Isara 400超精密坐标测量机的设计与标定

Henny Spaan; Ivo Widdershoven; Rilpho Donker

doi:10.3788/OPE.20111909.2236

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Isara 400超精密坐标测量机的设计与标定

光学精密工程暨纳米科技国际研讨会论文 | 更新时间：2020-08-12

- Isara 400超精密坐标测量机的设计与标定
- Design and calibration of "Isara 400" ultra-precision CMM
- 光学精密工程 2011年19卷第9期页码：2236-2241
- 作者机构：
  
  IBS Precision Engineering, Esp 201, 5633AD Eindhoven,The Netherlands
- 作者简介：
- 基金信息：
  
  Supported by Nano CMM(No.FP6-026717-2) and Production 4&mu();(No.FP6-2004-NI-4) Read
- DOI：10.3788/OPE.20111909.2236
  中图分类号： TH72
- 收稿日期：2011-03-08，
  
  修回日期：2011-04-30，
  
  网络出版日期：2011-09-26，
  
  纸质出版日期：2011-09-26
- 稿件说明：
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Henny Spaan, Ivo Widdershoven, Rilpho Donker. Isara 400超精密坐标测量机的设计与标定[J]. 光学精密工程, 2011,19(9): 2236-2241

Henny Spaan, Ivo Widdershoven, Rilpho Donker. Design and calibration of "Isara 400" ultra-precision CMM[J]. Editorial Office of Optics and Precision Engineering, 2011,19(9): 2236-2241
Henny Spaan, Ivo Widdershoven, Rilpho Donker. Isara 400超精密坐标测量机的设计与标定[J]. 光学精密工程, 2011,19(9): 2236-2241 DOI： 10.3788/OPE.20111909.2236.

Henny Spaan, Ivo Widdershoven, Rilpho Donker. Design and calibration of "Isara 400" ultra-precision CMM[J]. Editorial Office of Optics and Precision Engineering, 2011,19(9): 2236-2241 DOI： 10.3788/OPE.20111909.2236.

摘要

介绍了Isara 400 3维超精坐标测量机标定的关键技术

包括平台标定和系统镜面台非垂直度标定。同时

提出了一种新的超精接触探针系统

给出了这种3维灵敏度探针的标定结果。

Abstract

This paper presents critical aspects of the calibration of the Isara 400 ultra-precision 3D Coordinat Measuring Machine(CMM)

such as the calibration of flatness and out-of-squareness of the systems mirror table. In addition

a newly developed ultra-precision tactile probe system is described and the results of the 3D sensitivity calibration of this probe are presented.

关键词

Keywords

references

DONKER R L,WIDDERSHOVEN I, SPAAN H A M. Isara 400: enabling ultra-precision coordinate metrology of large parts. Proceedings of the 10th International Euspen Conference, June 2010.[2] RUIJL T A M. Ultra Precision Coordinate Measuring Machine Design, Calibration and Error Compensation. Delft University of Technology, Netherlands, 2001.[3] EVANS C J,SMITH C,SOOBITSKY J,et al.. Full area calibration of large optical flats. Proceedings of the ASPE spring topical conference, April 2009. [4] HENNY A M, RILPHO L, IVO WIDDERSHOVEN. Isara 400: development of an ultra-precision CMM for 3D measurement of large parts. Proceedings of the ASPE Spring Topical Conference, April,2009.

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