基于555多谐振荡器检测的碳纳米管湿敏传感器

赵振刚; 刘晓为; 王鑫; 金海燕; 谭晓昀

doi:10.3788/OPE.20111901.0118

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基于555多谐振荡器检测的碳纳米管湿敏传感器

微纳技术与精密机械 | 更新时间：2020-08-12

- 基于555多谐振荡器检测的碳纳米管湿敏传感器
- Carbon nanotube sensors based on 555 multivibrators
- 光学精密工程 2011年19卷第1期页码：118-123
- 作者机构：
  
  1. 哈尔滨工业大学 MEMS中心,黑龙江哈尔滨 150001
  2. 哈尔滨工业大学微系统与微结构加工教育部重点实验室,黑龙江哈尔滨,150001
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.60776049)()
- DOI：10.3788/OPE.20111901.0118
  中图分类号： TN752.4;TP212.2
- 收稿日期：2010-03-17，
  
  修回日期：2010-06-02，
  
  网络出版日期：2011-01-22，
  
  纸质出版日期：2011-01-22
- 稿件说明：
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赵振刚, 刘晓为, 王鑫, 金海燕, 谭晓昀. 基于555多谐振荡器检测的碳纳米管湿敏传感器[J]. 光学精密工程, 2010,19(1): 118-123

ZHAO Zhen-gang, LIU Xiao-wei, WANG Xin, JIN Hai-yan, TAN Xiao-yun. Carbon nanotube sensors based on 555 multivibrators[J]. Editorial Office of Optics and Precision Engineering, 2010,19(1): 118-123
赵振刚, 刘晓为, 王鑫, 金海燕, 谭晓昀. 基于555多谐振荡器检测的碳纳米管湿敏传感器[J]. 光学精密工程, 2010,19(1): 118-123 DOI： 10.3788/OPE.20111901.0118.

ZHAO Zhen-gang, LIU Xiao-wei, WANG Xin, JIN Hai-yan, TAN Xiao-yun. Carbon nanotube sensors based on 555 multivibrators[J]. Editorial Office of Optics and Precision Engineering, 2010,19(1): 118-123 DOI： 10.3788/OPE.20111901.0118.

摘要

针对使用仪器检测电容型碳纳米管湿度传感器的电容信号不利于传感器的使用与推广问题

提出了一种基于555多谐振荡式电路检测的电容型碳纳米管湿度传感器。首先

分析了传感器工作原理以及检测电路的检测原理

设计并制作了电容型碳纳米管湿度传感器;然后

分别使用仪器及检测电路对传感器进行测试;最后

对传感器响应时间进行了测试与分析。实验结果表明

该传感器在环境相对湿度从11%变化到97%过程中

电容相对灵敏度为905%

输出频率相对灵敏度为889%

两者较为吻合

表明该电路能很好地将电容信号转化为频率信号输出。另外

传感器对湿度的响应时间约为4 s

恢复时间约为18 s

功耗约为12 mW

具有功耗低、响应速度快等优点。

Abstract

The capacitive signals of capacitive carbon nanotube humidity sensors are usually tested by measuring instruments

which restricts the uses and developments of the sensors seriously. Focusing on this problem

one kind of capacitive carbon nanotube humidity sensor based on a 555 multivibrator was presented. Firstly

the principle of the sensor and the detecting circuit were discussed

and the sensor was designed and fabricated. Then

the sensor was tested by both the RCL apparatus and the proposed circuit

respectively. Finally

the response and recovery time of the sensor was tested. The testing results demonstrate that when the Relative Humidities (RH) surrounding the sensor change from 11% to 97%

the capacitive sensitivity and the output frequency sensitivity of the sensor are 905% and 889%

respectively. The frequency sensitivity is closed to the capacitive sensitivity

which means the circuit can well change capacitive signals to frequency signals.Furthermore

the adesorption and desorption time of the sensor is about 4 s and 18 s

respectively

which shows the sensor can offer low power consumption and fast response and has potential application prospects.

关键词

Keywords

references

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