H XIAO , 等 . Research on mathematical and physical model of magnetic displacement sensor error . Chinese Journal of Scientific Instrument , 2016 . 17 ( 5 ): 985 - 992 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yqyb201605004 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yqyb201605004 .

鲁进 , 陈锡侯 , 汤其富 , 等 . 变耦型时栅传感器及测头姿态对测量误差的影响 . 光学精密工程 , 2016 . 24 ( 9 ): 2271 - 2282 . http://ope.lightpublishing.cn/thesisDetails?columnId=1405787&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=1405787&Fpath=&index=-1&l=zh .

J LU , X H CHEN , Q F TANG , 等 . Variable coupling time grating sensor and effects of sensor-head attitudes on measuring error . Opt. Precision Eng. , 2016 . 24 ( 9 ): 2271 - 2282 . http://ope.lightpublishing.cn/thesisDetails?columnId=1405787&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=1405787&Fpath=&index=-1&l=zh .

K PENG , X K LIU , Z R CHEN , 等 . Sensing mechanism and error analysis of a capacitive long-range displacement nanometer sensor based on time grating . IEEE SENS J , 2017 . 17 ( 6 ): 1596 - 1607 . DOI: 10.1109/JSEN.2017.2654500 http://doi.org/10.1109/JSEN.2017.2654500 DOI: 10.1109/JSEN.2017.2654500 http://doi.org/10.1109/JSEN.2017.2654500 .

杨洪涛 , 章刘沙 , 周姣 , 等 . 寄生式时栅安装误差对传感器测量精度的影响 . 光学精密工程 , 2016 . 24 ( 2 ): 319 - 326 . http://ope.lightpublishing.cn/thesisDetails?columnId=1809304&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=1809304&Fpath=&index=-1&l=zh .

H T YANG , L SH ZHANG , J ZHOU , 等 . Effect of installation error of parasiyic time grating on sensor measuring accuracy . Opt. Precision Eng. , 2016 . 24 ( 2 ): 319 - 326 . http://ope.lightpublishing.cn/thesisDetails?columnId=1809304&Fpath=&index=-1&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=1809304&Fpath=&index=-1&l=zh .

孙世政 , 彭东林 , 付敏 , 等 . 提高嵌入式时栅传感器精度的测头设计方法 . 仪器仪表学报 , 2015 . 36 ( 1 ): 26 - 31 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yqyb201501003 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yqyb201501003 .

SH ZH SUN , D L PENG , M FU , 等 . Probe design method for improving the precision of embedded time grating sensor . Chinese Journal of Scientific Instrument , 2015 . 36 ( 1 ): 26 - 31 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yqyb201501003 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=yqyb201501003 .

浏览量

398

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

变耦型时栅传感器及测头姿态对测量误差的影响

嵌入式时栅传感器的动态自标定

光电经纬仪测量误差的实时修正