二维硅薄膜光子晶体波导的设计及制作

崔乃迪; 梁静秋; 梁中翥; 周建伟; 宁永强; 王维彪

doi:10.3788/OPE.20101812.2549

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二维硅薄膜光子晶体波导的设计及制作

现代应用光学 | 更新时间：2020-08-12

- 二维硅薄膜光子晶体波导的设计及制作
- Design and fabrication of two-dimensional photonic crystal waveguides on silicon films
- 光学精密工程 2010年18卷第12期页码：2549-2556
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春 130033
  2. 中国科学院研究生院北京,100039
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.60877031)()
- DOI：10.3788/OPE.20101812.2549
  中图分类号： 0734;TN252
- 收稿日期：2010-03-17，
  
  修回日期：2010-04-05，
  
  网络出版日期：2010-12-25，
  
  纸质出版日期：2010-12-25
- 稿件说明：
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崔乃迪, 梁静秋, 梁中翥, 周建伟, 宁永强, 王维彪. 二维硅薄膜光子晶体波导的设计及制作[J]. 光学精密工程, 2010,18(12): 2549-2556

CUI Nai-di, LIANG Jing-qiu, LIANG Zhong-zhu, ZHOU Jian-wei, NING Yong-qiang, WANG Wei-biao. Design and fabrication of two-dimensional photonic crystal waveguides on silicon films[J]. Editorial Office of Optics and Precision Engineering, 2010,18(12): 2549-2556
崔乃迪, 梁静秋, 梁中翥, 周建伟, 宁永强, 王维彪. 二维硅薄膜光子晶体波导的设计及制作[J]. 光学精密工程, 2010,18(12): 2549-2556 DOI： 10.3788/OPE.20101812.2549.

CUI Nai-di, LIANG Jing-qiu, LIANG Zhong-zhu, ZHOU Jian-wei, NING Yong-qiang, WANG Wei-biao. Design and fabrication of two-dimensional photonic crystal waveguides on silicon films[J]. Editorial Office of Optics and Precision Engineering, 2010,18(12): 2549-2556 DOI： 10.3788/OPE.20101812.2549.

摘要

为了制作可用于通信波段的二维硅光子晶体波导

研究了光子晶体波导的设计方法及制作工艺。应用平面波展开法计算了两种空气孔型光子晶体结构的TE波禁带

经筛选采用了三角晶格空气孔结构。同样利用平面波展开法计算了引入缺陷后二维三角晶格空气孔型光子晶体波导结构的TE波禁带

经对比发现归一化频率为0.295 7的缺陷态最适宜用来制备光子晶体波导

并据此设计了用于1.55 m波长的二维三角晶格空气孔型光子晶体波导

其晶格周期为458 nm

空气孔直径为339 nm。对设计的结构参数进行了容差计算

结果表明误差在-3.95~5.65 nm方能满足设计要求。最后使用聚焦离子束刻蚀工艺

制作了所设计的波导结构

并进行了测试。测试结果表明

样品实际晶格周期为463 nm

空气孔直径为344 nm

比设计值大5 nm

在容差允许范围内

满足设计要求。

Abstract

In order to fabricate two-dimensional photonic crystal waveguides on silicon films

the design method and fabrication techniques were investigated. Firstly

the TE bands of the two-dimensional square lattice and triangular lattice air hole structures were calculated by using the plane wave expansion method

and the two-dimensional triangular lattice air hole structure was chosen. Then

by adding a line defect

the photonic band gaps of the two-dimensional triangular lattice were calculated also by using the plane wave expansion method. The reasonable photonic band gap whose normalized frequency was 0.295 7 was chosen

and the structure parameters of two dimensional photonic crystal waveguides used in the 1.55 m were designed as the period of the lattice in 458 nm and the diameter of the air hole in 339 nm.Furthermore

the tolerances of structure paremeters were calculated as -3.95-5.65 nm. Finally

the photonic crystal waveguides were fabricated by using the focused ion beam etching. The testing shows that the period of the lattice is 463 nm

and the diameter of the hole is 344 nm

which are 5 nm larger than the design values

but still in the tolererce range.

关键词

Keywords

references

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