平板式压电六维力/力矩传感器的研制

刘俊; 秦岚; 李敏; 刘京诚; 薛联

doi:10.3788/OPE.20111907.1569

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平板式压电六维力/力矩传感器的研制

微纳技术与精密机械 | 更新时间：2020-08-12

- 平板式压电六维力/力矩传感器的研制
- Development of parallel piezoelectric six-axis force/torque sensor
- 光学精密工程 2011年19卷第7期页码：1569-1579
- 作者机构：
  
  重庆大学光电技术及系统教育部重点实验室重庆,400044
- 作者简介：
- 基金信息：
  
  高等学校博士学科点专项科研基金资助项目(No.20100191110011)();2010年度重庆市工业发展基金(产研专项)资助项目(10-CXY-42)();中央高校
- DOI：10.3788/OPE.20111907.1569
  中图分类号： TP212.12
- 收稿日期：2010-09-06，
  
  修回日期：2010-11-10，
  
  网络出版日期：2011-07-25，
  
  纸质出版日期：2011-07-25
- 稿件说明：
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刘俊, 秦岚, 李敏, 刘京诚, 薛联. 平板式压电六维力/力矩传感器的研制[J]. 光学精密工程, 2011,19(7): 1569-1579

LIU Jun, QIN Lan, LI Min, LIU Jing-cheng, Xue Lian. Development of parallel piezoelectric six-axis force/torque sensor[J]. Editorial Office of Optics and Precision Engineering, 2011,19(7): 1569-1579
刘俊, 秦岚, 李敏, 刘京诚, 薛联. 平板式压电六维力/力矩传感器的研制[J]. 光学精密工程, 2011,19(7): 1569-1579 DOI： 10.3788/OPE.20111907.1569.

LIU Jun, QIN Lan, LI Min, LIU Jing-cheng, Xue Lian. Development of parallel piezoelectric six-axis force/torque sensor[J]. Editorial Office of Optics and Precision Engineering, 2011,19(7): 1569-1579 DOI： 10.3788/OPE.20111907.1569.

摘要

针对弹性体式六维力/力矩传感器存在的技术瓶颈

提出了一种新型平板式压电六维力/力矩传感器。首先

介绍了传感器的结构和工作原理

提出了两种石英晶片组布置方案。然后

推导了两种布置方案的传感器的数学模型

并建立了有限元模型

仿真得到了两种结构传感器输出的电荷灵敏度、维间干扰、固有频率等重要参数

确定了石英晶片组相对合理的布置方式。最后

对传感器进行了静态和动态标定。研究结果表明:传感器结构简单合理、仿真分析方法和数学模型正确

固有频率>25 kHz

使用退耦矩阵后传感器的维间干扰<3%

基本满足传感器的设计指标。

Abstract

According to the technological bottleneck of elastic style six-axis force sensors

a novel parallel piezoelectric six-axis force/torque sensor was proposed. Firstly

the structure and operating principle of the sensor were presented

and two different arrangements of the eight group piezoelectric quartz crystals for the sensor were put forward. Then their mathematic models were derived

the finite element model of sensor was established

and the output charge sensitivity

coupling interference and the natural frequency of the sensor were analyzed by ANSYS software. Finally

the static and dynamic characteristics of the sensor were calibrated.Research results indicate that the sensor has simple and rational structure

correct mathematic model and simulation way.Moreover

its natural frequency is more than 25 kHz and coupling interference is less than 3% after using the decoupling matrix. These results satisfy the requirements of sensor design targets.

