柔性双补偿杆式动镜支撑机构的设计

柳华; 刘伟奇; 冯睿; 魏忠伦; 张健

doi:10.3788/OPE.20111906.1313

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柔性双补偿杆式动镜支撑机构的设计

微纳技术与精密机械 | 更新时间：2020-08-12

- 柔性双补偿杆式动镜支撑机构的设计
- Design of flexible-supporting mechanism with double compensation rods for moving mirror
- 光学精密工程 2011年19卷第6期页码：1313-1319
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
  2. 中国科学院研究生院北京,100039
- 作者简介：
- 基金信息：
  
  国家自然科学基金重点资助项目(No.60538020)();中国科学院创新工程资助项目()
- DOI：10.3788/OPE.20111906.1313
  中图分类号： TH703;TH744.1
- 收稿日期：2010-10-14，
  
  修回日期：2010-11-17，
  
  网络出版日期：2011-06-25，
  
  纸质出版日期：2011-06-25
- 稿件说明：
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柳华, 刘伟奇, 冯睿, 魏忠伦, 张健. 柔性双补偿杆式动镜支撑机构的设计[J]. 光学精密工程, 2011,19(6): 1313-1319

LIU Hua, LIU Wei-qi, FENG Rui, WEI Zhong-lun, ZHANG Jian. Design of flexible-supporting mechanism with double compensation rods for moving mirror[J]. Editorial Office of Optics and Precision Engineering, 2011,19(6): 1313-1319
柳华, 刘伟奇, 冯睿, 魏忠伦, 张健. 柔性双补偿杆式动镜支撑机构的设计[J]. 光学精密工程, 2011,19(6): 1313-1319 DOI： 10.3788/OPE.20111906.1313.

LIU Hua, LIU Wei-qi, FENG Rui, WEI Zhong-lun, ZHANG Jian. Design of flexible-supporting mechanism with double compensation rods for moving mirror[J]. Editorial Office of Optics and Precision Engineering, 2011,19(6): 1313-1319 DOI： 10.3788/OPE.20111906.1313.

摘要

对红外傅里叶变换光谱仪动镜支撑机构的核心部分柔性铰链机构进行了研究。以柔性单补偿杆式机构为基体

设计出一种柔性双补偿杆式机构。利用有限元分析软件Patran和Nastran对其进行了模拟计算

并和目前国内最好的柔性单补偿杆式机构进行比较。然后

根据模拟计算得出的结构参数加工出简易实物

并对实物进行了实验测试及误差分析。结果表明

在模拟计算中

柔性双补偿杆式机构使动镜的垂直耦合位移缩小为柔性单补偿杆式机构的6.8%;误差分析认为柔节的长度公差是引起动镜垂直耦合位移的一个重要因素。因此

若要提高动镜支撑机构的精度

加工时必须严格控制与柔节相关的尺寸公差。

Abstract

A flexible mechanism which was considered as a key component of the moving mirror supporting in a Michelson interferometer based Fourier-transform spectrometer was researched.The flexible mechannism with double compensation rods was created on the basis of the flexible mechannism with a single compensation rod. By use of the finite element analysis softwares PATRAN and NASTRAN

the mechanism was simulated and the corresponding results were compared with the best theoretical calculation of the flexible mechannism with the single compensation rod. A simplified model was also fabricated according to the structral specifications from simulation calculation. Furthermore

the model was also tested and error analysis was conducted. It is shown that the vertical coupling displacement of the moving mirror introduced by this flexible mechannism with double compensation rods has been decreased by 93.2%. The results of error analysis indicate that the length tolerence of the flexible segment is a critical factor that would result in coupling displacement of the moving mirror. Therefore

it points out that when a supporting mechanism with high precision is machined for the moving mirror

the tolerences related to the flexible segments must be strictly controlled in fabrication.

关键词

Keywords

references

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