利用三光束激光干涉仪评估纳米平台的移动性能

王世华; 陈秀玲; 徐淦

doi:10.3788/OPE.20111909.2284

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利用三光束激光干涉仪评估纳米平台的移动性能

光学精密工程暨纳米科技国际研讨会论文 | 更新时间：2020-08-12

- 利用三光束激光干涉仪评估纳米平台的移动性能
- Evaluation of nano-stage movement by using triple-beam laser interferometer
- 光学精密工程 2011年19卷第9期页码：2284-2292
- 作者机构：
  
  国家计量中心新加坡科技研究局新加坡,118221
- 作者简介：
- 基金信息：
  
  Nanometrology Roadmap Funded by Ministry of Industry and Trade in Singapore()
- DOI：10.3788/OPE.20111909.2284
  中图分类号： TH703;TH744.3
- 收稿日期：2011-03-08，
  
  修回日期：2011-04-30，
  
  网络出版日期：2011-09-26，
  
  纸质出版日期：2011-09-26
- 稿件说明：
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王世华, 陈秀玲, 徐淦. 利用三光束激光干涉仪评估纳米平台的移动性能[J]. 光学精密工程, 2011,19(9): 2284-2292

WANG Shi-hua, TAN Siew-leng, XU Gan. Evaluation of nano-stage movement by using triple-beam laser interferometer[J]. Editorial Office of Optics and Precision Engineering, 2011,19(9): 2284-2292
王世华, 陈秀玲, 徐淦. 利用三光束激光干涉仪评估纳米平台的移动性能[J]. 光学精密工程, 2011,19(9): 2284-2292 DOI： 10.3788/OPE.20111909.2284.

WANG Shi-hua, TAN Siew-leng, XU Gan. Evaluation of nano-stage movement by using triple-beam laser interferometer[J]. Editorial Office of Optics and Precision Engineering, 2011,19(9): 2284-2292 DOI： 10.3788/OPE.20111909.2284.

摘要

纳米位移传感器多集成在纳米平台的平行移动柔性机构中

通过闭环控制回路来实现纳米级的平台移动精度

本文介绍了利用具有亚纳米分辨率的三光束单频激光干涉仪校正纳米级电容式线性移动平台位移的工作

阐述了校正测试系统的布局以及线位移和角度位移的校正测试原理。通过实验成功地对移动线位移320 m的纳米平台进行了校正

实验数据表明

该平台的偏摆最大角位移为3.5。另外

对该校正系统进行了测量不确定度分析

在覆盖因子

=2时

它的扩展不确定度为(1.8+1.2310

-2

)nm

测试长度

的单位是m

由此显示该系统可有效评价纳米平台的移动性能。

Abstract

Nanosensors are generally integrated into flexure translation stages to form a closed-loop feedback to control the movement of the stage accurately in a nano-scale order.To evaluate the displacement of nano-stages

a calibration system based on a single frequency triple-beam laser homodyne interferometer with a sub-nanometre resolution was developed to calibrate the precision of the linear nano-stage with a capacitive feedback sensor. The triple-beam configuration and its linear and angular measuring principles were described to reflect how the linear and angular displacements (yaw

pitch) of the stage could be determined accurately. The experimental results demonstrate that the system is capable of calibrating the nano-stage with a linear displacement up to 320 m and an angular deviation up to 3.5. The error sources of the proposed calibration system were also highlighted in the measurement uncertainty analysis

and it shows that the expanded uncertainty of measurement with a coverage factor

=2 is estimated as (1.8+1.2310

-2

) nm

where

is the displacement in m. The results demonstrate that the proposed system can evaluate the movement performance of nano-stages efficiently.

关键词

Keywords

references

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