Wolter I型反射镜面形在线检测装置设计

崔天刚; 王永刚; 马冬梅; 马文生; 陈 波

doi:10.3788/OPE.20101808.1801

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Wolter I型反射镜面形在线检测装置设计

微纳技术与精密机械 | 更新时间：2020-08-12

- Wolter I型反射镜面形在线检测装置设计
- Design of online measuring device for surface profile of Wolter Type I mirror
- 光学精密工程 2010年18卷第8期页码：1801-1806
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
  2. 中国科学院研究生院北京,100039
- 作者简介：
- 基金信息：
  
  中科院创新基金资助项目(No.Y154451ZZ0)
- DOI：10.3788/OPE.20101808.1801
  中图分类号： TH703;TQ171.6+5
- 收稿日期：2010-04-01，
  
  修回日期：2010-05-10，
  
  网络出版日期：2010-08-20，
  
  纸质出版日期：2010-08-20
- 稿件说明：
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崔天刚, 王永刚, 马冬梅, 马文生, 陈波. Wolter I型反射镜面形在线检测装置设计[J]. 光学精密工程, 2010,18(8): 1801-1806

CUI Tian-gang, WANG Yong-gang, MA Dong-mei, MA Wen-sheng, CHEN Bo. Design of online measuring device for surface profile of Wolter Type I mirror[J]. 光学精密工程, 2010,18(8): 1801-1806
崔天刚, 王永刚, 马冬梅, 马文生, 陈波. Wolter I型反射镜面形在线检测装置设计[J]. 光学精密工程, 2010,18(8): 1801-1806 DOI： 10.3788/OPE.20101808.1801.

CUI Tian-gang, WANG Yong-gang, MA Dong-mei, MA Wen-sheng, CHEN Bo. Design of online measuring device for surface profile of Wolter Type I mirror[J]. 光学精密工程, 2010,18(8): 1801-1806 DOI： 10.3788/OPE.20101808.1801.

摘要

由于传统的基于干涉原理的测量方法无法对用于太阳X射线成像仪的Wolter I型旋转非球面反射镜进行检测

本文提出了一种在线检测此类反射镜面形的方法。以长程轮廓测量仪的原理为基础

经过改进、整合测量装置并在扫描机构中加入五角棱镜转折光路

搭建了一套Wolter I型旋转非球面反射镜面形检测装置

并对该装置的工作原理、结构参数设定以及数据处理算法等进行了研究。用一块标准平面反射镜作为基准面对该装置定标

并通过实测反射镜样品进行验证实验。实验结果表明:该装置的倾斜度测量误差为RMS 6.7 rad

重复精度为0.75 rad

轮廓测量精度约为PV 0.24

RMS 0.07

基本满足设计要求。

Abstract

As traditional interference-based measurements can not be suited to measure the surface profile of the Wolter Type I revolving aspheric mirror

a new method was proposed to measure this kind of mirror in this paper. On the basis of a Long Trace Profiler (LTP)

a new measuring device was also established by introducing a pentaprism into the scanning mechanism for ray turning. The working principles

structure parameters and data processing algorithms of the device were investigated

then a standard plane mirror was used as the reference to calibrate the device. Finally

a mirror sample was measured to verify the measuring device. Experimental results indicate that designed device can achieve the slope error of RMS 6.7 rad

repeatability of 0.75 rad and the height profiles of PV 0.24 and RMS 0.07

which meets the design requirements basically.

关键词

Keywords

references

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