复合型超精密表面形貌测量仪

王淑珍; 谢铁邦; 常素萍

doi:10.3788/OPE.20111904.0828

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复合型超精密表面形貌测量仪

微纳技术与精密机械 | 更新时间：2020-08-12

- 复合型超精密表面形貌测量仪
- Combined profilometer for ultra-precision surface topography
- 光学精密工程 2011年19卷第4期页码：828-835
- 作者机构：
  
  1. 华中科技大学机械科学与工程学院,湖北武汉,430074
  2. 洛阳理工学院机电工程系,河南洛阳,471023
- 作者简介：
- 基金信息：
  
  国家自然科学基金(科学仪器专项基金)资助项目(No. 50927502)();国家863高技术研究发展计划资助项目(No. 2008AA042409)()
- DOI：10.3788/OPE.20111904.0828
  中图分类号： TH741.3;TH742.9
- 收稿日期：2010-06-02，
  
  修回日期：2010-08-06，
  
  网络出版日期：2011-04-26，
  
  纸质出版日期：2011-04-26
- 稿件说明：
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王淑珍, 谢铁邦, 常素萍. 复合型超精密表面形貌测量仪[J]. 光学精密工程, 2011,19(4): 828-835

WANG Shu-zhen, XIE Tie-bang, CHANG Su-ping. Combined profilometer for ultra-precision surface topography[J]. Editorial Office of Optics and Precision Engineering, 2011,19(4): 828-835
王淑珍, 谢铁邦, 常素萍. 复合型超精密表面形貌测量仪[J]. 光学精密工程, 2011,19(4): 828-835 DOI： 10.3788/OPE.20111904.0828.

WANG Shu-zhen, XIE Tie-bang, CHANG Su-ping. Combined profilometer for ultra-precision surface topography[J]. Editorial Office of Optics and Precision Engineering, 2011,19(4): 828-835 DOI： 10.3788/OPE.20111904.0828.

摘要

研制了基于同一显微镜基体实现原子力探针扫描测量与非接触光学测量两种功能的复合型超精密表面形貌测量仪。分析了基于白光显微干涉原子力探针的测量方法、探针微悬臂变形量与白光干涉条纹移动量的关系以及探针微悬臂测量非线性误差的修正方法

和通过融合垂直扫描系统的位移量和悬臂梁变形量得到了原子力探针的工作方式。研制了三维精密位移系统和基于白光显微干涉的原子力探针测头。采用原子力探针扫描测量对NT-MDT公司生产的扫描探针校准光栅TGZ2_PTB进行了重复性实验

实验显示标准差为0.96 nm

相对重复性误差为3.08%。给出了原子力探针扫描测量、相移干涉测量及白光干涉垂直扫描测量的测量实例。实验结果表明

所研制的超精密表面形貌测量仪可用于超精密加工工程表面、光学表面以及微纳几何结构的测量。

Abstract

A combined profilometer combined atomic force probe scanning measurement with non-contact optical measurement based on one interference microscope substrate was developed for ultra-precision surface topography. The white light interference microscope based atomic force probe scanning measurement

the relationship between the deflection of an atomic force probe cantilever and the movement amount of interference fringes and the nonlinearity error correction method of probe cantilever deflection measurement were given.Then

the contact operation mode combined the displacement of vertical scanning system and the deflection of the cantilever was analyzed.A 3D precision displacement system and a AFM head based on white light interference microscope were developed. Under the same condition

the calibration grating TGZ2_PTB(1072nm) made by NT-MDT Co.

was measured 10 times on the same region. The measurement results show that the standard deviation is 0.96 nm and the relative repeatability error is 3.08%. Several examples measured by atomic force probe scanning method

phase-shifting interferometry and vertical scanning white light interference method were given

respectively.It concludes that the combined profilometer can be used to measure ultra-precision machining engineering surfaces

optical surfaces

and micro-nano geometric structures.

关键词

Keywords

references

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