制造用高功率激光器光束质量的评价与测量

陈虹; 王旭葆

doi:10.3788/OPE.20111902.0297

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制造用高功率激光器光束质量的评价与测量

现代应用光学 | 更新时间：2020-08-12

- 制造用高功率激光器光束质量的评价与测量
- Evaluation and measurement of beam quality of high power manufacturing laser
- 光学精密工程 2011年19卷第2期页码：297-303
- 作者机构：
  
  北京工业大学激光工程研究院北京,100124
- 作者简介：
- 基金信息：
  
  国家973重点基础研究发展规划资助项目(No.2006CB605206-3)();北京市教委科技计划资助项目(No.JC101012200903)()
- DOI：10.3788/OPE.20111902.0297
  中图分类号： TN249
- 收稿日期：2010-10-08，
  
  修回日期：2010-10-30，
  
  网络出版日期：2011-02-22，
  
  纸质出版日期：2011-02-22
- 稿件说明：
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陈虹, 王旭葆. 制造用高功率激光器光束质量的评价与测量[J]. 光学精密工程, 2011,19(2): 297-303

CHEN Hong, WANG Xu-bao. Evaluation and measurement of beam quality of high power manufacturing laser[J]. Editorial Office of Optics and Precision Engineering, 2011,19(2): 297-303
陈虹, 王旭葆. 制造用高功率激光器光束质量的评价与测量[J]. 光学精密工程, 2011,19(2): 297-303 DOI： 10.3788/OPE.20111902.0297.

CHEN Hong, WANG Xu-bao. Evaluation and measurement of beam quality of high power manufacturing laser[J]. Editorial Office of Optics and Precision Engineering, 2011,19(2): 297-303 DOI： 10.3788/OPE.20111902.0297.

摘要

建立了制造用高功率激光器光束质量的评价体系与测量方法

研究了该体系所采用的评价参数、测量原理、测量方法、测量仪器以及测量结果的计算和分析方法。首先

对目前存在的评价激光光束质量的参数进行了比较和判断。接着

以光束传输比(

)和光束参数积(

)为重点

阐述了光束质量评价参数与光束束宽定义之间的关系

提出了工业应用背景下光束质量的评价参数。最后

介绍了基于实测目的的光束质量测量方法和实际测量结果。测量结果显示

DC035Slab CO

激光器的

值为3.78 mmmrad

TLF6000tCO

激光器的

值为8.67 mmmrad

表明

值是评价制造用高功率激光器光束质量的较为合适的参数。由于该值是在实际光束传输路径上不同位置处对光束束宽进行测量后用双曲线方法拟合得到的结果

所以更好地反映了高功率激光束的传输和聚焦性能

诠释了激光制造系统的制造能力。

Abstract

The evaluation and measurement of the beam quality for a high power manufacturing laser were established based on modern laser manufacturing. The measuring parameters

measuring principle

method

equipment and calculation were investigated. Firstly

based on the parameter analysis on distinguishing the laser beam quality at present

the relationship between beam quality and beam width was discussed by taking the beam propagation ratio(

)and beam parameter product (

) for examples. Then

the proper parameters were proposed. Finally

a method based on the object of actual measurement and results were introduced. Experimental results indicate that the

value of DC035Slab CO

laser and TLF6000tCO

laser are 3.78 mmmrad and 8.67 mmmrad

respectively.It is concluded that the

value is the calculation results of hyperbolic fitting based on the actual measurement of beam radius at different positions along the laser beam propagating direction

the capability and focus ability of high power laser propagation can be reflected better

which defines well the laser performance for manufacturing systems.

关键词

Keywords

references

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