用非零位补偿法检测大口径非球面反射镜

王孝坤; 王丽辉; 邓伟杰; 郑立功

doi:10.3788/OPE.20111903.0520

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用非零位补偿法检测大口径非球面反射镜

现代应用光学 | 更新时间：2020-08-12

- 用非零位补偿法检测大口径非球面反射镜
- Measurement of large aspheric mirrors by non-null testing
- 光学精密工程 2011年19卷第3期页码：520-528
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所中国科学院光学系统先进制造技术重点实验室, 吉林长春 130033
  2. 中国移动通信集团吉林有限公司长春分公司, 吉林长春 130033
- 作者简介：
- 基金信息：
  
  国家863高技术研究发展计划资助项目(No.O8663NJ090)();中国科学院长春光学精密机械与物理研究所三期创新基金重点资助项目(No.O83Y32J080)()
- DOI：10.3788/OPE.20111903.0520
  中图分类号： TH703;TQ171.6+5
- 收稿日期：2010-04-29，
  
  修回日期：2010-05-04，
  
  网络出版日期：2011-03-22，
  
  纸质出版日期：2011-03-22
- 稿件说明：
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王孝坤, 王丽辉, 邓伟杰, 郑立功. 用非零位补偿法检测大口径非球面反射镜[J]. 光学精密工程, 2011,19(3): 520-528

WANG Xiao-kun, WANG Li-hui, DENG Wei-jie, ZHENG Li-gong. Measurement of large aspheric mirrors by non-null testing[J]. Editorial Office of Optics and Precision Engineering, 2011,19(3): 520-528
王孝坤, 王丽辉, 邓伟杰, 郑立功. 用非零位补偿法检测大口径非球面反射镜[J]. 光学精密工程, 2011,19(3): 520-528 DOI： 10.3788/OPE.20111903.0520.

WANG Xiao-kun, WANG Li-hui, DENG Wei-jie, ZHENG Li-gong. Measurement of large aspheric mirrors by non-null testing[J]. Editorial Office of Optics and Precision Engineering, 2011,19(3): 520-528 DOI： 10.3788/OPE.20111903.0520.

摘要

研究了利用圆形子孔径拼接和环形子孔径拼接检测非球面的方法

以实现非零位补偿法对大口径非球面的测量。分析和研究了该技术的基本原理

并基于齐次坐标变换和最小二乘拟合建立了综合优化和误差均化的拼接数学模型;分别开发了圆形子孔径拼接和环形子孔径拼接检测非球面的算法软件;设计和搭建了子孔径拼接干涉检测装置

并分别利用圆形子孔径拼接和环形子孔径拼接实现了对一口径为350 mm的双曲面的检测。对待测非球面进行了零位补偿检测实验

结果显示

圆形子孔径拼接与全口径补偿测量结果的PV值和RMS值的偏差分别为0.031和0.004;环形子孔径拼接与全口径补偿测量结果的PV值和RMS值的偏差分别为0.028和0.006;3种方法测量所得的面形分布都是一致的。所提出的方法提供了除零位补偿检测外的另一种定量测试大口径非球面的手段。

Abstract

Circular Subaperture Stitching Interferometry (CSSI) and Annular Subaperture Stitching Interferometry(ASSI) were expounded to realize the test of large aspheric surfaces without the null optics. The theories and principle of the technique were analysised

and the synthetical optimization stitching model and an effective stitching algorithm were established based on homogeneous coordinate transformation and simultaneous least-squares fitting. The softwares of CSSI and ASSI were devised

respectively

then the experiment was carried out for a

350 mm hyperboloid by CSSI

ASSI and a null test

respectively.Experiments show that the differences of PV and RMS errors between null test and CSSI are 0.031 and 0.004

and those between null test and ASSI are 0.028 and 0.006

respectively

while their synthesized surface maps are consistent to the entire surface map from the null test. The technique proposed in this paper provides another quantitive measurement for testing large aperture aspheres besides the null-compensation method.

关键词

Keywords

references

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