快速反射镜两轴柔性支承设计

鲁亚飞; 范大鹏; 范世珣; 张智永; 周擎坤

doi:10.3788/OPE.20101812.2574

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快速反射镜两轴柔性支承设计

微纳技术与精密机械 | 更新时间：2020-08-12

- 快速反射镜两轴柔性支承设计
- Design of two-axis elastic support for fast steering mirror
- 光学精密工程 2010年18卷第12期页码：2574-2582
- 作者机构：
  
  国防科技大学机电工程与自动化学院,湖南长沙,410073
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No. 50875257,No. 50805144)();湖南省自然科学基金资助项目(No. 09JJ4029)()
- DOI：10.3788/OPE.20101812.2574
  中图分类号： TH703
- 收稿日期：2010-04-06，
  
  修回日期：2010-05-10，
  
  网络出版日期：2010-12-25，
  
  纸质出版日期：2010-12-25
- 稿件说明：
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鲁亚飞, 范大鹏, 范世珣, 张智永, 周擎坤. 快速反射镜两轴柔性支承设计[J]. 光学精密工程, 2010,18(12): 2574-2582

LU Ya-fei, FAN Da-peng, FAN Shi-xun, ZHANG Zhi-yong, ZHOU Qing-kun. Design of two-axis elastic support for fast steering mirror[J]. Editorial Office of Optics and Precision Engineering, 2010,18(12): 2574-2582
鲁亚飞, 范大鹏, 范世珣, 张智永, 周擎坤. 快速反射镜两轴柔性支承设计[J]. 光学精密工程, 2010,18(12): 2574-2582 DOI： 10.3788/OPE.20101812.2574.

LU Ya-fei, FAN Da-peng, FAN Shi-xun, ZHANG Zhi-yong, ZHOU Qing-kun. Design of two-axis elastic support for fast steering mirror[J]. Editorial Office of Optics and Precision Engineering, 2010,18(12): 2574-2582 DOI： 10.3788/OPE.20101812.2574.

摘要

提出了基于集中柔度的柔性铰链单元的柔性支承结构

研究了这种柔性支承静动态特性的设计过程和设计方法。首先

从快速反射镜的工作机理出发

分析了系统对柔性支承的特性要求;然后

结合现有两种柔性支承结构的特点

提出基于集中柔度的柔性铰链单元的柔性支承设计;在分析单个柔性铰链刚度特性的基础上

研究了两轴柔性支承的设计方法;最后

以通光口径为

90 mm、行程为2 mrad、工作带宽为300 Hz的两轴快速反射镜为例

进行了两轴柔性支承的设计和特性计算。基于dSPACE半实物仿真系统建立了两轴柔性支承特性实验

对柔性支承的转动刚度进行测试

并对由设计的柔性支承组成的快速反射镜系统的控制性能进行分析。实验结果显示:设计的快速反射镜系统的一阶机械响应频率为78 Hz

闭环控制带宽为340 Hz

满足设计要求

表明基于集中柔度的柔性铰链单元的柔性支承可以满足行程若干mrad

工作带宽数百Hz的两轴快速反射镜的应用需求

且具有加工工艺性好

转动中心稳定等优点。

Abstract

A new elastic support based on the lumped compliance of flexure hinges was presented for a two-axis Fast Steering Mirror(FSM) system

and the methods to analyze the static and dynamic performance of the elastic support were researched. Firstly

the principle of two-axis FSM and the performance demand of an elastic support were analyzed

and the advantages and disadvantages of several existing elastic supports were researched.Then

a new elastic support based on a right-corner flexure hinge structure was put forward and the static and dynamic performance of the new elastic support was studied in detail. By taking a designed two-axis FSM with the performance in

90 mm beam aperture

2 mrad deflection angle and 300 Hz closed-loop bandwidth for an example

the characteristics of the elastic support were analyzed and the rotational stiffness of the elastic support was measured based on the dSPACE simulation system. Experimental results indicate that the elastic support can meet the performance of FSM well

and its first-order resonance frequency is 78 Hz

and the close-loop bandwidth tested is 340 Hz. It is concluded that the two-axis elastic support based on the lumped compliance of flexure hinge structure can be used for the FSM which needs several mrad deflection angles and several hundred Hz close-loop bandwidths

and it has advanteges in easy machining and a stable rotation center.

关键词

Keywords

references

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