显微动态散斑法测量压电陶瓷位移特征曲线

朱猛; 黄战华; 王小军; 蔡怀宇

doi:10.3788/OPE.20111904.0844

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显微动态散斑法测量压电陶瓷位移特征曲线

微纳技术与精密机械 | 更新时间：2020-08-12

- 显微动态散斑法测量压电陶瓷位移特征曲线
- Measurement of piezoelectric displacement characteristic curves using dynamic speckle correlation
- 光学精密工程 2011年19卷第4期页码：844-849
- 作者机构：
  
  天津大学精密仪器与光电子工程学院光电信息技术科学教育部重点实验室(天津大学) 天津,300072
- 作者简介：
- 基金信息：
  
  国家科技支撑计划资助项目(No.2007BA000013)()
- DOI：10.3788/OPE.20111904.0844
  中图分类号： TN384;O436.1
- 收稿日期：2010-05-06，
  
  修回日期：2010-08-24，
  
  网络出版日期：2011-04-26，
  
  纸质出版日期：2011-04-26
- 稿件说明：
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朱猛, 黄战华, 王小军, 蔡怀宇. 显微动态散斑法测量压电陶瓷位移特征曲线[J]. 光学精密工程, 2011,19(4): 844-849

ZHU Meng, HUANG Zhan-hua, WANG Xiao-jun, CAI Huai-yu. Measurement of piezoelectric displacement characteristic curves using dynamic speckle correlation[J]. Editorial Office of Optics and Precision Engineering, 2011,19(4): 844-849
朱猛, 黄战华, 王小军, 蔡怀宇. 显微动态散斑法测量压电陶瓷位移特征曲线[J]. 光学精密工程, 2011,19(4): 844-849 DOI： 10.3788/OPE.20111904.0844.

ZHU Meng, HUANG Zhan-hua, WANG Xiao-jun, CAI Huai-yu. Measurement of piezoelectric displacement characteristic curves using dynamic speckle correlation[J]. Editorial Office of Optics and Precision Engineering, 2011,19(4): 844-849 DOI： 10.3788/OPE.20111904.0844.

摘要

采用显微动态散斑相关法来测量压电陶瓷的压电位移特性并标定其线性区间。推导了透射相位衍射体在显微系统中的散斑光强互相关函数

并讨论了显微系统分辨率与放大倍率对测量微位移的影响。为在计算中避免散斑去相关的影响

采用了逐级位移相关叠加法。设计了显微散斑采集系统并测量了压电陶瓷的位移磁滞曲线。实验结果表明:使用放大倍率为100、数值孔径为1.25的显微物镜

在测量光路放大倍率为42.1时

测量位移的理论精度达到0.082;考虑衍射极限时

实际的极限位移分辨率为0.348 m。本测量系统满足压电陶瓷位移曲线测量及线性区间标定的要求;与其他方法相比较

该方法简化了测量光路

提高了运算速度

且对装配误差要求低。

Abstract

Dynamic speckle correlation method was presented to measure the piezoelectric ceramic characteristic curves and scale linear intervals in this paper. Firstly

the speckle intensity cross-correlation of a projection phase diffuser in the micro-system was calculated

and influences of the resolution and magnification of the micro-system on object displacement measuring were also discussed. During the calculation of cross-correlation

a progressive correlation method was used to avoid the de-correlation caused by the object surface. A sampling system for micro speckles was designed and the hysteresis curve of displacement induced by a piezoelectric ceramic was measured. Experimental results indicate that the theory precision of the measuring system is 0.082 m when a micro objective is with magnification of 100 and NA of 1.25. In consideration of the diffraction limit

the theory precision of the measuring system is 0.348 m. It concludes that the method satisfies the requirements of measuring and scaling of linear intervals. Comparing with other methods

the dynamic speckle correlation can improve the calculation speed and measuring precision.

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Keywords

references

崔玉国,孙宝元,董维杰,等. 压电陶瓷执行器迟滞与非线性成因分析[J]. 光学精密工程,2003,11(3):271-272. CUI Y G, SUN B Y, DONG W J, et al.. Causes for hysteresis and nonlinearity of piezoelectric ceramic actuators [J]. Opt. Precision Eng., 2003,11(3):271-272. ( in Chinese)[2] 张涛,孙立宁,蔡鹤皋. 压电陶瓷基本特性研究[J]. 光学精密工程,1998,6(5):26-32. ZHANG T, SUN L N, CAI H B, Study on the fundamental characteristics of piezoelectric element[J]. Opt. Precision Eng., 1998,6(5):26-32. ( in Chinese)[3] 潘在友,刘惠兰,冯丽爽,等. 基光杠杆原理测量压电陶瓷压电特性的方法[J]. 红外与激光工程,2008,37(Supp.):197-199. PAN Z Y, LIU H L, FENG L S, et al.. Testing method of dilation of the piezoelectric ceramics based on optical lever theory [J]. Infrared and Laser Engineering, 2008,37(Supp.):197-199. (in Chinese)[4] 吴新民,陈进榜,朱日宏,等. 用干涉法测量压电陶瓷的动态频率响应特性[J]. 红外与激光工程,2002,31(3): 257-259. WU X M, CHEN J B, ZHU R H, et al.. Measuring the dynamic frequency response of piezoelectric ceramic by interference method [J]. Infrared and Laser Engineering, 2002,31(3):257-259. (in Chinese)[5] 李明,薛晨阳,翟成瑞. 压电陶瓷微位移器特性测试实验研究[J]. 纳米科技,2009,6(3):61-63. LI M, XUE C Y, ZHAI C R. Laboratory study of characteristic testing for piezoelectric ceramic micropositioning[J]. Nanoscience & Nanotechnology,2009,6(3):61-63. (in Chinese)[6] HECTOR J RABAL,ROBERTO A BRAGA JR. Dynamic Laser Speckle and Applications[M]. New York: CRC Press,2009.[7] ALEXEI A KAMSHILIN,SERGUEI V MIRIDONOV, IGOR S SIDOROV, et al.. Statistics of dynamic speckle in application to distance measurements[J]. Optical Review,2009,16(2):160-163.[8] MIRIDONOV S V,SIDOROV I,NIPPOLAINEN E,et al.. Accuracy of measuring systems using dynamic speckles[J]. J. Opt. Soc. Am. A,2009,26(4):745-753.[9] LENCINA A,VAVELIUK P. Modulated speckle simulations based on the random-walk model [J]. Optics Letters,2003,28(9):1748-1750.[10] YOSHIMURA T. Statistical properties of dynamic speckles [J]. J. Opt. Soc. Am. A. 1986,3(7):1032-1042.[11] MAXBORN, EMIL WOLF. Principles of optics[M].New York: Cambridge University Press,2003.

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