用于高场非对称波形离子迁移谱系统的阵列式微法拉第筒离子检测器

唐飞; 王晓浩; 张亮

doi:10.3788/OPE.20101812.2597

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用于高场非对称波形离子迁移谱系统的阵列式微法拉第筒离子检测器

微纳技术与精密机械 | 更新时间：2020-08-12

- 用于高场非对称波形离子迁移谱系统的阵列式微法拉第筒离子检测器
- Array micro Faraday cup ion current detector for FAIMS
- 光学精密工程 2010年18卷第12期页码：2597-2602
- 作者机构：
  
  清华大学精密仪器与机械学系精密测试技术及仪器国家重点实验室北京,100084
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.60706030)();国家自然科学基金仪器专项资助项目(No.20827007)();国家863高技术研究发展计划资助项目(No.20
- DOI：10.3788/OPE.20101812.2597
  中图分类号： TL811
- 收稿日期：2010-03-16，
  
  修回日期：2010-05-04，
  
  网络出版日期：2010-12-25，
  
  纸质出版日期：2010-12-25
- 稿件说明：
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唐飞, 王晓浩, 张亮. 用于高场非对称波形离子迁移谱系统的阵列式微法拉第筒离子检测器[J]. 光学精密工程, 2010,18(12): 2597-2602

TANG Fei, WANG Xiao-hao, ZHANG Liang. Array micro Faraday cup ion current detector for FAIMS[J]. Editorial Office of Optics and Precision Engineering, 2010,18(12): 2597-2602
唐飞, 王晓浩, 张亮. 用于高场非对称波形离子迁移谱系统的阵列式微法拉第筒离子检测器[J]. 光学精密工程, 2010,18(12): 2597-2602 DOI： 10.3788/OPE.20101812.2597.

TANG Fei, WANG Xiao-hao, ZHANG Liang. Array micro Faraday cup ion current detector for FAIMS[J]. Editorial Office of Optics and Precision Engineering, 2010,18(12): 2597-2602 DOI： 10.3788/OPE.20101812.2597.

摘要

提出了一种可减小高场非对称波形离子迁移谱(FAIMS)系统体积的阵列式微法拉第筒离子检测器

该检测器具有结构简单、稳定性好、噪声小、量程大、可在大气压条件下工作等优点。阵列式微法拉第筒包括栅电极、敏感电极、屏蔽电极3部分

其中敏感电极由数十个直径为200 m的硅圆柱交错排列而成。通过典型的MEMS工艺制作

法拉第筒与平板型FAIMS系统的MEMS工艺完全兼容。Fluent仿真结果表明

这种阵列式的设计

气体运动阻力较小

流场分布有助于载气中离子被充分吸收。与KEITHLEY 237电流表级联后

测得阵列式微法拉第筒的噪声水平在0.5 pA以下。对丙酮样本进行了实验测试

结果显示其输出信号为210 pA左右

表明该阵列式微法拉第筒满足FAIMS系统的要求。

Abstract

An array micro Faraday cup ion current detector is presented. With its design

a simpler and smaller High-field Asymmetric Waveform Ion Mobility Spectrometry(FAIMS) could be achieved. Compared with other types of detectors

it has advantages in simplicity

stability

low noise

high measuring range

and atmosphere compatibility. The Array Micro Faraday Cup(AMFC) is made up of three parts:grid electrode

sensing array and shielding electrode

in which the sensing array is formed by dozens of 200-micron-diameter silicon cylinders in a staggered arrangement. The structure of the micro Faraday cup can be fabricated in a typical MEMS fabrication process

for it is totally compatible with the planar FAIMS micro chip. Fluent simulation results show that the design could realize a small fluid resistance force

and the flow field of the carrier gas is in favor of a better absorption of the ions. When it is combined with a KEITHLEY 237 electrometer

the noise level of the AMFC is about 0.5 pA

while the output signal of an acetone sample is about 120 pA. Obtained results show that the AMFC satisfies the requirements of FAIMS systems.

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references

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