应用多模式组合加工技术修正大口径非球面环带误差

李俊峰; 谢京江; 宋淑梅; 陈 亚; 宣 斌; 王 朋; 陈晓苹

doi:10.3788/OPE.20101807.1460

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应用多模式组合加工技术修正大口径非球面环带误差

现代应用光学 | 更新时间：2020-08-12

- 应用多模式组合加工技术修正大口径非球面环带误差
- Zonal error removal for large aspheric with multi-mode combined manufacture technique
- 光学精密工程 2010年18卷第7期页码：1460-1467
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所光学系统先进制造技术重点实验室,吉林长春,130033
  2. 中国科学院研究生院北京,100039
- 作者简介：
- 基金信息：
  
  中科院三期知识创新工程资助项目()
- DOI：10.3788/OPE.20101807.1460
  中图分类号：
- 收稿日期：2010-03-29，
  
  修回日期：2010-05-31，
  
  网络出版日期：2010-07-30，
  
  纸质出版日期：2010-07-20
- 稿件说明：
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李俊峰, 谢京江, 宋淑梅, 陈亚, 宣斌, 王朋, 陈晓苹. 应用多模式组合加工技术修正大口径非球面环带误差[J]. 光学精密工程, 2010,18(7): 1460-1467

LI Jun-feng, XIE Jing-jiang, SONG Shu-mei, CHEN Ya, XUAN Bin, WANG Peng, CHEN Xiao-ping. Zonal error removal for large aspheric with multi-mode combined manufacture technique[J]. 光学精密工程, 2010,18(7): 1460-1467
李俊峰, 谢京江, 宋淑梅, 陈亚, 宣斌, 王朋, 陈晓苹. 应用多模式组合加工技术修正大口径非球面环带误差[J]. 光学精密工程, 2010,18(7): 1460-1467 DOI： 10.3788/OPE.20101807.1460.

LI Jun-feng, XIE Jing-jiang, SONG Shu-mei, CHEN Ya, XUAN Bin, WANG Peng, CHEN Xiao-ping. Zonal error removal for large aspheric with multi-mode combined manufacture technique[J]. 光学精密工程, 2010,18(7): 1460-1467 DOI： 10.3788/OPE.20101807.1460.

摘要

为了满足大口径非球面光学元件加工的需求

提出了用多模式组合加工(MCM)技术修正大口径非球面反射镜环带误差的方法。本文讨论的MCM技术以经典加工工艺为基础

采用抛光盘的多工位加工和抛光模式的组合完成光学元件的抛光

实现对光学表面中低频段误差的有效控制。介绍了MCM技术的重要组成部分JP-01抛光机械手的工作原理

分析了MCM的工作模式。采用MCM技术对

1 230 mm的非球面反射镜进行环带误差的修正

给出了镜面面形检测结果。实验结果表明

MCM技术可以有效地控制光学表面的中低频误差

使光学表面误差得到有效收敛

从而显著提高抛光效率。目前

采用MCM技术加工1~2 m口径的同轴非球面

其精度可以达到30 nm(RMS)。

Abstract

In order to satisfy the requirements of large mirrors for the fabrication precision

the removal of zonal errors for a large aspheric is analyzed with the Multi-mode Combined Manufacture (MCM) technique in this study. The MCM technology discussed is based on the traditional fabrication theory

in which the multi-mode machining combined the multiple polishing of the laps is used to finish the optical component to control the low and middle frequency errors effectively of the optical surface. The principle of JP-01 polishing manipulator which is an important part of the MCM technology is presented

and the working mode of MCM is analyzed in detail. Finally

the MCM technology is used to deal with the zonal error of an aspheric with the aperture of 1 230 mm. The experimental results show that the MCM technology can control the low and middle frequency errors of the optical surface effectively

constrain the surface error and improve the polishing efficiency observably. At present

the precision of a large on-axis mirror with the aperture of 1-2 m has reached 30 nm(RMS). These results prove that the MCM can be one of the important technologies for the development of the large mirror manufacture.

关键词

Keywords

references

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