利用负刚度效应调谐的硅调谐式陀螺仪

杨波; 王寿荣; 李坤宇; 朱熙; 曹慧亮

doi:10.3788/OPE.20101811.2398

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利用负刚度效应调谐的硅调谐式陀螺仪

微纳技术与精密机械 | 更新时间：2020-08-12

- 利用负刚度效应调谐的硅调谐式陀螺仪
- Silicon tuning gyroscope tuned by negative stiffness effect
- 光学精密工程 2010年18卷第11期页码：2398-2406
- 作者机构：
  
  东南大学仪器科学与工程学院微惯性仪表与先进导航技术教育部重点实验室,江苏南京210096
- 作者简介：
- 基金信息：
  
  教育部博士点新教师基金资助项目(No.200802861063)();东南大学基本科研业务费创新基金资助项目(No.3222000501)();船舶工业国防预研基金资助
- DOI：10.3788/OPE.20101811.2398
  中图分类号： U666.123
- 收稿日期：2010-02-03，
  
  修回日期：2010-04-20，
  
  网络出版日期：2010-11-25，
  
  纸质出版日期：2010-11-25
- 稿件说明：
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杨波, 王寿荣, 李坤宇, 朱熙, 曹慧亮. 利用负刚度效应调谐的硅调谐式陀螺仪[J]. 光学精密工程, 2010,18(11): 2398-2406

YANG Bo, WANG Shou-rong, LI Kun-yu, ZHU Xi, CAO Hui-liang. Silicon tuning gyroscope tuned by negative stiffness effect[J]. Editorial Office of Optics and Precision Engineering, 2010,18(11): 2398-2406
杨波, 王寿荣, 李坤宇, 朱熙, 曹慧亮. 利用负刚度效应调谐的硅调谐式陀螺仪[J]. 光学精密工程, 2010,18(11): 2398-2406 DOI： 10.3788/OPE.20101811.2398.

YANG Bo, WANG Shou-rong, LI Kun-yu, ZHU Xi, CAO Hui-liang. Silicon tuning gyroscope tuned by negative stiffness effect[J]. Editorial Office of Optics and Precision Engineering, 2010,18(11): 2398-2406 DOI： 10.3788/OPE.20101811.2398.

摘要

为了验证硅调谐式陀螺仪原理的可行性

研究了硅调谐式陀螺仪的调谐机理

硅转子运动模态和加工工艺以及信号检测与再平衡控制回路。提出了一种利用力矩器的负刚度效应来实现硅调谐式陀螺仪调谐的新方法

推导了静电负刚度调谐的理论公式;设计、仿真、加工了硅薄片式转子平衡环部件和电容器极板

给出了电容信号敏感接口电路、升压放大电路、反馈校正电路和再平衡控制回路。在此基础上

实现了硅调谐式陀螺仪原理样机。试验结果证实

利用负刚度效应调谐是可行的

接口电路和再平衡控制回路设计是合理的。初步性能测试表明

硅调谐式陀螺仪可实现标度因数为1.42 mV/(()/s)

标度因数非线性为2.47％

量程为200 ()/s。试验结果验证了该陀螺仪基本原理的可行性。

Abstract

In order to verify the feasibility of the principle of a silicon tuning gyroscope

the tuning mechanism of the gyroscope

and the oscillation mode and process flows of a silicon rotor were introduced

and the signal detecting circuits and rebalancing control loops of the gyroscope were also researched. Then

a new tuning method which tuned the silicon tuning gyroscope by the negative stiffness effect from a moment meter was proposed. The tuned theoretical formula by negative stiffness effect was deduced

and the polar plate of a capacitor and the disc rotor with an equilibrium ring were designed

simulated and fabricated. Moreover

the interface circuit of sensing capacitance signals

the voltage booster circuit

feedback correcting circuit and the rebalancing control loop were designed. On the basis of above

a prototype of the silicon tuning gyroscope was achieved. Experiment results prove that the new tuning method based on the negative stiffness effect from moment meter is feasible

and the designs of interface circuits and rebalancing control loops are available. The preliminary performance test of the prototype shows that the scale factor is 1.42 mV/(()/s)

scale factor nonlinearity is 2.47％ and the maximum rate is 200 ()/s

which proves that the feasibility of the proposed tuning method for silicon tuning gyroscopes.

关键词

Keywords

references

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