多台阶平板静电驱动的高占空比微镜阵列的研制

李四华; 徐静; 龙亮; 钟少龙; 吴亚明

doi:10.3788/OPE.20111908.1816

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多台阶平板静电驱动的高占空比微镜阵列的研制

微纳技术与精密机械 | 更新时间：2020-08-12

- 多台阶平板静电驱动的高占空比微镜阵列的研制
- Fabrication of high fill-factor micro-mirror array with multi-terraced-plate structure
- 光学精密工程 2011年19卷第8期页码：1816-1823
- 作者机构：
  
  1. 中国科学院研究生院,北京 100039
  2. 中国科学院上海微系统与信息技术研究所微系统技术重点实验室传感技术联合国家重点实验室,上海 200050
- 作者简介：
- 基金信息：
  
  国家863高技术研究发展计划资助项目(No. 2008AA03Z406,No. 2009AA03Z443)();国家自然科学基金资助项目(No. 60877066)()
- DOI：10.3788/OPE.20111908.1816
  中图分类号： TN491;TN256
- 收稿日期：2010-08-24，
  
  修回日期：2011-01-11，
  
  网络出版日期：2011-08-25，
  
  纸质出版日期：2011-08-25
- 稿件说明：
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李四华, 徐静, 龙亮, 钟少龙, 吴亚明. 多台阶平板静电驱动的高占空比微镜阵列的研制[J]. 光学精密工程, 2011,19(8): 1816-1823

LI Si-hua, XU Jing, LONG Liang, ZHONG Shao-long, WU Ya-ming. Fabrication of high fill-factor micro-mirror array with multi-terraced-plate structure[J]. Editorial Office of Optics and Precision Engineering, 2011,19(8): 1816-1823
李四华, 徐静, 龙亮, 钟少龙, 吴亚明. 多台阶平板静电驱动的高占空比微镜阵列的研制[J]. 光学精密工程, 2011,19(8): 1816-1823 DOI： 10.3788/OPE.20111908.1816.

LI Si-hua, XU Jing, LONG Liang, ZHONG Shao-long, WU Ya-ming. Fabrication of high fill-factor micro-mirror array with multi-terraced-plate structure[J]. Editorial Office of Optics and Precision Engineering, 2011,19(8): 1816-1823 DOI： 10.3788/OPE.20111908.1816.

摘要

为了在限定驱动电压下获得大镜面尺寸、大扭转角度的微镜阵列

提出了一种多台阶平板静电驱动结构的微镜阵列。理论分析了多台阶平板结构与平行平板结构在静电驱动时的区别。研究了多台阶平板结构的制作工艺并采用体硅加工工艺制作了多台阶平板静电驱动的微镜阵列

获得了微镜面尺寸达到600 m200 m

包含52个微镜面排布

占空比高达97%的微镜阵列。测试表明

制作的微镜面结构在驱动电压为164 V时可以实现最大1.1的扭转角度

相对于传统的平行平板静电驱动结构大大降低了驱动电压。

Abstract

In order to obtain a micro-mirror array with large torsional angles and large sizes under limited driving voltages

a novel micro-mirror array with a multi-terraced-plate structure was proposed and demonstrated based on the Micro-optoelectro mechanical System(MOEMS). The different characteristics of the electrostatic driver between multi-terraced-plate structure and parallel-plate structure were analyzed. The key fabrication process for the multi-terraced-plate structure was researched and a bulk micro-mechanical technology was used to fabricate a micro-mirror array with the multiterraced-plate structure.The obtained micro-mirror array contaning 52 micromirrors has the size in 600 m by 200 m

and a high fill-factor in excess of 97%. The test results show that the micro-mirror array achieves a maximum torsional angle about 1.1 under a driving voltage of 164 V

and the multi-terraced-plate structure greatly reduces the driving voltage as compared with the traditional parallel-plate structure.

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Keywords

references

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多台阶平板静电驱动的高占空比微镜阵列研制