音圈电机驱动的球面副支撑式快速控制反射镜设计

徐新行; 王兵; 韩旭东; 王恒坤; 刘廷霞

doi:10.3788/OPE.20111906.1320

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音圈电机驱动的球面副支撑式快速控制反射镜设计

微纳技术与精密机械 | 更新时间：2020-08-12

- 音圈电机驱动的球面副支撑式快速控制反射镜设计
- Design of fast-steering mirror with spherical pair supporting structure driven by voice coil actuators
- 光学精密工程 2011年19卷第6期页码：1320-1326
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所,吉林长春,130033
- 作者简介：
- 基金信息：
  
  中科院长春光学精密机械与物理研究所三期创新工程资助项目(No.057X22C050)()
- DOI：10.3788/OPE.20111906.1320
  中图分类号： TH703
- 收稿日期：2010-08-24，
  
  修回日期：2010-09-29，
  
  网络出版日期：2011-06-25，
  
  纸质出版日期：2011-06-25
- 稿件说明：
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徐新行, 王兵, 韩旭东, 王恒坤, 刘廷霞. 音圈电机驱动的球面副支撑式快速控制反射镜设计[J]. 光学精密工程, 2011,19(6): 1320-1326

XU Xin-hang, WANG Bing, HAN Xu-dong, WANG Heng-Kun, LIU Ting-xia. Design of fast-steering mirror with spherical pair supporting structure driven by voice coil actuators[J]. Editorial Office of Optics and Precision Engineering, 2011,19(6): 1320-1326
徐新行, 王兵, 韩旭东, 王恒坤, 刘廷霞. 音圈电机驱动的球面副支撑式快速控制反射镜设计[J]. 光学精密工程, 2011,19(6): 1320-1326 DOI： 10.3788/OPE.20111906.1320.

XU Xin-hang, WANG Bing, HAN Xu-dong, WANG Heng-Kun, LIU Ting-xia. Design of fast-steering mirror with spherical pair supporting structure driven by voice coil actuators[J]. Editorial Office of Optics and Precision Engineering, 2011,19(6): 1320-1326 DOI： 10.3788/OPE.20111906.1320.

摘要

为了精确控制光束的传输方向

设计了一种以直线式音圈电机为驱动器的球面副支撑式快速控制反射镜(FSM)。在明确所需FSM系统功能和设计要求的基础上

分别对其机械结构、平面反射镜、驱动元件以及角度测量元件进行了设计和选择。完成精密加工、装配、调试后

对FSM系统进行了实验测试分析。结果表明

该球面副刚性支撑式FSM系统结构简单

承载能力强

谐振频率约为120 Hz

反射镜稳定精度优于2

且对振动、冲击、回转等动态工作环境具有较强的适应性

满足系统使用要求。

Abstract

A Fast-steering Mirror(FSM) with a spherical pair supporting structure driven by linear voice coil actuators was designed to control the transmission direction of a laser precisely. The mechanical structure reflector

actuators and angle measurement elements of the system were designed and chosen

respectively

on the basis of functions and design requirements of the FSM. Then

the FSM system was tested and analyzed by experiments after finely manufacturing

assembling and adjusting. The results show that the FSM with the spherical pair supporting structure has simple structure and great carrying capacity

and its steady precision is more than 2 and resonance frequency is about 120 Hz. Furthermore

the system has great adaptability to vibrancy

impact and rotation. Therefore

it can satisfy application requirements.

关键词

Keywords

references

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