共光路径向剪切干涉仪的设计

何煦; 马军

doi:10.3788/OPE.20111909.2029

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共光路径向剪切干涉仪的设计

现代应用光学 | 更新时间：2020-08-12

- 共光路径向剪切干涉仪的设计
- Design of common path radial shearing interferometer
- 光学精密工程 2011年19卷第9期页码：2029-2035
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
  2. 中国科学院研究生院北京,100039
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.60538020)()
- DOI：10.3788/OPE.20111909.2029
  中图分类号： TH744.3
- 收稿日期：2010-11-08，
  
  修回日期：2011-01-25，
  
  网络出版日期：2011-09-26，
  
  纸质出版日期：2011-09-26
- 稿件说明：
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何煦, 马军. 共光路径向剪切干涉仪的设计[J]. 光学精密工程, 2011,19(9): 2029-2035

HE Xu, MA Jun. Design of common path radial shearing interferometer[J]. Editorial Office of Optics and Precision Engineering, 2011,19(9): 2029-2035
何煦, 马军. 共光路径向剪切干涉仪的设计[J]. 光学精密工程, 2011,19(9): 2029-2035 DOI： 10.3788/OPE.20111909.2029.

HE Xu, MA Jun. Design of common path radial shearing interferometer[J]. Editorial Office of Optics and Precision Engineering, 2011,19(9): 2029-2035 DOI： 10.3788/OPE.20111909.2029.

摘要

针对常规像移式干涉仪无法用于大口径、长光路光学系统波像差检测的工程问题

设计了共光路径向剪切干涉仪以消除采用标准波面所引入的系统误差。设计中采用由三角棱镜与斜方棱镜组合而成的胶合棱镜组作为波面剪切器件

将待测波面与其复制波面产生干涉

并通过一组有不同相对孔径的透镜切换装置来控制干涉仪剪切比。与4D动态干涉仪在不同条件下的比对试验数据表明

设计的剪切干涉仪的测试重复精度约为/80

实际测试精度RMS优于/20(=630 nm)。这种设计极大地缩小了仪器外形尺寸与重量

提高了超长光路干涉检测的效率。

Abstract

As conventional phase shifting interferometers can not test the wavefront aberration from a large diameter and long optical path system accuracely

a new commonpath shearing interferometer is designed to elimnate the system error introduced by the standard wavefront. The new design takes an agglutination prism consisting of a triangular prism and a rhombic prism as a shear device to produce interference by the wavefront under-test with its replication. A group of different relative aperture lens switching devices are used to control the shearing ratio of the shearing interferometer. Compared with the data from 4D dynamic interferometers under different temperature conditions

it shows that the repeatability of designed shearing interferometer is about /80 and the accuracy of root mean square is better than /80(=630 nm). The design of the commonpath shearing interferometer greatly reduces its dimension and weight and also improves the experiment efficiency for long optical path interference measurement.

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Keywords

references

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