毫秒激光金属打孔的解析和实验

秦渊; 毕娟; 倪晓武; 沈中华; 张喜和

doi:10.3788/OPE.20111902.0340

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毫秒激光金属打孔的解析和实验

现代应用光学 | 更新时间：2020-08-12

- 毫秒激光金属打孔的解析和实验
- Analysis and experiment on millisecond pulsed laser drilling of metals
- 光学精密工程 2011年19卷第2期页码：340-347
- 作者机构：
  
  1. 南京理工大学理学院信息物理与工程系,江苏南京 210094
  2. 长春理工大学理学院,吉林长春 130022
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.60778006)();国防基础科研基金资助项目(No.A3620060122)()
- DOI：10.3788/OPE.20111902.0340
  中图分类号： TG665
- 收稿日期：2010-10-08，
  
  修回日期：2010-10-31，
  
  网络出版日期：2011-02-22，
  
  纸质出版日期：2011-02-22
- 稿件说明：
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秦渊, 毕娟, 倪晓武, 沈中华, 张喜和. 毫秒激光金属打孔的解析和实验[J]. 光学精密工程, 2011,19(2): 340-347

QIN Yuan, BI Juan, NI Xiao-wu, SHEN Zhong-hua, ZHANG Xi-he. Analysis and experiment on millisecond pulsed laser drilling of metals[J]. Editorial Office of Optics and Precision Engineering, 2011,19(2): 340-347
秦渊, 毕娟, 倪晓武, 沈中华, 张喜和. 毫秒激光金属打孔的解析和实验[J]. 光学精密工程, 2011,19(2): 340-347 DOI： 10.3788/OPE.20111902.0340.

QIN Yuan, BI Juan, NI Xiao-wu, SHEN Zhong-hua, ZHANG Xi-he. Analysis and experiment on millisecond pulsed laser drilling of metals[J]. Editorial Office of Optics and Precision Engineering, 2011,19(2): 340-347 DOI： 10.3788/OPE.20111902.0340.

摘要

研究了用毫秒脉宽的长脉冲激光单个脉冲打深孔的成形过程和打孔速率。首先

由切割法得到了1 ms脉宽的Nd∶YAG高斯激光对厚铝板打孔时孔的形貌

激光能量为7.9和28.9 J时

对应的孔深分别为1.849和2.975 mm。根据实验建立了轴对称模型

通过热传导方程得到了固相温度的解析解。然后

假设物质一旦熔融就离开孔

由能量平衡原理得到了孔形状的表达式。实验发现随激光能量增加

孔深增加

计算与实验结果差异也增大;进一步的计算显示

在其他条件不变时

光束半径的变化对孔深的影响较大。因此

引入离焦效应对算法进行了改进

改进后的计算结果与实验总体相符。最后

研究了长脉冲激光对铝、铜、银和钛4种金属的打孔速率

结果表明

钛对激光吸收最强、热传导率能力最弱

打孔速率最大。

Abstract

With the purpose of investigating the millimeter order hole's formation and the drilling speed drilled by a single millisecond pulse laser

the shapes of holes in an aluminium slab drilled by a Nd: YAG Gaussian laser with 1 ms pulse width were obtained with the cutting method in an experiment. The hole depth is 1.849 mm and 2.975 mm when the laser energy is 7.9 J and 28.9 J

respectively. A semi-infinite axisymmetric model was established according to the experiment and the analytical solution of temperature in a solid phase was derived based on the thermal conduction equation. Meanwhile

by assuming that material was removed from the hole once it was melted

the function describing the hole's shape was obtained with the energy balance theory. It was found that the difference between the calculation and the experimental results becomes larger as well as the hole's depth increases with the increase of laser energy. Further investigation indicates that the variation of beam radius affects the hole's depth greatly under other unaltered conditions. Thus

the defocusing effect was induced to modify the analytical solution and obtained results are in agreemeat well with those of the experiments. Finally

the drilling speed of millisecond pulsed laser for aluminum

copper

silver and titanium were studied. The results show that drilling speed for titanium is the fastest one due to its high absorptivity for laser and poor heat conduction ability.

关键词

Keywords

references

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