解耦z轴微机械陀螺的研制

周浩; 苏伟; 刘显学; 唐海林

doi:10.3788/OPE.20111909.2123

您当前的位置：

首页 >

文章列表页 >

解耦z轴微机械陀螺的研制

微纳技术与精密机械 | 更新时间：2020-08-12

- 解耦z轴微机械陀螺的研制
- Development of decoupled z-axis micromachined gyroscope
- 光学精密工程 2011年19卷第9期页码：2123-2130
- 作者机构：
  
  1. 中国工程物理研究院电子工程研究所,四川绵阳,621900
  2. 中国工程物理研究院北京研究生部北京,100088
- 作者简介：
- 基金信息：
  
  国防预研基金资助项目()
- DOI：10.3788/OPE.20111909.2123
  中图分类号： TP212.1
- 收稿日期：2010-10-27，
  
  修回日期：2011-01-25，
  
  网络出版日期：2011-09-26，
  
  纸质出版日期：2011-09-26
- 稿件说明：
移动端阅览
周浩, 苏伟, 刘显学, 唐海林. 解耦z轴微机械陀螺的研制[J]. 光学精密工程, 2011,19(9): 2123-2130

ZHOU Hao, SU Wei, LIU Xian-xue, TANG Hai-lin. Development of decoupled <em>z</em>-axis micromachined gyroscope[J]. Editorial Office of Optics and Precision Engineering, 2011,19(9): 2123-2130
周浩, 苏伟, 刘显学, 唐海林. 解耦z轴微机械陀螺的研制[J]. 光学精密工程, 2011,19(9): 2123-2130 DOI： 10.3788/OPE.20111909.2123.

ZHOU Hao, SU Wei, LIU Xian-xue, TANG Hai-lin. Development of decoupled <em>z</em>-axis micromachined gyroscope[J]. Editorial Office of Optics and Precision Engineering, 2011,19(9): 2123-2130 DOI： 10.3788/OPE.20111909.2123.

摘要

提出了一种检测模态解耦的

轴微机械陀螺

其检测模态被约束为1自由度振动

可抑制驱动模态的影响

降低不期望的检测模态偏置

并使用双质量结构在降低模态耦合的同时获得了较好的模态频率匹配。为满足驱动和检测模态自由度约束要求

使用了U形支撑梁。采用反应离子深刻蚀工艺制作了高深宽比结构层

获得了较大的验证质量

抑制了器件的机械热噪声

提高了陀螺分辨率。加工的陀螺面积为2 100 m2 100 m

厚度为60 m。采用真空封装

获得了较高的机械品质因子。测试结果表明

驱动和检测模态的品质因子分别为2 000和1 800

机械热噪声为3.76()/hHz。在200 ()/s的量程内

刻度因子为21 mV/()s

-1

非线性度为1.426 %FS

1 h内测得零偏稳定性为0.057 9()/s。

Abstract

A decoupled-sense-mode

-axis micromachined gyroscope is presented. The sense mode is restricted to be only one degree of freedom for vibration

which restrains the effect from the drive mode and reduces the undesired sense mode bias. Using double masses allows both matched natural frequencies and decoupled modes. A U-shaped beam is utilized for meeting the requirements on the degrees-of-freedom of the drive and sense modes. In order to create a high-aspect ratio structure

a Deep Reactive Ion Etching (DRIE) process is used to achieve a larger proof mass

reduce the thermomechanical noise floor and provide high sensitivity. The area of the fabricated gyroscope is 2 100 m2 100 m

with a thickness of 60 m. The gyroscope is vacuum-packaged for a high mechanical quality factor. Measured results show that the drive and sense mode quality factors are 2 000 and 1 800

respectively

and the thermomechanical noise floor is 3.76 ( )/hHz

. The scale factor is 21 mV/()s

-1

in a range of 200 ()/s

with a full-scale nonlinearity of 1.426 %FS. The bias drift is 0.057 9 ()/s over a 1 h measurement period.