关键词

Keywords

references

王栋,余陵,武晓松. 火箭发动机六分力试验系统力学和误差特性[J]. 弹道学报,2009,21(3):23-25,47. WANG D, YU L, WU X S. Mechanical and error characteristics of rocket engine thrust vector test system[J].Journal of Ballistics,2009,21(3):23-25,47.(in Chinese)[2] 彭超,史玉杰. XX型火箭助飞鱼雷雷箭分离高速风洞试验测力天平研制[J]. 实验流体力学,2006,20(2):82-84,96. PENG CH,SHI Y J. Balance development of XX torpedo using the rocket boosting in the separation test of the torpedo and the rocket in high speed wind tunnel[J]. Journal of Experiments in Fluid Mechanics,2006,20(2):82-84,96.(in Chinese)[3] 王春洁,曾福明. 弹射座椅动态舒适性与人椅动力学特性研究[J]. 北京航空航天大学学报, 2004,30(4):375-378. WANG CH J,ZENG F M.Research of human-seat dynamics model and ejection seat dynamic comfort[J]. Journal of Beijing University of Aeronautics and Astronautics, 2004,30(4):375-378.(in Chinese)[4] 孙明照,吴铭,苏迅,等. 飞行员人体参数与人椅组合重心的回归分析研究[J]. 人类工效学,2005,11(2):23-25. SUN ZH M,WU M,SU X,et al.The regression analysis of pilot dimensions and combined gravity center of pilot-seat system[J]. Chinese Ergonomics,2005,11(2):23-25.(in Chinese)[5] 李宝峰,薛红军,宋笔锋. 基于SIMULINK的弹射救生人椅系统六自由度仿真[J]. 系统仿真学报,2007,19(6):1379-1382. LI B F, XUE H J, SONG B F,et al. 6-DOF trajectory simulation of ejection seat and occupant system with SIMULINK[J]. Journal of System Simulation,2007,19(6):1379-1382.(in Chinese)[6] CHUNG W Y,WALDRON K J. Wrench reconstruction by using a six-axis force sensor[J]. Mech. Mach. Theory, 1995, 30(3):383-389. [7] LUO M H,MASANORI I,ETSURO S,et al..Development of a six-axis force/tactile sensor for robot finger by employing spring beams.Industrial Electronics Society, 2003.IECON03.The 29th Annual Conference of the IEEE.2-6 November,2003,2:1505-1510.[8] 韩壮志,王田苗,张玉茹,等. 基于指端6维力传感器的接触点测量算法研究[J]. 北京航空航天大学学报,2004,30(5):400-404. HAN ZH ZH,WANG T M,ZHANG Y R ,et al. Selection of calculation model for contact sensing of robot hand using force/torque measurement[J].Journal of Beijing University of Aeronautics and Astronautics,2004,30(5):400-404.(in Chinese)[9] 张为公. 一种六维力传感器的新型布片和解耦方法[J]. 南京航空航天大学学报,1999,31(2):221-222. ZHANG W G. A new distributing and decoupling method of six degree of freedom force sensors[J]. Journal of Nanjing University of Aeronautics & Astronautics,1999,31(2):221-222.(in Chinese)[10] CHAO L P,CHEN K T.Shape optimal design and force sensitivity evaluation of six-axis force sensors[J].Sensors and Actuators A: Physical,1997,63(2):105-112.[11] 吴宝元,吴仲城,申飞. 多维加速度场中六维力传感器惯性耦合特性研究[J]. 传感技术学报,2008,21(10):1686-1690. WU B Y,WU ZH CH,SHEN F. Study on inertia coupling characteristics of 6-Axis force sensor in mult-dimensional acceleration field[J].Chinese Journal of Sensor and Actuators,2008,21(10):1686-1690.(in Chinese)[12] 刘巍,林盛,贾振元,等. 压电式六维大力传感器: 中国,No.200710157931.2.2008-03-26:1-8. LIU W,LING SH,JIA ZH Y,et al. Piezoelectric six axis heavy force sensor:China,No.2007101 57931.2.2008-03-26:1-8.(in Chinese)[13] LI Y J,SUN B Y,ZHAN J,et al. A novel parallel piezoelectric six-axis heavy force/torque sensor[J]. Measurement,2009,42(5):730-736.[14] 张军,李寒光,李映君,等. 压电式轴上六维力传感器的研制[J]. 仪器仪表学报,2010,31(6):73-77. ZHANG J, LI H G, LI Y J,et al. Development of piezoelectric six-axis force sensor on axis[J].Chinese Journal of Scientific Instrument,2010,31(6):73-77.(in Chinese)[15] 刘俊,秦岚,刘京诚,等. 一种新型差动式压电加速度传感器[J]. 光学精密工程,2007,15(6):903-909. LIU J,QIN L,LIU J CH,et al. A novel differential accelerating sensor [J].Opt. Precision Eng.,2007,15(6):903-909.(in Chinese)[16] 刘俊,秦岚,刘京诚,等. 一种平板式压电六维力传感器:中国,ZL200810069720.8. LIU J,QIN L,LIU J C,et al. A parallel piezoelectric six-axis force/torque sensor:China, ZL2008 100 69720.8.(in Chinese)[17] SONG A G,WU J, QIN G,et al. A novel self-decoupled four degree-of-freedom wrist force/torque sensor. Measurement: Journal of the International Measurement Confederation,November/December,2007,40(9-10):883-891.[18] NEMIROVSKY Y,NEMIROVSKY A Z,MURALT P, et al. Design of a novel thin film piezoelectric accelerometer [J]. Sensors and Actuators A: Physical,1996,(56):239-249.

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