面向聚合物微器件超声波精密封接的阵列微导能结构

罗怡; 张苗苗; 孙屹博; 王晓东

doi:10.3788/OPE.20111904.0754

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面向聚合物微器件超声波精密封接的阵列微导能结构

微纳技术与精密机械 | 更新时间：2020-08-12

- 面向聚合物微器件超声波精密封接的阵列微导能结构
- Micro energy director array for ultrasonic precise sealing of polymer MEMS device
- 光学精密工程 2011年19卷第4期页码：754-761
- 作者机构：
  
  1. 大连理工大学精密与特种加工教育部重点实验室,辽宁大连,116023
  2. 辽宁省微纳米技术及系统重点实验室,辽宁大连,116024
- 作者简介：
- 基金信息：
  
  国家自然科学基金面上项目(No.50775024();No.50975037)()
- DOI：10.3788/OPE.20111904.0754
  中图分类号： TB559
- 收稿日期：2010-08-31，
  
  修回日期：2010-10-27，
  
  网络出版日期：2011-04-26，
  
  纸质出版日期：2011-04-26
- 稿件说明：
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罗怡, 张苗苗, 孙屹博, 王晓东. 面向聚合物微器件超声波精密封接的阵列微导能结构[J]. 光学精密工程, 2011,19(4): 754-761

LUO Yi, ZHANG Miao-miao, SUN Yi-bo, WANG Xiao-dong. Micro energy director array for ultrasonic precise sealing of polymer MEMS device[J]. Editorial Office of Optics and Precision Engineering, 2011,19(4): 754-761
罗怡, 张苗苗, 孙屹博, 王晓东. 面向聚合物微器件超声波精密封接的阵列微导能结构[J]. 光学精密工程, 2011,19(4): 754-761 DOI： 10.3788/OPE.20111904.0754.

LUO Yi, ZHANG Miao-miao, SUN Yi-bo, WANG Xiao-dong. Micro energy director array for ultrasonic precise sealing of polymer MEMS device[J]. Editorial Office of Optics and Precision Engineering, 2011,19(4): 754-761 DOI： 10.3788/OPE.20111904.0754.

摘要

为提高聚合物超声波精密封接的可控性

预防高温度场下聚合物的熔融流延影响封接界面质量和精度

提出了阵列式微导能结构。以聚甲基丙烯酸甲酯(PMMA)微小管道的封接为实验对象

研究了阵列微导能结构的尺度对超声波封接过程的影响;采用热压成型工艺在被封接表面制作了5组不同高度的微结构。采用基于声波传递效率反馈的超声波精密封接方式

对超声波作用下聚合物界面的润湿行为进行了观察分析

讨论了结构尺度对超声波封接质量的影响。结果表明

随着微结构尺寸的增大

实现完全联接需要的超声波能量呈递增的趋势。该种微导能结构有效控制了聚合物熔融流延

获得了均一的封接面

可实现高质量精密封接。

Abstract

In order to improve the efficiency of ultrasonic bonding process for a polymer Electro-Mechanical System(MEMS) and to prevent the flow of polymer under a high temperature

a micro energy director array was proposed. Based on the experiment of PMMA micro-pipe sealing

the influence of micro energy director array on the process of ultrasonic sealing was studied. Five kinds of micro energy directors with different heights were fabricated on the sealing surface by a hot embossing technique. The method of ultrasonic precise sealing based on acoustic transfer efficiency feedback was used in the experiment to study the influence of the height of the micro-array structure on the quality of ultrasonic sealing and to observe the wetting behavior of micro-array structure. Experimental results indicate that the ultrasonic energy to achieve complete connection increases with increasing the height of micro energy director array. The micro energy director can control the flow of the melting-polymer effectively and can obtain the uniform sealing surface and high quality precise sealing.

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Keywords

references

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