低电压下静电力驱动的数字微流控芯片

刘翔; 皋华敏; 李铁; 周萍; 王跃林

doi:10.3788/OPE.20111901.0097

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低电压下静电力驱动的数字微流控芯片

微纳技术与精密机械 | 更新时间：2020-08-12

- 低电压下静电力驱动的数字微流控芯片
- Digital microfluidic chip by electrostatic manipulation in low voltage
- 光学精密工程 2011年19卷第1期页码：97-102
- 作者机构：
  
  1. 中国科学院研究生院,北京 100049
  2. 中国科学院上海微系统与信息技术研究所传感技术联合国家重点实验室,上海 200050
- 作者简介：
- 基金信息：
  
  国家973重点基础研究发展计划资助项目(No.2006CB300403)();国家863高技术研究发展计划资助项目(No.2007AA03Z308)();国家自然基金委
- DOI：10.3788/OPE.20111901.0097
  中图分类号： TN303
- 收稿日期：2010-03-09，
  
  修回日期：2010-04-12，
  
  网络出版日期：2011-01-22，
  
  纸质出版日期：2011-01-22
- 稿件说明：
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刘翔, 皋华敏, 李铁, 周萍, 王跃林. 低电压下静电力驱动的数字微流控芯片[J]. 光学精密工程, 2010,19(1): 97-102

LIU Xiang, GAO Hua-min, LI Tie, ZHOU Ping, WANG Yue-lin. Digital microfluidic chip by electrostatic manipulation in low voltage[J]. Editorial Office of Optics and Precision Engineering, 2010,19(1): 97-102
刘翔, 皋华敏, 李铁, 周萍, 王跃林. 低电压下静电力驱动的数字微流控芯片[J]. 光学精密工程, 2010,19(1): 97-102 DOI： 10.3788/OPE.20111901.0097.

LIU Xiang, GAO Hua-min, LI Tie, ZHOU Ping, WANG Yue-lin. Digital microfluidic chip by electrostatic manipulation in low voltage[J]. Editorial Office of Optics and Precision Engineering, 2010,19(1): 97-102 DOI： 10.3788/OPE.20111901.0097.

摘要

设计并制作了一种基于静电力驱动的数字微流控芯片

用于构建芯片实验室。介绍了静电力驱动原理和芯片制作工艺流程

搭建了驱动检测实验平台。该芯片采用硅作衬底

氧化硅作绝缘层

TiW/Au为驱动电极阵列

氮化硅作介质层

碳氟聚合物为疏水层。由于采用开放式的结构

只需单层共平面控制电极

简化了工艺流程

优化了器件结构;而驱动电极阵列嵌入在氧化硅中

改善了减小介质层厚度时介质层对金属的台阶覆盖性

减少了电极边沿突起引起的边界击穿。另外

采用较薄的高质量介质层和疏水性能好的疏水膜层

大大降低了液滴驱动电压。实验显示

在20 V驱动电压下

该工艺可实现液滴按程序设定方式在二维平面内流畅运动

最大运动速度达96 mm/s。提出的芯片制作工艺简单

与IC工艺兼容

可应用于生化分析芯片实验室系统。

Abstract

A digital microfluidic chip by electrostatic manipulation was designed and fabricated for a micro total analysis system. The principle of the electrostatic manipulation was proposed and the fabrication processes and experimental platform were demonstrated. For the chip

the silicon was taken as a substrate

a silicon oxide film as the insulating layer

a TiW/Au film as the electrode array

a Si

film as the dielectric layer

and the fluorocarbon polymer as the hydrophobic layer. With an open structure instead of complex sandwich structure

the chip just needed a coplanar controlling electrode with one layer

so the process was simplified greatly. As the electrode array was embeded in the SiO

the electric leakage from poor step coverage and dielectric breakdown at the margin were prevented.Furthermore

with thin dielectric layer and fine hydrophobic layer

the manipulating voltage was reduced greatly. Experiments show that

by controlling the sequence of voltage to the electrode array

the droplet can be transported smoothly in the two-dimension planes with a programmable manner at a low voltage of 20 V

and the maximum speed has reached 96 mm/s. The digital microfluidic chip can be used in a Lab-on-chip due to its simple structure and IC compatible fabrication processes.

关键词

Keywords

references

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