柔性变栅距光栅角位移传感器的精度分析与工艺实现

包艳; 杨德兴; 李秉实; 王东辉; 郑普超

doi:10.3788/OPE.20111908.1859

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柔性变栅距光栅角位移传感器的精度分析与工艺实现

微纳技术与精密机械 | 更新时间：2020-08-12

- 柔性变栅距光栅角位移传感器的精度分析与工艺实现
- Precision analysis and process implementation of angular displacement sensor based on flexible varied line-space grating
- 光学精密工程 2011年19卷第8期页码：1859-1866
- 作者机构：
  
  1. 西北工业大学理学院陕西省光信息技术重点实验室,陕西西安 710072
  2. 中国航天工业集团公司西安飞行自动控制研究所,陕西西安 710065
- 作者简介：
- 基金信息：
  
  中航工业技术创新基金资助项目(No.2009D61864)()
- DOI：10.3788/OPE.20111908.1859
  中图分类号： TP212.12
- 收稿日期：2010-10-12，
  
  修回日期：2011-01-11，
  
  网络出版日期：2011-08-25，
  
  纸质出版日期：2011-08-25
- 稿件说明：
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包艳, 杨德兴, 李秉实, 王东辉, 郑普超. 柔性变栅距光栅角位移传感器的精度分析与工艺实现[J]. 光学精密工程, 2011,19(8): 1859-1866

BAO Yan, YANG De-xing, LI Bing-shi, WANG Dong-hui, ZHENG Pu-chao. Precision analysis and process implementation of angular displacement sensor based on flexible varied line-space grating[J]. Editorial Office of Optics and Precision Engineering, 2011,19(8): 1859-1866
包艳, 杨德兴, 李秉实, 王东辉, 郑普超. 柔性变栅距光栅角位移传感器的精度分析与工艺实现[J]. 光学精密工程, 2011,19(8): 1859-1866 DOI： 10.3788/OPE.20111908.1859.

BAO Yan, YANG De-xing, LI Bing-shi, WANG Dong-hui, ZHENG Pu-chao. Precision analysis and process implementation of angular displacement sensor based on flexible varied line-space grating[J]. Editorial Office of Optics and Precision Engineering, 2011,19(8): 1859-1866 DOI： 10.3788/OPE.20111908.1859.

摘要

研制了用于采集和反馈飞机舵面位置信息的柔性变栅距光栅角位移传感器。分析了影响传感器精度的主要因素

给出了制备过程所采用的精密成型工艺。首先

根据柱面变栅距光栅在柔性变栅距光栅角位移传感器中的核心作用

介绍了传感器的工作原理;分析了工艺误差对传感器精度的影响

提出了柔性变栅距光栅精密成型为柱面变栅距光栅后内表面圆度应不大于0.01 mm。在圆度对传感器精度影响的量值基础上

采用了柱面变栅距光栅精密成型工艺。最后

利用有限元仿真分析了柱面变栅距光栅精密成型工艺的可行性。实验结果表明:柱面变栅距光栅内表面圆度达到0.004 3 mm

传感器的线性度达到最大工作角度的0.27%

满足了航空机载传感器的精度要求。

Abstract

An angular displacement sensor based on a flexible varied-line-space grating was developed for the fly-by-light flight control system. The main factors effecting on the sensor precision and the process for sensor fabrication were discussed. Firstly

the principle of the sensor was introduced based on the key role of cylindrical varied-line-space grating played in the displacement sensor. Then

the effects of process errors on sensor precision were analyzed

and a conclusion was pointed out that the inner surface roundness of the cylindrical varied-line-space grating should be limited to be less than 0.01 mm when it was shaped from the flexible varied-line-space grating. According to analysis results

an accurate forming process was adopted

and its feasibility was conformed by ANSIS analysis. Experimental results show that the inner surface roundness of the sensor can be 0.004 3 mm

and the sensor linearity can be 0.27% of the full range.Obtained results meet the precision requirement of the aero-sensors.

关键词

Keywords

references

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