关键词

Keywords

references

刘危, 解旭辉, 李圣怡. 微机械惯性传感器的技术现状及展望[J]. 光学精密工程,2003,11(5):425-431. LIU W, XIE X H, LI S Y. Present state and perspectives of micromachined inertial sensors [J]. Opt. Precision Eng., 2003,11(5):425-431. (in Chinese)[2] ALPER S E, AKIN T. Symmetrical and decoupled nickel microgyroscope on insulating substrate [J]. Sensors and Actuators A: Physical, 2004,115(2-3):336-350.[3] HONG Y S, LEE J H, KIM S H. A laterally driven symmetric micro-resonator for gyroscopic applications [J]. Journal of Micromechanics and Microengineering, 2000, 10(3):452-458.[4] KRANZ M. Design, simulation, and implementation of two novel micromechanical vibratory-rate gyroscopes. Pennsylvania: Carnegie Mellon University, 1998.[5] 李锦明. 电容式微机械陀螺仪设计 [M]. 北京: 国防工业出版社, 2006. LI J M. Design of Capacitive Micromechanical Gyroscope [M]. Beijing:National Defense Industrial Press,2006. (in Chinese)[6] GEIGER W, BUTT W U, GAIBER A, et al.. Decoupled microgyros and the design principle DAVED [J]. Sensors and Actuators A:Physical, 2002,95(2-3):239-249.[7] XIE H, FEDDER G K. Fabrication, characterization, and analysis of a DRIE CMOS-MEMS gyroscope [J]. IEEE Senssors Journal, 2003,3(5):622-631.[8] 蒋明,杨福俊,董萼良,等. 基于高速摄像的双线性振动陀螺力学特性分析[J]. 光学精密工程,2006,14(1):121-126. JIANG M, YANG F J, DONG E L, et al.. Analysis of mechanical characteristics in the double linear vibratory gyroscope using high speed photography [J]. Opt. Precision Eng., 2006, 14(1):121-126. (in Chinese)[9] HAN J S, KWAK B M. Robust optimal design of a vibratory microgyroscope considering fabrication errors [J]. Journal of Micromechanics and Microengineering, 2001, 11(6): 662-671.[10] MOCHIDA Y, TAMURA M, OHWADA K. A micromachined vibrating rate gyroscope with indepent beam for the drive and detection mode [J]. Sensors and Actuators A: Physical, 2000, 80(2):170-178.[11] 凌林本,李滋刚,周百令,等. 硅微机械陀螺传感器信号的检测方法[J]. 中国惯性技术学报,1999,7(4): 61-64. LING L B, LI Z G, ZHOU B L, et al.. The methods used to detect the sensor signal of the silicon micro-mechanical gyro[J]. Journal of Chinese Inertial Technology, 1999,7(4):61-64. (in Chinese)[12] ACAR C. Robust micromachined vibratory gyroscopes. Irvine University of California, 2004.[13] LI Z, YANG Z, XIAO Z, et al.. A bulk micromachined vibratory lateral gyroscope fabricated with wafer bonding and deep trench etching [J]. Sensors and Actuators A: Physical, 2000, 83(1-3): 24-29.[14] 刘梅,周百令. 硅微陀螺机械热噪声研究[J]. 仪器仪表学报,2006,27(S2):1163-1164. LIU M, ZHOU B L. Research on mechanical-thermal noise in micromachined gyroscopes [J]. Chinese Journal of Scientific Instrument, 2006, 27(S2):1163-1164. (in Chinese)[15] ZHOU H, TANG H L, SU W, et al.. Robust design of a MEMS gyroscope considering the worst-case tolerance. Proceedings of the 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Xiamen, P.R. China: IEEE NEMS, 2010:1012-1016.

浏览量

857

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

脉冲密度反馈对力平衡微机械陀螺的影响

微机械陀螺检测接口建模及前置放大器优化