高能激光反射镜热变形补偿

冯志庆; 白 兰; 张增宝; 林冠宇

doi:10.3788/OPE.20101808.1781

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高能激光反射镜热变形补偿

现代应用光学 | 更新时间：2020-08-12

- 高能激光反射镜热变形补偿
- Thermal deformation compensation of high-energy laser mirrors
- 光学精密工程 2010年18卷第8期页码：1781-1787
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春,130033
  2. 大连理工大学物理与光电工程学院,辽宁大连,116024
  3. 大连民族学院理学院,辽宁大连,116600
  4. 大连民族学院机电信息工程学院,辽宁大连,116600
  5. 中国科学院大连化学与物理研究所化学激光国家重点实验室,辽宁大连,116023
- 作者简介：
- 基金信息：
  
  国家863高技术研究发展计划资助项目(No.2015AA123703)
- DOI：10.3788/OPE.20101808.1781
  中图分类号： TN243
- 收稿日期：2010-04-23，
  
  修回日期：2010-06-17，
  
  网络出版日期：2010-08-20，
  
  纸质出版日期：2010-08-20
- 稿件说明：
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冯志庆, 白兰, 张增宝, 林冠宇. 高能激光反射镜热变形补偿[J]. 光学精密工程, 2010,18(8): 1781-1787

FENG Zhi-qing, BAI Lan, ZHANG Zeng-bao, LIN Guan-yu. Thermal deformation compensation of high-energy laser mirrors[J]. 光学精密工程, 2010,18(8): 1781-1787
冯志庆, 白兰, 张增宝, 林冠宇. 高能激光反射镜热变形补偿[J]. 光学精密工程, 2010,18(8): 1781-1787 DOI： 10.3788/OPE.20101808.1781.

FENG Zhi-qing, BAI Lan, ZHANG Zeng-bao, LIN Guan-yu. Thermal deformation compensation of high-energy laser mirrors[J]. 光学精密工程, 2010,18(8): 1781-1787 DOI： 10.3788/OPE.20101808.1781.

摘要

研制了一套由压电陶瓷驱动器、压力传感器、环状力施加机构和控制电路组成的反射镜动态热变形补偿系统用于补偿激光反射镜热变形球差。圆形反射镜在两个同轴不同半径的环形力作用下

其内环区域产生曲率可变的抛物面形变

由此补偿反射镜热变形带来的球差项。对镜体进行了有限元数值计算

建立了变形量与沉积热量与受力的关系。采用口径为100 mm

厚度为8 mm平面反射镜进行了受力-变形以及辐照-受力-变形实验

利用干涉仪对面型进行监测。研究表明

在不同推力作用下

有效区域内变形始终保持抛物面形。给出了推力-面型变化曲线

在225 N推力下

中心最大变形超过3 m。在不同热沉积量下

镜体中心位移和受力保持线性关系

力-变形系数为0.013 m/N。

Abstract

A compensation system composed of a PZT

a pressure sensor

an annular force mechanism and a control circuit is developed to compensate the sphere error brought by thermal deformation of a laser mirror. Under the effect of two coaxial annular forces with different radii

the circular mirror produces parabolic deformation in the inner region

which can compensate the sphere error brought by the thermal deformation of the mirror. The finite element method is used to analyze the mirror and the relation among the center displacement with energy absorbance and the force is derived. The experiments of force-deformation and energy absorbance-force-deformation are conducted for a flat mirror with the diameter of 100 mm and the thickness of 8 mm

in which a interferometer is used to monitor the surface deformation. Obtained results show that under different forces

the deformation of effective region always maintains a parabolic shape. Furthermore

the force-deformation curve is obtained

which shows that the centre displacement is over 3 m under 225 N.Under different energy absorbances

the central displacement of the mirror varies with the force in linearity and the coefficient of force-centre displacement is 0.013 m/N.

关键词

Keywords

references

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