电容读出式非制冷红外焦平面阵列设计

李博翰; 于晓梅

doi:10.3788/OPE.20111904.0762

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电容读出式非制冷红外焦平面阵列设计

微纳技术与精密机械 | 更新时间：2020-08-12

- 电容读出式非制冷红外焦平面阵列设计
- Design of capacitive-read infrared FPA
- 光学精密工程 2011年19卷第4期页码：762-767
- 作者机构：
  
  北京大学微电子学研究院微米纳米加工技术国家级重点实验室北京,100871
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.61036006)();国家863高技术研究发展计划资助项目(No.2009AA04Z316)();国家973重点基础研究发展计划资助项
- DOI：10.3788/OPE.20111904.0762
  中图分类号： TN215
- 收稿日期：2010-03-07，
  
  修回日期：2010-06-17，
  
  网络出版日期：2011-04-26，
  
  纸质出版日期：2011-04-26
- 稿件说明：
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李博翰, 于晓梅. 电容读出式非制冷红外焦平面阵列设计[J]. 光学精密工程, 2011,19(4): 762-767

LI Bo-han, YU Xiao-mei. Design of capacitive-read infrared FPA[J]. Editorial Office of Optics and Precision Engineering, 2011,19(4): 762-767
李博翰, 于晓梅. 电容读出式非制冷红外焦平面阵列设计[J]. 光学精密工程, 2011,19(4): 762-767 DOI： 10.3788/OPE.20111904.0762.

LI Bo-han, YU Xiao-mei. Design of capacitive-read infrared FPA[J]. Editorial Office of Optics and Precision Engineering, 2011,19(4): 762-767 DOI： 10.3788/OPE.20111904.0762.

摘要

设计了一种长支腿式电容读出式红外焦平面阵列结构

并分析了这种像元结构的热导率、热机械灵敏度和热时间常数

从中优化出了该模型的部分结构参数

并以此为依据对像元整体尺寸进行了设计。在该尺寸模型下

得到的像元热导率为310

-7

W/K

热机械灵敏度为162 nm/K

热时间常数为35 ms

该热时间常数满足人眼识别频率的需要。讨论了焦平面阵列能够高灵敏度工作的关键参数噪声等效温差

分析计算显示

得到噪声等效温差为6 mK。进行了仿真计算

得到的噪声等效温差为5 mK

与计算结果非常吻合。实验表明

该系统的噪声等效温差足够小

可满足稳定输出信号的需要。最后

基于牺牲层工艺制备了长支腿结构焦平面阵列

验证了制备工艺的可行性。

Abstract

With the aim to improve the performance of an infrared detector and to enhance the characteristics of a Focal Plane Array(FPA)

a capacitive-read infrared FPA with the structure of cantilever element in a fold-line leg and a long-line leg was designed. The thermal conductivity

thermo-mechanical sensitivity and the thermal time constant of the structure were discussed and optimized

then these parameters were set to be 310

-7

W/K

162 nm/K and 35 ms

respectively. The sensitivity of design is fast enough to satisfy the requirements of human eyes.Furthermore

the Noise Equivalent Temperature Difference( NETD) which is key for the FPA detection was discussed

and calculated result shows that the NETD of the designed FPA is 6 mK. A simulation for the NETD was also performed

which shows the NETD is 5 mK. Experiments indicate that the simulation result agrees with that of the calculation well and show that the NETD is small enough to satisfy the resolution for signal read-out. Finally

the capacitive-read FPA was fabricated based on silicon micromachining technology successfully.

关键词

Keywords

references

许中胜. 红外探测系统参数关系及实际应用[J]. 光学精密工程, 1999,7(4):81-85. XU ZH SH. Infrared detection system parameter relation formula and practical application[J]. Opt. Precision Eng., 1999,7(4):81-85.[2] DATSKOSA P G, LAVRIK N V, RAJIC S. Performance of uncooled micro cantilever thermal detectors[J]. Review of Scientific Instruments: 2004,75(1):4-10.[3] KRUSE P W. Priniple of uncooled infrared focal plane arrays[J]. Semiconductors Semimetals, 1997,47:17-44.[4] HUNTER S R,AMANTEA R A. High-sensitivity uncooled micro cantilever infrared imaging arrays[J].SPIE,2006,6206(10):1117-1129.[5] ZHAO Y,MAO M Y, HORWITZ R, et al..Optomechanical uncooled infrared imaging system: design, microfabrication, and performance[J]. Journal of microelectromechanical systems, 2002,11(2):136-146.[6] WOOD RA, SKATRUD DD. Uncooled Infrared Imaging Arrays and Systems[M].New York:Academic Press,1997.[7] ROARK R J,YOUNG W C. Formulas for Stress and Strain[M]. New York:McGraw, 1972.[8] LAI J,PERAZZO T,SHI Z,et al.. Optimization and performance of high-resolution micro-optomechanical thermal sensors[J]. Sensors and Actuators, 1997,58(A):113-119.[9] 代少升, 张新立. 基于SOPC的红外焦平面阵列实时非均匀性校正研究[J]. 光学精密工程, 2009,17(4):854-858. DAI SH SH, ZHANG X L. Real-time nonuniformity correction of infrared focal plane arrays by system on programmable chip[J]. Opt. Precision Eng., 2009,17(4):854-858.[10] LI B. Design and simulation of an uncooled double-cantilever microbolometer with the potential for~mK NETD[J]. Sensors and Actuators, 2004,112(A):351-359.

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