大范围高速原子力显微镜的前馈反馈混合控制方法

陈代谢; 殷伯华; 林云生; 初明璋; 韩立

doi:10.3788/OPE.20111904.0836

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大范围高速原子力显微镜的前馈反馈混合控制方法

微纳技术与精密机械 | 更新时间：2020-08-12

- 大范围高速原子力显微镜的前馈反馈混合控制方法
- Feed-forward and feed-back controller for large-range and high-speed AFM
- 光学精密工程 2011年19卷第4期页码：836-843
- 作者机构：
  
  1. 中国科学院研究生院北京,100039
  2. 中国科学院电工研究所微纳加工研究部北京,100190
- 作者简介：
- 基金信息：
  
  中国科学院仪器改造资助项目(No.YZ200831)()
- DOI：10.3788/OPE.20111904.0836
  中图分类号： TN16;TH742.9
- 收稿日期：2010-08-27，
  
  修回日期：2010-09-29，
  
  网络出版日期：2011-04-26，
  
  纸质出版日期：2011-04-26
- 稿件说明：
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陈代谢, 殷伯华, 林云生, 初明璋, 韩立. 大范围高速原子力显微镜的前馈反馈混合控制方法[J]. 光学精密工程, 2011,19(4): 836-843

CHEN Dai-xie, YIN Bo-hua, LIN Yun-sheng, CHU Ming-zhang, HAN Li. Feed-forward and feed-back controller for large-range and high-speed AFM[J]. Editorial Office of Optics and Precision Engineering, 2011,19(4): 836-843
陈代谢, 殷伯华, 林云生, 初明璋, 韩立. 大范围高速原子力显微镜的前馈反馈混合控制方法[J]. 光学精密工程, 2011,19(4): 836-843 DOI： 10.3788/OPE.20111904.0836.

CHEN Dai-xie, YIN Bo-hua, LIN Yun-sheng, CHU Ming-zhang, HAN Li. Feed-forward and feed-back controller for large-range and high-speed AFM[J]. Editorial Office of Optics and Precision Engineering, 2011,19(4): 836-843 DOI： 10.3788/OPE.20111904.0836.

摘要

为了扩大原子力显微镜(Atomic Force Microscope

AFM)使用范围

研制了一套大范围高速AFM系统。针对大范围高速扫描时

方向控制问题

提出了前馈反馈混合控制方法。前馈控制包括自动调平前馈和基于前一行扫描前馈

前者通过多线扫描确定样品倾斜位置

将所有扫描点的倾斜位移差用函数式表达

然后将其换算为

向驱动电压后驱动下扫描器运动;后者利用前一行扫描高度数据作为当前行

向扫描器驱动的参考输入。反馈控制为在普通比例-积分(PI)控制基础上改进的动态

参数PI控制

参数设置与误差大小有关。实验结果表明:采用本控制方法最大控制误差由40.17 nm减小为6.01 nm

误差均方根值由22.85 nm减小为2.01 nm

明显抑制了误差信号

提高了

向控制效果

获得了更精确的高度图像。

Abstract

In order to expand the application scope of Atomic Force Microscopes(AFMs)

a large-range and high-speed AFM was developed. A feed-forward and feed-back algorithm is proposed to deal with the

-control of the AFM. The feed-forward controller includes an auto leveling controller and a last line based controller. The former determines the location of sample tilt by multi-lines scan

and the tilt displacements of all scan points are expressed by a formula.Then

it is transformed into

control voltages to drive the down-stage. The latter uses the last line height signal as the reference input of

-control in the current line scan. The feed-back controller is a proportional integral(PI) controller whose

parameter is dynamically changed with error signals. Experimental results indicate that the max error value by proposed method is decreased from 40.17 nm to 6.01 nm

and the root-mean-square error is decreased from 22.85 nm to 2.01 nm. It suppresses error signals evidently

enhances the ef- fectiveness of

-control

and makes image more precise.

关键词

Keywords

references

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