Fizeau干涉仪主机的热稳定性设计与分析

王平; 王汝冬; 田 伟; 王立朋; 隋永新; 杨怀江

doi:10.3788/OPE.20111909.2100

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Fizeau干涉仪主机的热稳定性设计与分析

微纳技术与精密机械 | 更新时间：2020-08-12

- Fizeau干涉仪主机的热稳定性设计与分析
- Design and analysis of thermal stability for main frame in Fizeau interferometer
- 光学精密工程 2011年19卷第9期页码：2100-2107
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
- 作者简介：
- 基金信息：
  
  02重大专项(No.2009ZX02205)()
- DOI：10.3788/OPE.20111909.2100
  中图分类号： TH744.3
- 收稿日期：2011-01-07，
  
  修回日期：2011-01-29，
  
  网络出版日期：2011-09-26，
  
  纸质出版日期：2011-09-26
- 稿件说明：
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王平, 王汝冬, 田伟, 王立朋, 隋永新, 杨怀江. Fizeau干涉仪主机的热稳定性设计与分析[J]. 光学精密工程, 2011,19(9): 2100-2107

WANG Ping, WANG Ru-dong, TIAN Wei, WANG Li-peng, SUI Yong-xin, YANG Huai-jiang. Design and analysis of thermal stability for main frame in Fizeau interferometer[J]. Editorial Office of Optics and Precision Engineering, 2011,19(9): 2100-2107
王平, 王汝冬, 田伟, 王立朋, 隋永新, 杨怀江. Fizeau干涉仪主机的热稳定性设计与分析[J]. 光学精密工程, 2011,19(9): 2100-2107 DOI： 10.3788/OPE.20111909.2100.

WANG Ping, WANG Ru-dong, TIAN Wei, WANG Li-peng, SUI Yong-xin, YANG Huai-jiang. Design and analysis of thermal stability for main frame in Fizeau interferometer[J]. Editorial Office of Optics and Precision Engineering, 2011,19(9): 2100-2107 DOI： 10.3788/OPE.20111909.2100.

摘要

搭建了光-机-热耦合模型

用于分析Fizeau干涉仪光机系统的热稳定性

并研究了该系统的计算流程、环境温度和系统光学质量的随机性、系统光学质量与环境温度的关系等。首先

根据实验室温控条件

建立环境温度的随机分布模型

进行了光-机-热耦合分析并计算不同温度下光机结构的热分布和结构变形;然后

通过Zernike多项式拟合透镜表面面形和曲率半径

利用光学仿真软件分析变形后的光学系统;最后

对系统光学质量进行概率分析

评价了系统的热稳定性。分析结果表明

温度控制在(220.1) ℃时

在2

的置信水平下

Fizeau干涉仪的出射光波前的重复性可以达到0.016%

基本满足干涉仪主机光机系统的重复性要求。

Abstract

An optical-structural-thermal model was built to analyze the thermal stability of an optical-structural system in the Fizeau interferometer. The analyzing process of the model

random distribution of environment temperatures

and the optical performance of the system were researched. Firstly

a random model for environment temperatures was built based on the thermal control system

and the thermal distribution and deformation of the optical-structural system were computed. Then

the surface forms and curvature radii of the optical component were fitted with the Zernike polynomial

and the fitted optical system was analyzed with the optical software. Finally

a random model to indicate the relationship of optical performance and temperature was built and the thermal stability of the main frame in the interferometer was discussed through analyzing the random model. Results indicate that the repeatability of the optical-structural system is 0.016% under believable level of 2 when the temperature is (220.1)℃

which satisfies the requirements of the Fizeau interferometer for stability.

关键词

Keywords

references

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