ZHOU Zhipeng,LOU Yingtian,WANG ShengFan,et al.Error compensation for laser heterodyne interferometric displacement measurement based on Kalman filter[J].Optics and Precision Engineering,2024,32(03):357-365.
ZHOU Zhipeng,LOU Yingtian,WANG ShengFan,et al.Error compensation for laser heterodyne interferometric displacement measurement based on Kalman filter[J].Optics and Precision Engineering,2024,32(03):357-365.DOI: 10.37188/OPE.20243203.0357.