PC光学树脂计量圆光栅的制作

陈 赟; 王力锋; 李艳茹

doi:10.3788/OPE.20101808.1788

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PC光学树脂计量圆光栅的制作

现代应用光学 | 更新时间：2020-08-12

- PC光学树脂计量圆光栅的制作
- Manufacturing technology of PC optical resin metrological grating
- 光学精密工程 2010年18卷第8期页码：1788-1792
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
- 作者简介：
- 基金信息：
  
  中国科学院"();优秀博士学位论文、院长奖获得者科研启动专项资金"();资助项目(No.076131G070)()
- DOI：10.3788/OPE.20101808.1788
  中图分类号： TP212.12;TN305
- 收稿日期：2009-08-20，
  
  修回日期：2009-09-18，
  
  网络出版日期：2010-08-20，
  
  纸质出版日期：2010-08-20
- 稿件说明：
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陈赟, 王力锋, 李艳茹. PC光学树脂计量圆光栅的制作[J]. 光学精密工程, 2010,18(8): 1788-1792

Chen Yun, Wang Li-feng, Li Yan-ru. Manufacturing technology of PC optical resin metrological grating[J]. 光学精密工程, 2010,18(8): 1788-1792
陈赟, 王力锋, 李艳茹. PC光学树脂计量圆光栅的制作[J]. 光学精密工程, 2010,18(8): 1788-1792 DOI： 10.3788/OPE.20101808.1788.

Chen Yun, Wang Li-feng, Li Yan-ru. Manufacturing technology of PC optical resin metrological grating[J]. 光学精密工程, 2010,18(8): 1788-1792 DOI： 10.3788/OPE.20101808.1788.

摘要

为了解决目前计量圆光栅的玻璃基片无法适应振动强度大、冲击力强等恶劣环境的问题

提出了采取新型材料聚碳酸酯(PC)来替代玻璃作为计量圆光栅制作基片的方法。分析了PC光学树脂的透光特性、耐热性和耐化学性能

给出了清洗PC的具体配方;结合现有光刻复制工艺

研制出先胶后铬的新型复制工艺;最后

以PC作为计量圆光栅基片

在蒸镀真空度为1.210

-3

蒸发距离为150 mm的条件下

采用蒸发源质量控制膜厚的镀铬工艺参数

制作出了PC光学树脂基片的计量圆光栅。在45显微镜下观察光栅线条

结果显示

线条陡直

无龟裂

表明该新型工艺可行

工艺参数正确

为进一步研制以PC光学树脂计量圆光栅为核心元件的精密测角仪器等提供了试验基础。

Abstract

To solve the problems that the glass base slices of metrological gratings can not suffer the bad environments such as strong vibration and big impact

a new type material

Polycarbonate(PC)

was chosen to replace the glass to manufacture metrological gratings. The optical characteristics

light transmittance

heat tolerance and the chemical resistance of the PC were analyzed and a cleanout method for the PC was given. On the basis of traditional manufacturing of gratings

a new manufacturing technology

namely

coating first and vacuum plating Cr afterwards

was developed. Finally

by taking the PC as a base slice

a PC optical resin metrological grating was produced in the vacuum degree of 1.210

-3

Pa and evaporation distance of 150 mm

in which the film thickness was controlled by the quality of Cr. The PC metrological grating was observed in a 45 microscope.Results show that the edges of lines are vertical and no slips. The results indicate that the technology is feasible and technologic parameters are correct.It can provide an examination basis to develop precision measuring angle instruments.

关键词

Keywords

references

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