紫外全息闪耀光栅的制作

谭 鑫; 李文昊; 巴音贺希格; 齐向东

doi:10.3788/OPE.20101807.1536

您当前的位置：

首页 >

文章列表页 >

紫外全息闪耀光栅的制作

现代应用光学 | 更新时间：2020-08-12

- 紫外全息闪耀光栅的制作
- Fabrication of ultraviolet holographic blazed grating
- 光学精密工程 2010年18卷第7期页码：1536-1542
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.60478043)();十一五"();国家科技支撑计划重大项目(No.2006BAK03A02)();国家创新方法工作专项资助项
- DOI：10.3788/OPE.20101807.1536
  中图分类号：
- 收稿日期：2009-12-09，
  
  修回日期：2010-01-15，
  
  网络出版日期：2010-07-30，
  
  纸质出版日期：2010-07-20
- 稿件说明：
移动端阅览
谭鑫, 李文昊, 巴音贺希格, 齐向东. 紫外全息闪耀光栅的制作[J]. 光学精密工程, 2010,18(7): 1536-1542

Tan Xin, Li Wen-hao, Bayanheshig, QI Xiang-dong. Fabrication of ultraviolet holographic blazed grating[J]. 光学精密工程, 2010,18(7): 1536-1542
谭鑫, 李文昊, 巴音贺希格, 齐向东. 紫外全息闪耀光栅的制作[J]. 光学精密工程, 2010,18(7): 1536-1542 DOI： 10.3788/OPE.20101807.1536.

Tan Xin, Li Wen-hao, Bayanheshig, QI Xiang-dong. Fabrication of ultraviolet holographic blazed grating[J]. 光学精密工程, 2010,18(7): 1536-1542 DOI： 10.3788/OPE.20101807.1536.

摘要

通过理论计算研究了影响闪耀光栅衍射效率的因素

并利用离子束刻蚀模拟程序模拟刻蚀闪耀光栅来确定闪耀光栅的制作参数。以理论计算的闪耀光栅参数为依据

以刻蚀模拟程序为指导

基于全息-离子束刻蚀工艺制作了闪耀波长分别为250 nm和330 nm

光栅尺寸分别为85 mm85 mm

60 mm60 mm

线密度均为1 200 lp/mm的闪耀光栅。第一种光栅闪耀角为8.54

非闪耀角为72

其250 nm波长自准直入射时的-1级衍射光衍射效率约为81%;第二种光栅闪耀角为11.68

非闪耀角为74

330 nm波长自准直入射时的-1级衍射光衍射效率约为80%。实验结果表明

提出的方法可以在制作闪耀光栅的过程中实现对闪耀角的精确控制

获得的实验结果与理论计算结果符合较好。利用该方法能够在大尺寸基底上获得衍射效率＞75%的紫外闪耀光栅。

Abstract

The factors effecting on the diffraction efficiencies of blazed gratings were researched and the parameters fabricating the blazed gratings were determined by holographic ion beam etching. On the basis of above

two kinds of blazed gratings with a line density of 1200 lp/mm and blazed wavelength of 250 nm and 330 nm were fabricated

respectively

and then their blazed angles were measured by a Atomic Force Microscopy(AFM) and the diffraction efficiencies were measured by a plane grating diffraction efficiency instrument. Obtained results show that the 250 nm blazed grating with a size of 85 mm85 mm has a blazed angle of 8.54and a right angle of 72 and its diffraction efficiency is about 81% at 250 nm. Moreover

the 330 nm blazed grating with a size of 60 mm60 mm has a blazed angle of 11.68and a right angle of 74 and its diffraction efficiency is about 80% at 330 nm. These data demonstrate that experimental results are well in agreement with that calculated ones and illustrate that blazed angles can be controlled in grating fabrication process. By using the proposed method

the ultraviolet blazed gratings with diffraction efficiency more than 75% can be fabricated on a large size substrate.

关键词

Keywords

references

JOHNSON L F,INGERSOLL K A. Asymmetric triangular grating profiles with 90 groove angles produced by ion-beam erosion[J]. Appl.Opt. 1981,20(17):2951-2961.

AOYAGI Y,NAMBA S. Blazed ion-etched holographic gratings[J]. Opt. Acta. 1976,23(9):701-707.

NELLES B, HEIDEMANN K F,KLEEMANN B. Design, manufacturing and testing of gratings for synchrotron radiation[J]. Nucl. Instrum. Methods Phys. Res. A,2001,23(9):260-266.

OSTERRIED K,HEIDEMANN K F,NELLES B. Groove profile modification of blazed gratings by dip coating with hardenable liquids[J]. Appl. Opt. 1998,50(37):8002-8007.

de MELLO B A,da COSTA I F,LIMA C R A,et al.. Developed profile of holographically exposed photoresist gratings[J]. Appl. Opt. 1995,50(34):597-603.

LIN H, LI L F. Fabrication of extreme-ultraviolet blazed gratings by use of direct argonoxygen ion-beam etching through a rectangular photoresist mask[J]. Appl. Opt.2008,50(47):6212-6218.

赵博,齐向东. 高效平面全息衍射光机的获取方法[J]. 光学精密工程, 2001,9(2):109-114. ZHAO B , QI X D. Manufacturing of high efficient holographic diffraction gratings[J]. Opt. Precision Eng.,2001,9(2):109-114. (in Chinese)

HUTLEY M C. Diffraction Gratings[M].America Academic, 1982.

TAN X, LIU Y, LIU ZH K. Performance of a soft X-ray splitter grating parallelism measuring system by diffraction method[J]. Journal of Functional Materials and Devices, 2009,17(15):61-65.

LIU Y,TAN X,LIU ZH K. Soft X-ray holographic grating beam splitter including a double frequency grating for interferometer pre-alignment

. Optics Express, 2008,17(16):14761-14770.

巴音贺希格, 朱洪春. 基于槽形函数拟合的刻划光栅衍射特性分析方法[J]. 物理学报,2007 80(56):3893-3899. BAYANHESHIG, ZHU H C, Analytical method of the diffraction characteristic of ruled grating based on profile fitting function[J]. Acta Physica Sinica, 2007,80(56):3893-3899. (in Chinese)

巴音贺希格,齐向东,唐玉国. 位相光栅色散特性的矢量衍射理论分析[J]. 物理学报,2003,80(52):1157-1161. BAYANHESHIG,QI X D,TANG Y G.The vector diffraction theory analysis of chromatic dispersion characteristics of phase grating[J]. Acta Physica Sinica, 2003,80(52):1157-1161.(in Chinese)

谭鑫,刘颖,徐向东,等. 13.9 nm Laminar 分束光栅的研制[J]. 光学精密工程,2009,15(1):33-37. TAN X, LIU Y, XU X D.13.9 nm Laminar grating as beam splitter[J]. Opt. Precision Eng., 2009,15(1):33-37.(in Chinese)

浏览量

549

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

闪耀全息光栅离子束刻蚀工艺模拟及实验验证

闪耀透射光栅衍射规律的分析和验证

基于解析分区法设计闪耀全息凹面光栅

用于飞秒激光制备光纤光栅的相位掩模研制

高精度测温拉曼激光雷达光谱仪的光学设计