非正交二维MEMS倾斜镜的研制

庄须叶; 汪为民; 陶逢刚; 姚军; 高福华

doi:10.3788/OPE.20111908.1845

您当前的位置：

首页 >

文章列表页 >

非正交二维MEMS倾斜镜的研制

微纳技术与精密机械 | 更新时间：2020-08-12

- 非正交二维MEMS倾斜镜的研制
- Development of non-perpendicular 2D MEMS tilt mirrors
- 光学精密工程 2011年19卷第8期页码：1845-1851
- 作者机构：
  
  1. 中国科学院研究生院,北京 100039
  2. 中国科学院光电技术研究所微细加工光学技术国家重点实验室,四川成都 610209
  3. 四川大学物理学院高能量密度物理与技术教育部重点实验室,四川成都 610064
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.60978051)();四川省BR计划资助项目();西部三光博工资助项目(No.A11K011)()
- DOI：10.3788/OPE.20111908.1845
  中图分类号： TN366;TN703
- 收稿日期：2010-12-07，
  
  修回日期：2011-01-15，
  
  网络出版日期：2011-08-25，
  
  纸质出版日期：2011-08-25
- 稿件说明：
移动端阅览
庄须叶, 汪为民, 陶逢刚, 姚军, 高福华. 非正交二维MEMS倾斜镜的研制[J]. 光学精密工程, 2011,19(8): 1845-1851

ZHUANG Xu-ye, WANG Wei-min, TAO Feng-gang, YAO Jun, GAO Fuhua. Development of non-perpendicular 2D MEMS tilt mirrors[J]. Editorial Office of Optics and Precision Engineering, 2011,19(8): 1845-1851
庄须叶, 汪为民, 陶逢刚, 姚军, 高福华. 非正交二维MEMS倾斜镜的研制[J]. 光学精密工程, 2011,19(8): 1845-1851 DOI： 10.3788/OPE.20111908.1845.

ZHUANG Xu-ye, WANG Wei-min, TAO Feng-gang, YAO Jun, GAO Fuhua. Development of non-perpendicular 2D MEMS tilt mirrors[J]. Editorial Office of Optics and Precision Engineering, 2011,19(8): 1845-1851 DOI： 10.3788/OPE.20111908.1845.

摘要

为提高传统二维倾斜镜在非正交方向上的光转换效率

设计并加工了一种转轴非正交二维MEMS倾斜镜。倾斜镜上电极非对称地固定在基底上

通过控制上、下电极的加电方式实现倾斜镜在两个非正交轴上的偏转变形。采用三层膜的结构设计

消除了上电极应力变形对镜面平整度的影响。通过在上电极加工微小突起

减小上下电极的重叠面积

避免了倾斜镜的吸合失效;另外

上、下电极仅在其边缘处重叠

确保了静电力的有效利用。研制的倾斜镜驱动电压低

在3.5 V的电压下可实现绕水平

轴0.16、绕倾斜

轴0.03的偏转

Y轴与X

轴成145.37夹角。倾斜镜结构简单

可实现绕两个非正交转轴的偏转

空间适应性好

且有效避免了静电吸合对镜子的损坏。

Abstract

To improve the efficiency of optical conversion and spatial adaptability of conventional 2D tilt mirrors

non-perpendicular 2D MEMS tilt mirrors were presented in this paper. The designed mirrors were fabricated by PolyMUMPS process and their upper electrodes were asymmetrically fixed on a substrate.The deformation of mirrors tilted around two non-perpendicular axes were controlled by applying voltages. By constructing mirrors with three-layer membranes

effects of the upper electrodes deformation on the flatness of the mirror surfaces were eliminated. By fabricating dimples on the upper electrode and reducing the overlapped area of mirrors electrodes on the edges of the upper electrode

the damage caused by the pull-in effect was eliminated. Furthermore

the designed electrodes made sure that forces produced by the applied voltages would produce large moments. The developed mirrors lower the working voltages

their tilting angles around

- and

- axes are 0.16 and 0.03 at 3.5 V

respectively

and the angle between

axis and

axis is 145.37. It concludes that the mirrors can rotate around two non-perpendicular axes independently

and its advantages are simple structures and good spatial adaptability.

