620 mm薄镜面的主动支撑结构及面形校正

陈夫林; 张景旭; 吴小霞; 范磊

doi:10.3788/OPE.20111905.1022

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620 mm薄镜面的主动支撑结构及面形校正

微纳技术与精密机械 | 更新时间：2020-08-12

- 620 mm薄镜面的主动支撑结构及面形校正
- Supporting structure of 620 mm thin primary mirror and its active surface correction
- 光学精密工程 2011年19卷第5期页码：1022-1029
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
  2. 中国科学院研究生院北京,100039
- 作者简介：
- 基金信息：
  
  中科院长春光学精密机械与物理研究所三期创新工程专项基金资助项目()
- DOI：10.3788/OPE.20111905.1022
  中图分类号： TH751
- 收稿日期：2010-06-25，
  
  修回日期：2010-09-09，
  
  网络出版日期：2011-05-26，
  
  纸质出版日期：2011-05-26
- 稿件说明：
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陈夫林, 张景旭, 吴小霞, 范磊. 620 mm薄镜面的主动支撑结构及面形校正[J]. 光学精密工程, 2011,19(5): 1022-1029

CHEN Fu-lin, ZHANG Jing-xu, WU Xiao-xia, FAN Lei. Supporting structure of 620 mm thin primary mirror and its active surface correction[J]. Editorial Office of Optics and Precision Engineering, 2011,19(5): 1022-1029
陈夫林, 张景旭, 吴小霞, 范磊. 620 mm薄镜面的主动支撑结构及面形校正[J]. 光学精密工程, 2011,19(5): 1022-1029 DOI： 10.3788/OPE.20111905.1022.

CHEN Fu-lin, ZHANG Jing-xu, WU Xiao-xia, FAN Lei. Supporting structure of 620 mm thin primary mirror and its active surface correction[J]. Editorial Office of Optics and Precision Engineering, 2011,19(5): 1022-1029 DOI： 10.3788/OPE.20111905.1022.

摘要

为了提高大口径薄镜面望远镜主镜在不同俯仰角度的支撑面形精度

采用模态振型模式定标实时对主镜面形进行了主动校正。针对口径为620 mm

厚度为18 mm

底支撑采用36点主动支撑

侧支撑采用6点切向被动支撑的薄镜面主动支撑系统

分析了主镜自由振动时的模态振型;在进行主动校正前将其前10阶模态振型的RMS值归一化为1 000 nm

定标出相应的校正力;分析了不同俯仰角下主镜面形的变化

并采用最小二乘法用模态振形为底基函数拟合了主镜面变形

求解出主动校正力;对比校正面形和原始面形的关系

并在二次主动校正之后分析了拟合残差和校正残差的关系。最终校正结果显示

主镜竖直放置时

用最大2.23 N的校正力可将其面型RMS从27.62 nm校正到12.95 nm;主镜水平放置时

用最大0.59 N的校正力可将其面型RMS从7.68 nm校正到2.84 nm。得到的结果验证了采用模态振型校正主镜面型的可行性。

Abstract

In order to improve the surface precision of a thin primary mirror in a large aperture telescope at different altitude angles

the active correction procedure based on vibration modal calibration was proposed. For a thin primary mirror with the 620 mm in diameter

18 mm in thickness and the axial munting in 36 points for the active support

the lateral mounting in 6 tangent points for the passive support

the free vibration mode of primary mirror was analyzed by finite element method and the first 10 vibration modes of the primary mirror were calibrated. Their RMS values were unified to 1 000 nm

also the calibration forces were calculated. Furthermore

the surface of the primary mirror with different altitude angles was analyzed

the deformations were fitted by the modal vibration mode using least square method

and the corrective forces were calculated. Finally

the corrected surface precision and initiative surface precision were compared

and the fitted surface precision and remanent surface precision were analyzed after the second active correction. Corrected results demonstrate that the deformation (RMS) of the primary mirror is corrected from 27.64 nm to 12.95 nm while it is vertically positioned by using the maximum corrective force of 2.23 N

and from 7.68 nm to 2.84 nm while horizontally positioned by using the maximum corrective force of 0.59 N. The simulation shows that the algorithm using modal vibration to actively correct the primary mirror surface is feasible.

关键词

Keywords

references

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