基于光纤-镜面干涉腔的光纤加速度计

林巧; 陈柳华; 李书; 吴兴坤

doi:10.3788/OPE.20111906.1179

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基于光纤-镜面干涉腔的光纤加速度计

现代应用光学 | 更新时间：2020-08-12

- 基于光纤-镜面干涉腔的光纤加速度计
- Fiber optic accelerometer based on fiber-mirror interference cavity
- 光学精密工程 2011年19卷第6期页码：1179-1184
- 作者机构：
  
  浙江大学现代光学仪器国家重点实验室,浙江杭州,310027
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.60577025)()
- DOI：10.3788/OPE.20111906.1179
  中图分类号： TN253
- 收稿日期：2010-08-04，
  
  修回日期：2010-10-27，
  
  网络出版日期：2011-06-25，
  
  纸质出版日期：2011-06-25
- 稿件说明：
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林巧, 陈柳华, 李书, 吴兴坤. 基于光纤-镜面干涉腔的光纤加速度计[J]. 光学精密工程, 2011,19(6): 1179-1184

LIN Qiao, CHEN Liu-hua, LI Shu, WU Xing-kun. Fiber optic accelerometer based on fiber-mirror interference cavity[J]. Editorial Office of Optics and Precision Engineering, 2011,19(6): 1179-1184
林巧, 陈柳华, 李书, 吴兴坤. 基于光纤-镜面干涉腔的光纤加速度计[J]. 光学精密工程, 2011,19(6): 1179-1184 DOI： 10.3788/OPE.20111906.1179.

LIN Qiao, CHEN Liu-hua, LI Shu, WU Xing-kun. Fiber optic accelerometer based on fiber-mirror interference cavity[J]. Editorial Office of Optics and Precision Engineering, 2011,19(6): 1179-1184 DOI： 10.3788/OPE.20111906.1179.

摘要

设计、研制了一种基于光纤-镜面干涉腔的光纤加速度计。介绍了该加速度计的传感原理及弹性结构设计

并对其性能进行了实验测试。该加速度计用固定于圆网状弹性结构上的硅微反射镜与处理过的光纤端面构成光纤-镜面干涉腔来产生相位差随外界加速度改变的光干涉信号;采用相位生成载波技术通过对干涉信号的调制和解调实现对相位差的精确测定。应用工程软件Cosmosworks (Solidworks) 对该加速度计弹性结构的灵敏度进行了理论分析

并与样机测试比较。结果表明

该光纤加速度计的灵敏度为63.2 rad/

共振频率为160 Hz

分辨率为4

而动态范围接近10

结果与理论分析符合得较好。该加速度计不仅结构简单

还集成了多维加速度计的优势。

Abstract

An optical fiber accelerometer was designed based on a fiber-mirror interference cavity. The sensing principle and elastic structure of the accelerometer were introduced and its performance was measured.A silicon micro-mirror mounted on a mesh spring elastic structure and a fiber facet were used to form a fiber-mirror cavity to generate optical interference signals as a function of acceleration.A Phase Generated Carrier(PGC) technology was adopted to modulate the interference signals to obtain phase difference signals with high resolution.Finally

the strain analysis of elastic structure was performed by Cosmosworks (Solidworks) to calculate the sensitivity.The performance measurement of prototype shows that the accelerometer can offer a sensitivity of 63.2 rad/

in the resonance frequency of 160 Hz and a resolution of 4

with a dynamic range near 10

.Furthermore

the accelerometer is structure simple and easy to be intergrated and multi-dimensioned.

