深紫外光刻照明系统光束整形单元的设计

赵阳; 巩岩

doi:10.3788/OPE.20111901.0029

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深紫外光刻照明系统光束整形单元的设计

现代应用光学 | 更新时间：2020-08-12

- 深紫外光刻照明系统光束整形单元的设计
- Design of beam shaping unit for deep ultraviolet lithographic illumination system
- 光学精密工程 2011年19卷第1期页码：29-34
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春,130033
  2. 中国科学院研究生院北京,100039
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.40974110)()
- DOI：10.3788/OPE.20111901.0029
  中图分类号： O435.1;TN305.7
- 收稿日期：2010-01-13，
  
  修回日期：2010-05-27，
  
  网络出版日期：2011-01-22，
  
  纸质出版日期：2011-01-22
- 稿件说明：
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赵阳, 巩岩. 深紫外光刻照明系统光束整形单元的设计[J]. 光学精密工程, 2010,19(1): 29-34

ZHAO Yang, GONG Yan. Design of beam shaping unit for deep ultraviolet lithographic illumination system[J]. Editorial Office of Optics and Precision Engineering, 2010,19(1): 29-34
赵阳, 巩岩. 深紫外光刻照明系统光束整形单元的设计[J]. 光学精密工程, 2010,19(1): 29-34 DOI： 10.3788/OPE.20111901.0029.

ZHAO Yang, GONG Yan. Design of beam shaping unit for deep ultraviolet lithographic illumination system[J]. Editorial Office of Optics and Precision Engineering, 2010,19(1): 29-34 DOI： 10.3788/OPE.20111901.0029.

摘要

为了使曝光波长为193 nm的深紫外光刻系统能够制备曝光线宽为90 nm及以下节点的集成电路芯片

设计了采用环形照明模式且部分相干因子

连续可调

能满足不同曝光线宽要求的光刻照明系统光束整形单元。首先

用几何光学定律和三角函数推导了轴锥镜移动距离与光束放大倍率之间的函数关系;根据对变倍凸轮的合理性和装调公差灵敏度的分析

确定了轴锥镜组参数的变化范围

完成了变倍镜组与轴锥镜组合的光束整形单元的设计。最后

在组合系统后面加入了可连续变倍的缩束系统

实现了

的连续可调。设计结果显示

在环形照明模式下

归一化的环宽

和外环直径

outer

分别在[0.25

1]和[0.4

内连续可调

满足设计要求。

Abstract

To manufacture the integrated circuit chips at 90 nm or below their nodes by using a 193 nm exposed wavelength deep ultraviolet lithography

a beam shaping unit for the lithographic illumination system was designed to achieve the annular illumination and the continuous adjustment of a partial coherent factor

to meet the requirements of different exposed line widths. Firstly

the function relationships between the moving distance of axicon and the light beam magnification were deduced by using the laws of geometric optics and trigonometric functions

and the ranges of parameters of axicon were determined after analyzing the feasibility of zoom cam and the tolerance sensitivities. Then

the axicon and zoom lens were combined to implement the beam shaping unit. Finally

a kind of reducing scale zoom lens was designed to add into the combined system to achieve the continuously adjustment of the

. The result shows that the normalized annular width

and the outer diameter of annulus

outer

can be adjusted continuously in the range of [0.25

1] and [0.4

respectively

which meets the needs of design.

关键词

Keywords

references

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