变包含角平面光栅单色器扫描转角精度的检测

卢启鹏; 马 磊; 彭忠琦

doi:10.3788/OPE.20101807.1548

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变包含角平面光栅单色器扫描转角精度的检测

现代应用光学 | 更新时间：2020-08-12

- 变包含角平面光栅单色器扫描转角精度的检测
- Rotation-angle-accuracy measurement of scanning mechanism in variable included angle plane grating monochromater
- 光学精密工程 2010年18卷第7期页码：1548-1553
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春,130033
  2. 中国科学院研究生院北京,100039
- 作者简介：
- 基金信息：
  
  国家重大科学工程上海光源工程项目(No.SS-06,O7093XQ070)();应用光学国家重点实验室开放基金资助项目(No.O9Q33FQ091)()
- DOI：10.3788/OPE.20101807.1548
  中图分类号：
- 收稿日期：2009-10-15，
  
  修回日期：2009-11-23，
  
  网络出版日期：2010-07-30，
  
  纸质出版日期：2010-07-20
- 稿件说明：
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卢启鹏, 马磊, 彭忠琦. 变包含角平面光栅单色器扫描转角精度的检测[J]. 光学精密工程, 2010,18(7): 1548-1553

LU Qi-peng, MA Lei, PENG Zhong-qi. Rotation-angle-accuracy measurement of scanning mechanism in variable included angle plane grating monochromater[J]. 光学精密工程, 2010,18(7): 1548-1553
卢启鹏, 马磊, 彭忠琦. 变包含角平面光栅单色器扫描转角精度的检测[J]. 光学精密工程, 2010,18(7): 1548-1553 DOI： 10.3788/OPE.20101807.1548.

LU Qi-peng, MA Lei, PENG Zhong-qi. Rotation-angle-accuracy measurement of scanning mechanism in variable included angle plane grating monochromater[J]. 光学精密工程, 2010,18(7): 1548-1553 DOI： 10.3788/OPE.20101807.1548.

摘要

针对上海光源(SSRF)软X射线谱学显微光束线站高分辨变包含角单色器(VAPGM)在超高真空环境下对波长扫描机构转角精度的现场测试

提出了一种实用、有效的检测方法。采用自制的多角棱镜

结合高精度光电自准直仪进行现场测试。首先

介绍了单色器波长扫描原理

给出角度与波长的关系;接着

理论分析了转角精度与系统分辨率之间的关系;最后

介绍了该方法的检测原理、装置及检测步骤。利用该方法完成了VAPGM平面镜(PM)和平面光栅(PG)转角精度的检测

结果分别为0.19

0.22

满足单色器技术指标要求。在电离室在线检测了标定后的单色器系统的分辨率

测试结果好于10 000

进一步验证了该检测方法的有效性。

Abstract

A simple

practical

and effective method for measuring the rotation-angle-accuracy of the wavelength scanning mechanism in a Variable Included Angle Plane Grating Monochromator (VAPGM) was proposed in an ultra-high vacuum environment. The method was achieved by using a special angle mirror and a high-precision photoelectric autocollimator. Firstly

the relationship between angle and wavelength was described on the basis of the principle of VAPGM wavelength scanning. Then

the dependence of rotation-angle-accuracy on system resolution was analyzed. Finally

the principle

devices and steps of the method were introducted in detail.By using this method

the rotation-angle-accuracies of the Plane Mirror (PM) and the Plane Grating (PG) were measured

and the results show that they are 0.19and 0.22

respectively

which fulfills the technical requirements of VAPGM. The resolution power of this monochromator was tested by an ionization chamber after measuring the rotation-angle-accuracy

and the result is superior to 10000. The experimental result further verifies that the method is effective.

关键词

Keywords

references

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