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1.西安交通大学 机械工程学院,陕西 西安 710049
2.西南科技大学 制造学院,制造过程测试技术教育部重点实验室,四川 绵阳 621010
[ "廖晓波(1982-),男,湖北天门人,西安交通大学机械工程博士研究生, 2008年于西南科技大学获得硕士学位,现为西南科技大学制造科学与工程学院讲师,主要研究方向为微纳检测与制造,机器视觉伺服控制。E-mail:liaoxiaobo@swust.edu.cn廖晓波(1982-),男,湖北天门人,西安交通大学机械工程博士研究生, 2008年于西南科技大学获得硕士学位,现为西南科技大学制造科学与工程学院讲师,主要研究方向为微纳检测与制造,机器视觉伺服控制。E-mail:liaoxiaobo@swust.edu.cn" ]
[ "庄 健(1974-),男,江苏南通人,博士,教授,博士生导师,1999年于西安交通大学获得硕士学位,2002年于西安交通大学获得博士学位,主要研究方向为微纳测量技术、智能优化算法、机电控制系统。E-mail:zhuangjian@mail.xjtu.edu.cn" ]
收稿日期:2021-04-07,
修回日期:2021-06-24,
纸质出版日期:2021-10-15
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廖晓波,庄健,程磊等.微移液管探针结构读写的环境湿度控制方法[J].光学精密工程,2021,29(10):2432-2443.
LIAO Xiao-bo,ZHUANG Jian,CHENG Lei,et al.Environmental humidity control method for structural reading and writing based on micropipette probe[J].Optics and Precision Engineering,2021,29(10):2432-2443.
廖晓波,庄健,程磊等.微移液管探针结构读写的环境湿度控制方法[J].光学精密工程,2021,29(10):2432-2443. DOI: 10.37188/OPE.20212910.2432.
LIAO Xiao-bo,ZHUANG Jian,CHENG Lei,et al.Environmental humidity control method for structural reading and writing based on micropipette probe[J].Optics and Precision Engineering,2021,29(10):2432-2443. DOI: 10.37188/OPE.20212910.2432.
为了克服环境湿度变化对微移液管探针结构读写稳定性的不利影响,本文首先设计了一种混合室和工作室的双气室结构,在工作室的内置隔板上均匀分布小孔形成均匀的微气流,确保工作室内湿度均匀并减小对工作点气流扰动的影响。然后,通过数值模拟验证了设置混合室和工作室双气室结构的合理性,且以小于0.06 m·s
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1
流速对工作室进行双侧充气时,对工作点的气流扰动小于50 μm·s
-
1
。制作实物并实验表明,该系统能够在5分钟内将工作室的湿度控制在给定值(环境温度25 ℃),且相对湿度的稳态误差为2.59%;通过控制环境湿度,对比不同湿度条件下微移液管探针电沉积(写)结构质量和扫描(读)成像质量,发现该环境湿度控制方法能够满足微移液探针微纳读写的工作要求。该方法对提高基于移液管探针微结构制造和检测的稳定性和可靠性具有重要的现实意义。
To overcome the adverse effects of environmental humidity changes on structural reading and writing using a micropipette probe
this study designs a double air chamber structure with mixing and working chambers
and evenly distributes the air flow holes in the partitioning in the work chamber to form a uniform micro air flow. The purpose of these designs is to ensure uniform humidity in the micro-nano processing area of the working chamber and reduce the impact of air flow disturbance on the micro-nano working area. Then
the rationality of the double-air chamber structure with mixing and working compartments was verified by numerical simulation. When the working chamber is inflated on both sides with a flow rate of less than 0.06 m·s
-1
airflow disturbance at the working point is less than 50 μm·s
-1
. Experiments using homemade experimental equipment demonstrated that the system can maintain the humidity of the working chamber at a given value (ambient temperature 25℃) for a duration of 5 min
with a steady-state error in relative humidity of 2.59%. Comparing the micropipette probe electrodeposition (write) structure quality and scanning (read) imaging quality at different humidities revealed that the environmental humidity control method can meet the work requirements of micropipette probe micro-nano reading and writing. Therefore
the microenvironment humidity control method has important practical significance for improving the stability and reliability of micropipette-based probe micro structure manufacturing and detection.
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