对称式微波功率传感器的设计

王德波; 廖小平

doi:10.3788/OPE.20111901.0110

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对称式微波功率传感器的设计

微纳技术与精密机械 | 更新时间：2020-08-12

- 对称式微波功率传感器的设计
- Design of symmetrical microwave power sensor
- 光学精密工程 2011年19卷第1期页码：110-117
- 作者机构：
  
  东南大学电子科学与工程学院 MEMS教育部重点实验室,江苏南京 210096
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.60976094,No.60676043)();国家863高技术研究发展计划资助项目(No.2007AA04Z328)()
- DOI：10.3788/OPE.20111901.0110
  中图分类号： TN62;TP212.1
- 收稿日期：2010-03-08，
  
  修回日期：2010-05-28，
  
  网络出版日期：2011-01-22，
  
  纸质出版日期：2011-01-22
- 稿件说明：
移动端阅览
王德波, 廖小平. 对称式微波功率传感器的设计[J]. 光学精密工程, 2010,19(1): 110-117

WANG De-bo, LIAO Xiao-ping. Design of symmetrical microwave power sensor[J]. Editorial Office of Optics and Precision Engineering, 2010,19(1): 110-117
王德波, 廖小平. 对称式微波功率传感器的设计[J]. 光学精密工程, 2010,19(1): 110-117 DOI： 10.3788/OPE.20111901.0110.

WANG De-bo, LIAO Xiao-ping. Design of symmetrical microwave power sensor[J]. Editorial Office of Optics and Precision Engineering, 2010,19(1): 110-117 DOI： 10.3788/OPE.20111901.0110.

摘要

为了克服传统微波功率传感由于失配和热损耗带来的微波功率测量误差

提出了一种基于MEMS技术的对称式微波功率传感器

对该微波功率传感器的微波损耗、温度分布以及微波功率的精确测量进行了研究。首先

根据提出的损耗模型推导了微波损耗功率和损耗电压的表达式

并建立了该传感器的传热解析模型;接着

设计并制作了该微波功率传感器;最后

对该功率传感器的补偿因子、灵敏度和频率依赖特性进行了测试和分析。测试结果显示:该传感器在5

15 GHz频率下的补偿因子分别是1.56

2.12和2.56 dBm

灵敏度可达到0.18 mV/mW

输出电压与微波频率的相对偏差<2%。结果表明

对称式微波功率传感器可通过测量直流功率来实现测量微波功率的目的

且明显地提高了微波功率测量的精确度。

Abstract

In order to overcome the measurement errors of traditional microwave power sensors due to mismatch and thermal losses

a symmetrical microwave power sensor based on the Micro-electro-mechanical System(MEMS) was proposed and its microwave loss

temperature distribution and the accurate measurement were researched. Firstly

expressions of the loss power and loss voltage were derived according to the proposed loss model

and the heat transfer analytical model of the power sensor was established. Then

the sensor was designed and fabricated. Finally

the compensation factor

sensitivity and the frequency-dependent characteristics of the power sensor were measured and analyzed. The measurement results show that the compensation factor of the power sensor at 5

10 and 15 GHz are 1.56

2.12 and 2.56 dBm

respectively. The sensitivity is about 0.18 mV/mW

and the relative difference of the output voltage with the microwave frequency is below 2%. It is concluded that the symmetrical microwave power sensor can measure the microwave power by measuring the DC power

and also can improve the measurement accuracy of the microwave power significantly.

关键词

Keywords

references

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