应用条纹投影法测量薄膜反射镜的成形

张鹏; 张元; 金光; 钟兴; 张雷; 姚劲松

doi:10.3788/OPE.20111906.1185

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应用条纹投影法测量薄膜反射镜的成形

现代应用光学 | 更新时间：2020-08-12

- 应用条纹投影法测量薄膜反射镜的成形
- Measurement of space membrane mirror shaping based on fringe projection
- 光学精密工程 2011年19卷第6期页码：1185-1191
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
  2. 中国科学院研究生院北京,100039
- 作者简介：
- 基金信息：
  
  国家863高技术研究发展计划资助项目(No.2007AA12Z113)()
- DOI：10.3788/OPE.20111906.1185
  中图分类号： TH703;TH751
- 收稿日期：2010-06-23，
  
  修回日期：2010-09-03，
  
  网络出版日期：2011-06-25，
  
  纸质出版日期：2011-06-25
- 稿件说明：
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张鹏, 张元, 金光, 钟兴, 张雷, 姚劲松. 应用条纹投影法测量薄膜反射镜的成形[J]. 光学精密工程, 2011,19(6): 1185-1191

ZHANG Peng, ZHANG Yuan, JIN Guang, ZHONG Xing, ZHANG Lei, YAO Jin-song. Measurement of space membrane mirror shaping based on fringe projection[J]. Editorial Office of Optics and Precision Engineering, 2011,19(6): 1185-1191
张鹏, 张元, 金光, 钟兴, 张雷, 姚劲松. 应用条纹投影法测量薄膜反射镜的成形[J]. 光学精密工程, 2011,19(6): 1185-1191 DOI： 10.3788/OPE.20111906.1185.

ZHANG Peng, ZHANG Yuan, JIN Guang, ZHONG Xing, ZHANG Lei, YAO Jin-song. Measurement of space membrane mirror shaping based on fringe projection[J]. Editorial Office of Optics and Precision Engineering, 2011,19(6): 1185-1191 DOI： 10.3788/OPE.20111906.1185.

摘要

针对国内外现有薄膜反射镜面形检测方法存在动态测量不便

测量面形单一等问题

提出了基于正弦条纹投影的反射镜面形测量方法。基于此方法搭建了测量平台

分析推导显示

该方法的测量不确定度

0.385 m

该平台的测量不确定度

4.25 m。在此平台上对标准球面镜进行了测量

验证了此平台的适用性。最后

对优化控制下的

300 mm静电拉伸薄膜反射镜的面形进行了多次测量

结果表明

中心矢高测量值与理论值基本一致

优化后最佳镜面面形RMS值为5 m

PV值为39 m

相对于优化前RMS值减少了34.17%

PV值减少了26.4%

显示所搭建的基于正弦条纹投影方法的测量平台满足了现阶段薄膜反射镜面形测量的需要;而提出的面形控制算法可控制薄膜反射镜得到所需面形

并有效地提高面形精度。

Abstract

In consideration of the inconvenience of dynamic measurement and the measuring limitation for surface shapes of mirrors in exciting measuring method

a shape measurement method based on sinusoidal fringe projection was proposed

and a test platform was built. Analysis and deduction indicates that the measurement uncertainty of the method is less than 0.385 m and that of the platform is less than 4.25 m. A standard spherical mirror was measured on this test platform to verify the feasibility of the platform. Finally

surface figures and surface figure errors of a

300 mm electrostatic stretching membrane mirror were measured with the proposed method and surface shape control algorithm.Results show that the measured values of center sag are consistent with theoretical ones. Furthermore

the RMS and PV values of shape surface are 5.214 m and 39.327 m

which has reduced about 30.17% and 23.7%

respectively.The results display that the shape measurement platform based on sinusoidal fringe projection meets the need of membrane mirrors for shape measurement and the membrane mirror surface shape control algorithm can control the membrane mirror to obtain the required surface shape and improve the surface accuracy.

关键词

Keywords

references

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