点衍射波前位相的测评

马冬梅; 陈土泉

doi:10.3788/OPE.20101811.2390

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点衍射波前位相的测评

现代应用光学 | 更新时间：2020-08-12

- 点衍射波前位相的测评
- Test and evaluation of wavefront phase of point diffraction
- 光学精密工程 2010年18卷第11期页码：2390-2397
- 作者机构：
  
  1. 中国科学院研究生院,北京 100039
  2. 中国科学院长春光学精密机械与物理研究所,吉林长春 130033
- 作者简介：
- 基金信息：
  
  中科院长春光学精密机械与物理研究所创新基金资助项目()
- DOI：10.3788/OPE.20101811.2390
  中图分类号： O436.1;TH744.3
- 收稿日期：2010-07-01，
  
  修回日期：2010-08-06，
  
  网络出版日期：2010-11-25，
  
  纸质出版日期：2010-11-25
- 稿件说明：
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马冬梅, 陈土泉. 点衍射波前位相的测评[J]. 光学精密工程, 2010,18(11): 2390-2397

MA Dong-mei, CHEN Tu-quan. Test and evaluation of wavefront phase of point diffraction[J]. Editorial Office of Optics and Precision Engineering, 2010,18(11): 2390-2397
马冬梅, 陈土泉. 点衍射波前位相的测评[J]. 光学精密工程, 2010,18(11): 2390-2397 DOI： 10.3788/OPE.20101811.2390.

MA Dong-mei, CHEN Tu-quan. Test and evaluation of wavefront phase of point diffraction[J]. Editorial Office of Optics and Precision Engineering, 2010,18(11): 2390-2397 DOI： 10.3788/OPE.20101811.2390.

摘要

提出一种检测点衍射干涉仪关键部件针孔所产生的衍射光学波前的方法。介绍了点衍射波前的产生原理

分析了小孔质量状态、照明光路调整状态与波前各个像差分量之间的关系。基于信息光学基础理论

采用傅里叶变换和迭代算法

采集针孔衍射图像并进行计算分析

实现对衍射波前的位相复原以获得波前信息。阐述了测试方法的理论依据和计算公式

应用研制的位相复原分析计算软件测试并分析了实际采集的点衍射图像

通过15次的迭代

输出的位相值逐渐收敛

图像误差因子下降到0.12。目前

该方法已用于对针孔的筛选和针孔照明系统的装调中

实验结果证明了该测试方法的可行性。

Abstract

A testing method was proposed for the diffraction wavefront produced by a pinhole mounted in a point-diffraction interferometer. The producing principle of the point diffraction wavefront was presented

and the relation among the pinhole states

illumination adjustment and the wavefront aberration was analyzed. On the basis of the fundamental theory of information optics

the Fourier transform and an iterative algorithm were used to calculate and analyze the pinhole diffuse image

retrieve the phase of diffraction wavefront and then to obtain the wavefront information. The related theory was discussed and the measured point diffraction image was analyzed through a computing software of phase retrieval. Results indicate that the output phase tends to a convergence after about 15 iterations

and the image error factor has dropped to 0.12. The testing method has been applied to the selection of pinholes and the assembly of pinhole illumination systems

and experimental results prove that the testing method is valid.

关键词

Keywords

references

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