关键词

Keywords

references

JUSTIN D M, SUPRIYO S, ROBERT L. BYER, et al.. Deformable mirror development at stanford university [J]. SPIE, 2002,4493:1-12.[2] 李加东,张平,吴一辉, 等. 用于微镜制作的叠层光刻胶工艺及残余应力控制[J]. 光学精密工程,2008,16(11):2204-2208. LI J D, ZHANG P, WU Y H, et al.. Laminated photoresist layer technology and residual stress control for micromirror fabrication [J]. Opt. Precision Eng., 2008,16(11): 2204-2208. (in Chinese)[3] BIFANO T,CORNELISSEN S, BIERDEN P. MEMS deformable mirrors in astronomical adaptive optica [J]. 1st AO4ELT conference, 2010:06003.[4] 李四华, 刘玉菲, 高翔, 等. 微机电系统扭转微镜面驱动器的研制[J]. 半导体学报, 2006,27(4):756-760. LI S H, LIU Y F, GAO X. Analysis and fabrication of torsion micromirror actuators based on a MEMS technology [J].Chinese Journal of Semiconductors, 2006,27(4):756-760. (in Chinese)[5] 张昱, 潘武. 折叠弹簧式MEMS水平扭转微镜的设计与分析[J]. 光学精密工程,2005,Z1:81-85. ZHANG Y, PAN W. Design and analysis of a MEMS horizontal torsion micro mirror with folded springs[J]. Opt. Precision Eng., 2005, Z1:81-85. (in Chinese)[6] 马文英,姚军,任豪,等. MEMS二维静电驱动扫描镜设计和分析[J]. 微纳电子技术,2009,46(5):296-300. MA W Y, YAO J, REN H, et al.. Design and analysis of MEMS 2D electrostatic scanning mirrors[J]. Micronanoelectronic Technology, 2009,46(5):296-300. (in Chinese)[7] 穆参军,赵本刚,吴亚明. 高速MEMS扫描微镜动态变形特性研究[J]. 传感技术学报,2008,21(4):640-643. MU C J, ZHAO B G, WU Y M. Study on dynamic deformations of high speed MEMS scanning micro-mirror [J].Chinese Journal of Sensors and Actuators, 2008,21(4):640-643. (in Chinese)[8] 范钦珊,孙汝劼 . 工程力学[M]. 北京:高等教育出版社,1999. FAN Q SH, SUN R J. Engineering Mechanics [M]. Beijing: High Education Press, 1999. (in Chinese)[9] DEGANI O, SOCHER E,LIPSON A, et al.. Pull-in study of an electrostatic torsion microactuator [J]. J. Microelectromech. Syst., 1998,7(4): 373-379.[10] NEMIROVSKY Y,BOCHOBZA-DEGANI O. A methodology and model for the pull-in parameters of electrostatic actuators [J]. J. Microelectromech.Syst.,2001,10(4):601-615.[11] 胡放容.自适应光学系统中MEMS空间光调制器的研究 . 北京:中国科学院研究生院,2009. HU F R. Study on microelectromechanical system based spatial light modulator for adaptive optics .Beijing:Graduate University of the Chinese Academy of Sciences,2009.(in Chinese)[12] TSAI J, WU M C. Gimbal-less MEMS two-axis optical scanner array with high fill-factor [J]. IEEE J.MEMS, 2005,14(6):1323-1328.

浏览量

560

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

高精度石英全息透镜的MEMS工艺制作

MEMS谐振器刚度非线性特性及其表征

MEMS矢量水听器封装的流体-结构相互作用

MEMS宽带电化学地震检波器

重力/地磁辅助的欧拉角无迹卡尔曼滤波姿态估计