RB-SiC反射镜的材料制备、表面改性及非球面加工

闫勇; 金光

doi:10.3788/OPE.20111908.1750

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RB-SiC反射镜的材料制备、表面改性及非球面加工

现代应用光学 | 更新时间：2020-08-12

- RB-SiC反射镜的材料制备、表面改性及非球面加工
- Material preparation, surface modification and aspheric processing of RB-SiC mirrors
- 光学精密工程 2011年19卷第8期页码：1750-1756
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
- 作者简介：
- 基金信息：
  
  国家863高技术研究发展计划资助项目(No.2007AA12Z113)()
- DOI：10.3788/OPE.20111908.1750
  中图分类号： V475.3;TQ171.6+8
- 收稿日期：2011-01-27，
  
  修回日期：2011-02-27，
  
  网络出版日期：2011-08-25，
  
  纸质出版日期：2011-08-25
- 稿件说明：
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闫勇, 金光. RB-SiC反射镜的材料制备、表面改性及非球面加工[J]. 光学精密工程, 2011,19(8): 1750-1756

YAN Yong, JIN Guang. Material preparation, surface modification and aspheric processing of RB-SiC mirrors[J]. Editorial Office of Optics and Precision Engineering, 2011,19(8): 1750-1756
闫勇, 金光. RB-SiC反射镜的材料制备、表面改性及非球面加工[J]. 光学精密工程, 2011,19(8): 1750-1756 DOI： 10.3788/OPE.20111908.1750.

YAN Yong, JIN Guang. Material preparation, surface modification and aspheric processing of RB-SiC mirrors[J]. Editorial Office of Optics and Precision Engineering, 2011,19(8): 1750-1756 DOI： 10.3788/OPE.20111908.1750.

摘要

针对RB-SiC反射镜工程实践中暴露的一些问题

对RB-SiC反射镜的材料制备、表面改性及非球面加工等技术进行了研究。首先

依据其改性特殊性

选取了与RB-SiC反射镜材料热胀系数匹配的新型支撑材料进行热匹配设计。接着

依据实际工程情况对非球面加工工艺及流程进行技术改进

以提高加工的可靠性。最后

采用试验的方法对RB-SiC反射镜的相关加工方法进行了试验验证。试验结果表明

改性后RB-SiC反射镜完好

改性前后镜面面形精度RMS值变化量仅为0.017(=623.8 nm)

变化率为13%

非球面加工周期缩短了1~2月。该技术确保了RB-SiC反射镜10 m的改性膜层在后续加工中的加工余量

使其不易被磨漏

提高了加工的安全性

缩短了非球面加工周期

该技术亦适用于其它SiC反射镜的制备及非球面加工。

Abstract

To solve the problems of RB-SiC mirrors in engineering applications

the material preparation

surface modification and aspheric processing of RB-SiC mirrors were analyzed. Firstly

according to the special modification characteristics of the RB-SiC mirrors

a new material whose thermal expansion coefficient was matched well with that of the RB-SiC was chosen to be a new support for the thermal design. Then

the modification and fabrication technologies of RB-SiC mirrors were improved based on the actual situation of the aspheric processing for better processing reliability and shorter processing cycle. Finally

the improvement were verified by experiments. The experimental results indicate that the modified RB-SiC mirror is in a good condition.The RMSs of the mirror surfaces before and after modifications have changed only 0.017(=623.8 nm

change rate in 13%)

and the aspheric processing time has decreased 1 month or 2 months. The adequate margin of the 10 m modified layer in the subsequent processing is ensured

the processing security is improved and the processing cycle of the aspheric is shortened due to the new technology

which can been applied to the preparation and processing of other aspheric SiC mirrors as well.

关键词

Keywords

references

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