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Institute of High Current Electronics SB RAS, Akademichesky ave., 2/3 Tomsk,Russia,634055
收稿日期:2010-10-08,
修回日期:2010-10-30,
网络出版日期:2011-02-22,
纸质出版日期:2011-02-22
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TARASENKO V F, PANCHENKO A N, TEL’MINOV A E, GENIN D E. 用于激光器的电感储能发生器[J]. 光学精密工程, 2011,19(2): 213-220
TARASENKO V F, PANCHENKO A N, TEL’MINOV A E, GENIN D E. Generator with inductive energy storage for laser application[J]. Editorial Office of Optics and Precision Engineering, 2011,19(2): 213-220
TARASENKO V F, PANCHENKO A N, TEL’MINOV A E, GENIN D E. 用于激光器的电感储能发生器[J]. 光学精密工程, 2011,19(2): 213-220 DOI: 10.3788/OPE.20111902.0213.
TARASENKO V F, PANCHENKO A N, TEL’MINOV A E, GENIN D E. Generator with inductive energy storage for laser application[J]. Editorial Office of Optics and Precision Engineering, 2011,19(2): 213-220 DOI: 10.3788/OPE.20111902.0213.
研制了适用于激光器的电感储能发生器(GIES)
并研究了它在高压混合气体中的放电和激光参数。研究表明
电感储能发生器可产生高压预脉冲并引起放电电流的突然增大
可在不同的混合气体中形成长时间的稳定放电
从而方便地控制和优化每一种气体混合物的预脉冲参数。在未知IES击穿电压和首次放电幅度下的参数时
电流尖峰会按因子1.5~2减少
从而产生纯激光参数。得到了氮气激光器的最大的辐射功率
输出能量和脉冲持续时间
在脉冲持续时间为40 ns时
紫外输出高达50 mJ
红外输出高于25 mJ
实现了氮分子激光跃迁的级联激射。因此
C
3
П
u
-B
3
П
g
带总的脉冲持续时间延长至100 ns。在XeCl
XeF和KrF受激准分子激光器中
脉冲宽度和输出能量都得到了改善。XeF激光器的最大效率达到了1.6%
同时峰值输出能量达到了0.85 J
最大脉冲持续时间超过了200 ns。在248 nm波长处
效率3.3%的KrF激光器产生的160 ns脉冲能量高达650 mJ
最终得到了效率为7.7%~10%的非链式HF(DF)激光器。演示了基于CO
2
分子高峰值功率的有效运行
结果表明
激光器在10 600 nm处的输出能量为6.2 J
转换效率高达25%。
Generators with Inductive Energy Storage (GIES) are developed for laser applications. Discharge and laser parameters in high-pressure gas mixtures are studied. It is shown that the IES generator produces a high-voltage pre-pulse and the sharp increase of discharge current
which allows to form a long-lived stable discharge in different gas mixtures. Therewith the pre-pulse parameters can be easily controlled and optimized for each gas mixture. Without the IES breakdown voltage and amplitude of the first discharge
the current spike decreases by a factor of 1.5-2 and results in pure laser parameters.The maximal radiation power
output energy and the laser pulse duration of a N
2
laser are obtained. The UV output is as high as 50 mJ in 40 ns pulse duration (FWHM)
while that on the IR transition exceeds 25 mJ. The cascade lasing on N
2
molecule transitions is achieved. As a result
the total pulse duration on the
C
3
П
u
-B
3
П
g
band is extended up to 100 ns. The improvement of both pulse duration and output energy are achieved for XeCl
XeF and KrF excimer lasers. The maximal efficiency of XeF laser is as high as 1.6%
while peak output is 0.85 J and maximal pulse duration exceeds 200 ns. Up to 650 mJ in a 160 ns pulse is obtained at 248 nm by the discharge KrF laser with the efficiency of 3.3%.Finally
HF(DF) non-chain lasers with ultimate efficiency of 7.7-10% are developed
and the efficient operation on CO
2
molecules with high peak power is demonstrated. The laser output at 10 600 nm is 6.2 J with the efficiency up to 25%.
LONG W H, PLUMMER J,STAPPAERTS E A. Efficient discharge pumping of an XeCl laser using a high-voltage prepulse[J]. Appl. Phys. Lett., 1983,43(8):735-737.[2] TAYLOR R S,LEOPOLD K E. Ultralong optical-pulse corona preionized XeCl laser[J]. J. Appl. Phys., 1989,65(1):22-29.[3] KUSHNER M J. Microarcs as a termination mechanism of optical pulses in electric-discharge-excited KrF excimer lasers[J]. IEEE Trans. Plasma Sci., 1991,19(2):387-399.[4] BAKSHT E H,PANCHENKO A N,TARASENKO V F. Discharge lasers pumped by generators with inductive energy storage[J]. IEEE J. Quant. Electron., 1999,35(3):261-266.[5] BYCHKOV YU I,BAKSHT E H,PANCHENKO A N, et al.. Formation of pumping discharge of XeCl laser by means of semiconductor opening switch[J]. SPIE, 2001,4747:99-105.[6] BAKSHT E H,PANCHENKO A N,TARASENKO V F,et al.. Long-Pulse-Discharge XeF and KrF Lasers Pumped by a Generator with Inductive Energy Storage[J]. Jap. J. Appl.Phys., 2002,41(6A):3701-3703.[7] KONOVALOV I N,PANCHENKO A N, TARASENKO V F,et al.. Wide-aperture electric-discharge nitrogen laser[J]. Quant. Electron., 2007,37(7):623-627.[8] BURANOV S N,GOROKHOV V V,KARELIN V I,et al.. Electric discharge N2 laser with added SF6 and He[J]. Sov. J. Quantum Electronics, 1990,20(2):120-122.[9] SANZ F E,PEREZ J M G. A high power high energy pure N2 laser in the first and second positive systems[J]. Appl. Phys. B, 1991, 52(1):42-45.[10] MEI Q C,PETERS P J M,TRENTELMAN M,et al.. Optimisation of the pulse duration of a discharge-pumped XeF(BX) excimer laser[J]. Appl. Phys. B, 1995,60(6):553-556.[11] PANCHENKO A N,TARASENKO V F. On the Efficiency of Nonchain Electric-Discharge HF (DF) Lasers[J]. Russian Physics Journal, 2004,47(5):571-573.
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