关键词

Keywords

references

DAE H K, MARIA Q F. A novel optical fiber accelerometer system for monitoring civil infrastructure . In Proceedings of the 2005 IEEE Sensors Conference, 2005,1107-1111.[2] 王永杰,李芳,肖浩,等. 盘片式光纤传感器灵敏度计算方法[J]. 光学学报,2007,27(8):1387-1392. WANG Y J, LI F, XIAO H, et al.. Sensitivity calculation of disk-type fiber optic sensor [J].Acta Optica Sinica,2007,27(8):1387-1392.(in Chinese)[3] 于清旭,贾春艳. 膜片式微型F-P腔光纤压力传感器[J]. 光学精密工程,2009,17(12):2887-2892. YU Q Y, JIA CH Y. Diaphragm based miniature fiber optic pressure sensor with F-P cavity [J]. Opt. Precision Eng., 2009,19(5):985-989. (in Chinese)[4] 王金海,陈才和,唐东林,等. 基于光弹效应的三分量光纤地震加速度计[J]. 传感技术学报,2006,19(3):804-806. WANG J H, CHEN C H, TANG D l, et al.. Three-component photoelastic fiber optic accelerometer based on the photoelastic effect [J]. Chinese Journal of Sensors and Actuators, 2006, 19(3):804-806. (in Chinese)[5] 曾楠,施纯峥,张敏,等. 一种可用于油藏监测的3分量光纤加速度传感器[J]. 光电子激光,2005,16(8) : 901-905. ZENG N, SHI CH ZH, ZHANG M, et al.. A 3 component fiber optic accelerometer for well logging [J]. Journal of OptoelectronicsLaser, 2005,16(8):901-905. (in Chinese)[6] 李丽,林玉池,付鲁华,等. 光纤光栅空分光复用传感系统的研究[J]. 光学精密工程,2007,15(4) :473-477. LI L, LIN Y CH, FU L H, et al.. Research on spatial division multiplexing of fiber Bragg grating sensors[J]. Opt. Precision Eng., 2007,15(4):473-477. (in Chinese)[7] 林志恒, 孟克,芮东峰. 基于LabVIEW的光纤加速度计解调系统的研究[J]. 应用科技,2007,34(11) :25-27. LIN ZH H, MENG K, RUI D F. Design of optical fiber accelerometer based on labview [J]. Applied Science and Technology, 2007, 34(11):25-27. (in Chinese)[8] WANG Y J, XIAO H, ZHANG S W, et al.. Design of a fibre-optic disc accelerometer: theory and experiment [J]. Measurement Science and Technology, 2007,18:1763-1767.[9] 郭明金,姜德生,袁宏才. 两种封装的光纤光栅温度传感器的低温特性[J]. 光学精密工程,2007,15(3):326-330. GUO M J, JIANG D SH, YUAN H C. Low temperature properties of fiber Bragg grating temperature sensors with two package methods [J]. Opt. Precision Eng., 2007,15(3):326-330. (in Chinese)[10] 江毅,黄尚廉,古渊,等. 光激菲涅耳反射器形成的本征光纤干涉仪[J]. 光子学报,1997,26(2):140-143. JIANG Y, HUANG SH L, GU Y, et al.. Intrinsic fiber optic interferometer based on photoinduced Fresnel reflectors [J]. Acta Photonica Sinica, 1997,26(2):140-143. (in Chinese)[11] 毕卫红. 本征不对称光纤法布里-珀罗干涉仪的理论模型[J]. 光学学报,2000,20(7):873-878. BI W H. Mathematical model for fiber-optical non-symmetrical fabry-perot interferometric cavity [J]. Acta Optica Sinica, 2000,20(7):873-878. (in Chinese)[12] 柯涛,朱涛,饶云江,等. 基于空芯光子晶体光纤的全光纤法布里-珀罗干涉式加速度传感器[J]. 中国激光,2010,37(1):171-175. KE T, ZHU T, RAO Y J, et al.. Accelerometer based on All-Fiber Fabry-Perot interferometer formed by hollow-core photonic crystal fiber [J]. Chinese Journal of Lasers, 2010,37(1):171-175. (in Chinese)[13] 江毅,唐才杰. 光纤Fabry-Perot干涉仪原理及应用[M]. 国防工业出版社,2009. JIANG Y, TANG C J. Optical Fiber Fabry-Perot Interferometer Principle and Applications [M]. 2009. (in Chinese)[14] DJAFAR K M, LOWELL L S. Fiber-Optic Communications Technology [M]. Science Press, 2002.[15] ALLEN C. Demodulator for interferometric sensors [J]. SPIE, 1999,3860:338-347.[16] SMEU E,PUSCAS N N. Theoretical analysis of the mechanical system for a fiber optic seismic sensor [J]. SPIE,2005,59720X:1-7.[17] 吴永红,屈文俊,邵长江,等. 光纤光栅传感器光-力转换的理论方程[J]. 光学学报,2009,29(8):2067-2070. WU Y H, QU W J, SHAO CH J, et al.. Basic optical-mechanical transformation theoretical equation for FBG strain sensors [J]. Acta Optica Sinica, 2009,29(8):2067-2070. (in Chinese)[18] 唐东林,郭峰,刘泽年,等. 光弹效应的三分量光弹波导加速度传感器[J]. 光学精密工程,2009,19(5):985-989. TANG D L, GUO F, LIU Z N, et al.. Three component photoelastic waveguide accelerometer based on photoelastic effect [J]. Opt. Precision Eng, 2009,19(5):985-989. (in Chinese)

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