对准系统中调焦机构机械摆动引入误差的补偿

王权岱; 李言; 肖继明

doi:10.3788/OPE.20111903.0573

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对准系统中调焦机构机械摆动引入误差的补偿

微纳技术与精密机械 | 更新时间：2020-08-12

- 对准系统中调焦机构机械摆动引入误差的补偿
- Calibration of error due to mechanical swing of focusing setup in alignment system
- 光学精密工程 2011年19卷第3期页码：573-579
- 作者机构：
  
  1. 西安理工大学机械与精密仪器工程学院,陕西西安,710048
  2. 西安交通大学机械制造系统工程国家重点实验室,陕西西安,710049
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.50975225)();中国博士后科学基金资助项目(No.20100471614)();西安理工大学博士科研启动基金资助项目(No.10
- DOI：10.3788/OPE.20111903.0573
  中图分类号： TH741.14;TN305.7
- 收稿日期：2010-05-30，
  
  修回日期：2010-07-05，
  
  网络出版日期：2011-03-22，
  
  纸质出版日期：2011-03-22
- 稿件说明：
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王权岱, 李言, 肖继明. 对准系统中调焦机构机械摆动引入误差的补偿[J]. 光学精密工程, 2011,19(3): 573-579

WANG Quan-dai, LI Yan, XIAO Ji-ming. Calibration of error due to mechanical swing of focusing setup in alignment system[J]. Editorial Office of Optics and Precision Engineering, 2011,19(3): 573-579
王权岱, 李言, 肖继明. 对准系统中调焦机构机械摆动引入误差的补偿[J]. 光学精密工程, 2011,19(3): 573-579 DOI： 10.3788/OPE.20111903.0573.

WANG Quan-dai, LI Yan, XIAO Ji-ming. Calibration of error due to mechanical swing of focusing setup in alignment system[J]. Editorial Office of Optics and Precision Engineering, 2011,19(3): 573-579 DOI： 10.3788/OPE.20111903.0573.

摘要

为了消减压印对准系统焦平面调整过程中由于机构机械不稳定性产生的对准误差

提出了拟合调整架摆动轨迹来进行软件补偿的方法。通过亚像素模板匹配算法对调焦过程中标记图像的坐标进行定位运算并分析了算法的有效性

结果说明该算法的理论误差<0.1 m。采用该算法计算随调整架摆动的标记坐标

对调整架的摆动轨迹进行了实验标定。分别考察调整架上升和下降时的摆动特性

结果显示

实验具有较好的重复性。以此为基础

建立了调整架的摆动轨迹模型及误差补偿方法

并对模型的预测补偿精度进行了实验研究。结果表明

通过预测调整架摆动轨迹并进行补偿

调焦系统机械不稳定性误差从2.84 m减小到1.29 m

可以满足2 m的总体对准精度要求。

Abstract

An improved method to fit the side wobble trace of a positioning setup to compensate the software was proposed to reduce the error from the mechanical swing of the focusing setup during focus plane adjustment.The alignment mark was positioned through the sub-pixel correlation template matching algorithm and the validity of the algorithm was investigated

which shows that the resolution of the algorithm is better than 0.1 m. The positioning algorithm mentioned above was used to calculate the coordinates of the test mark while it moved up and down along with the focusing positioning setup and then the waving trace was characterized. Experimental results indicate that the mechanical swing trace can offer a good reproducibility

if the ascending and descending of the focusing setup are considered

respectively. Based on the experimental results

the model for the swing trace fitting was established and an error correction method was presented. Finally

experiments were performed to test the calibration accuracy of the model.Obtained results demonstrate that the error from the mechanical instability has been reduced to 1.29 m from 2.84 m

which can meet the overall alignment requirement of 2 m.

关键词

Keywords

references

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