弹性球状小磨头加工WolterⅠ型掠入射反射镜的去除函数

王永刚; 崔天刚; 马文生; 陈斌; 陈波

doi:10.3788/OPE.20111901.0010

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弹性球状小磨头加工WolterⅠ型掠入射反射镜的去除函数

现代应用光学 | 更新时间：2020-08-12

- 弹性球状小磨头加工WolterⅠ型掠入射反射镜的去除函数
- Removal function for fabrication of WolterⅠgrazing mirror by elastic ball tool
- 光学精密工程 2011年19卷第1期页码：10-16
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所, 吉林长春 130033
  2. 中国科学院研究生院北京,100039
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.10878004)()
- DOI：10.3788/OPE.20111901.0010
  中图分类号： TQ171.684
- 收稿日期：2010-02-09，
  
  修回日期：2010-04-14，
  
  网络出版日期：2011-01-22，
  
  纸质出版日期：2011-01-22
- 稿件说明：
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王永刚, 崔天刚, 马文生, 陈斌, 陈波. 弹性球状小磨头加工WolterⅠ型掠入射反射镜的去除函数[J]. 光学精密工程, 2010,19(1): 10-16

WANG Yong-gang, CUI Tian-gang, MA Wen-sheng, CHEN Bin, CHEN Bo. Removal function for fabrication of WolterⅠgrazing mirror by elastic ball tool[J]. Editorial Office of Optics and Precision Engineering, 2010,19(1): 10-16
王永刚, 崔天刚, 马文生, 陈斌, 陈波. 弹性球状小磨头加工WolterⅠ型掠入射反射镜的去除函数[J]. 光学精密工程, 2010,19(1): 10-16 DOI： 10.3788/OPE.20111901.0010.

WANG Yong-gang, CUI Tian-gang, MA Wen-sheng, CHEN Bin, CHEN Bo. Removal function for fabrication of WolterⅠgrazing mirror by elastic ball tool[J]. Editorial Office of Optics and Precision Engineering, 2010,19(1): 10-16 DOI： 10.3788/OPE.20111901.0010.

摘要

提出用弹性球状小磨头以旋进方式加工WolterⅠ型反射镜的柱面内表面

根据Preston方程、Hertz接触理论和掠入射反射镜特殊的柱面结构

推导出基于旋偏动模式的磨头去除函数理论模型。实验结果表明

理论去除函数曲线与实验曲线的均方根距离偏差

为0.101 22 m

偏差比值

为9.8%。分析验证了不同旋偏角对去除函数的影响并与理论模拟结果进行了比较。结果显示

随着旋偏角的增大

最大去除值位置逐渐向

轴正方向偏移。不同的旋偏角

最大理论去除深度与最大实际去除深度的均方根偏差为0.201 m;最大理论去除位置与最大实际去除位置的均方根偏差为0.255 mm。旋偏角越大

材料去除量就越多

去除函数也越显对称。实验结果很好地验证了去除函数理论模型的准确性

该模型可指导WolterⅠ型掠入射反射镜的加工

实现确定性材料去除。

Abstract

A novel technology for fabricating WolterⅠgrazing mirrors by an elastic ball tool was described in this paper. According to the Hertz contacting theory and Preston equation

a removal function model for tool movement on a cylinder surface was established based on the precession motion. The comparison of the theoretica1 model and the experimental results shows that the RMS distance warp between the theoretica1 removal function curve and the experimental curve is 0.101 22 m

and its deflection ratio is 9.8%. Furthermore

the effect of different precession angles on the removal function was validated

which points out that the larger the precession angle is

the more the material are removed and the max removal point moves to the centre of contact area closely. With different precession angles

the rms deviation of max removal depth is 0.201 m and the rms position deviation of max removal depth is 0.255 mm. The experimental results verify the feasibility of the theoretica1 model of removel function.The model can direct the fabrication of WolterⅠgrazing mirrors and can realize the deterministic material removal.

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Keywords

references

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