力反馈式微机械加速度计刚度的自适应调整

李童杰; 刘云峰; 董景新; 范达

doi:10.3788/OPE.20101811.2430

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力反馈式微机械加速度计刚度的自适应调整

微纳技术与精密机械 | 更新时间：2020-08-12

- 力反馈式微机械加速度计刚度的自适应调整
- Adapting adjustment of stiffness for force feedback micro accelerometer
- 光学精密工程 2010年18卷第11期页码：2430-2436
- 作者机构：
  
  清华大学精密测试技术及仪器国家重点实验室北京,100084
- 作者简介：
- 基金信息：
  
  国家"();十一五"();预研项目(No.51308050208)()
- DOI：10.3788/OPE.20101811.2430
  中图分类号： TH824.4
- 收稿日期：2010-02-26，
  
  修回日期：2010-04-26，
  
  网络出版日期：2010-11-25，
  
  纸质出版日期：2010-11-25
- 稿件说明：
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李童杰, 刘云峰, 董景新, 范达. 力反馈式微机械加速度计刚度的自适应调整[J]. 光学精密工程, 2010,18(11): 2430-2436

LI Tong-jie, LIU Yun-feng, DONG Jing-xin, FAN Da. Adapting adjustment of stiffness for force feedback micro accelerometer[J]. Editorial Office of Optics and Precision Engineering, 2010,18(11): 2430-2436
李童杰, 刘云峰, 董景新, 范达. 力反馈式微机械加速度计刚度的自适应调整[J]. 光学精密工程, 2010,18(11): 2430-2436 DOI： 10.3788/OPE.20101811.2430.

LI Tong-jie, LIU Yun-feng, DONG Jing-xin, FAN Da. Adapting adjustment of stiffness for force feedback micro accelerometer[J]. Editorial Office of Optics and Precision Engineering, 2010,18(11): 2430-2436 DOI： 10.3788/OPE.20101811.2430.

摘要

为了提高模拟力平衡式电容微机械加速度计的鲁棒性和分辨率

对系统的非线性进行了研究。通过分析系统的数学模型

认为力发生器的非线性会引入一个可变负刚度。在传统方案中

为保证加速度计满量程时总刚度大于0

预载电压要小于失稳预载的0.707

这就造成在加速度输入较小时其总刚度较大

从而影响其阈值以及小输入时的分辨率。为弥补传统方案中力矩器非线性对系统分辨力的影响

本文应用自适应理论

提出一种基于总刚度不变的变预载自适应调整方法来提高闭环系统的鲁棒性和分辨率。设计了一种基于DSP的数字式微机械加速度计并进行了试验。试验结果表明

采用自适应调整方案后

加速度计在0

附近的分辨率由43.2

提高到11.3

1 g

附近的分辨率由36.4

提高到12.1

这些数据验证了自适应调整方案对系统性能的改进。

Abstract

To improve the roborant capacity and the resolution of a micromechanical accelerometer

the nonlinearity of the system was studied. The mathematic model of the system was discussed and the variable electrostatic stiffness brought by the nonlinearity of a electrostatic torque was analyzed. Analytical results show that the preload voltage is used to be less than 0.707 time of crippling load voltage so as to make total stiffness greater than zero

which will cause a poor resolution when the input is near 0

. In view of the nonlinear effect

an adaptive adjustment method in which the total stiffness was kept a constant and the preload voltage and the feedback voltage were renewed every sampling cycle was proposed to improve the stability and resolution of the system. Finally

a digital micro accelerometer based on DSP was developed

then it was tested by using the adaptive adjustment method. Experimental results indicate that the resolution of the accelerameter is improved from 43.2

to 11.3

near 0

and from 36.4 g to 12.1

near 1

. These data prove the system performance has been improved greatly.

关键词

Keywords

references

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