2X/Y直线进给轴直线轮廓误差的学习补偿方法

林献坤; 于垂顺; 李郝林

doi:10.3788/OPE.20111905.1048

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2X/Y直线进给轴直线轮廓误差的学习补偿方法

微纳技术与精密机械 | 更新时间：2020-08-12

- 2X/Y直线进给轴直线轮廓误差的学习补偿方法
- Learning-based linear contour error compensation method for 2X/Y-type linear feed axes
- 光学精密工程 2011年19卷第5期页码：1048-1053
- 作者机构：
  
  上海理工大学机械工程学院,上海 200093
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.51005158)();上海市科学技术委员会基金资助项目(No.08110511600)()
- DOI：10.3788/OPE.20111905.1048
  中图分类号： TG659;TM359.4
- 收稿日期：2010-05-19，
  
  修回日期：2010-08-26，
  
  网络出版日期：2011-05-26，
  
  纸质出版日期：2011-05-26
- 稿件说明：
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林献坤, 于垂顺, 李郝林. 2X/Y直线进给轴直线轮廓误差的学习补偿方法[J]. 光学精密工程, 2011,19(5): 1048-1053

LIN Xian-kun, YU Chui-shun, LI Hao-lin. Learning-based linear contour error compensation method for 2X/Y-type linear feed axes[J]. Editorial Office of Optics and Precision Engineering, 2011,19(5): 1048-1053
林献坤, 于垂顺, 李郝林. 2X/Y直线进给轴直线轮廓误差的学习补偿方法[J]. 光学精密工程, 2011,19(5): 1048-1053 DOI： 10.3788/OPE.20111905.1048.

LIN Xian-kun, YU Chui-shun, LI Hao-lin. Learning-based linear contour error compensation method for 2X/Y-type linear feed axes[J]. Editorial Office of Optics and Precision Engineering, 2011,19(5): 1048-1053 DOI： 10.3788/OPE.20111905.1048.

摘要

为了提高2

X/Y

直线进给轴的联动直线轮廓精度

研究了进给轴联动直线轮廓偏差的测量、评价和补偿方法。分析了直线电机驱动进给过程存在直线轮廓偏差的原因及其补偿的复杂性

给出一种基于学习的直线轮廓误差在线精密补偿方法。该方法通过激光干涉仪的2D时间基准精密测量龙门联动轴直线轮廓的实时坐标值

应用最小二乘方法评价确定理想直线方程;通过与理想直线比较得到直线偏差学习样本

建立基于最小二乘支持向量回归方法的直线偏差识别模型

以模型的在线回归计算确定偏差补偿量。最后给出了补偿量控制输出策略与补偿系统构建方案

并在自构建的直线进给轴平台上进行了在线补偿实验。结果表明

应用该方法对2

X/Y

直线进给轴联动的直线轮廓偏差进行在线补偿

可使轮廓精度提高53%。

Abstract

To improve the linear contour accuracy of 2

X/Y

gantry linear feed axes

the research of the literature focuses on the straightness accuracy measurement

evaluation and error compensation of the axes. Firstly

the cause of linear contour error in interpolation process and its compensation complexity were analyzed for a 2

X/Y

gantry feed axis driven by linear motors. Then a learning algorithm based compensation method was applied to increase the contour accuracy for this type of gantry axis.In the method

2D time function of a laser interferometer was utilized to acquire real-time interpolation error data and least square method was taken to evaluate and determine the ideal linear equation. A model based on least square support vector regression technique was established to recognize the errors. With the support vectors from learning process

the real-time compensation values were acquired through the model regression calculation. Finally

the compensation output strategy and corresponding realization system were also proposed. To demonstrate the procedure of the proposed approach

an experiment was conducted on the self-construction 2

X/Y

axis feeding platform. The result shows that the combination technique can compensate the interpolation error and increase the straightness accuracy by 53%.

关键词

Keywords

references

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