圆锥量规锥度的高精度光学干涉法测量

康岩辉; 张恒

doi:10.3788/OPE.20111911.2551

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圆锥量规锥度的高精度光学干涉法测量

现代应用光学 | 更新时间：2020-08-12

- 圆锥量规锥度的高精度光学干涉法测量
- High precision measurement of taper for taper gauge by optical interference method
- 光学精密工程 2011年19卷第11期页码：2551-2557
- 作者机构：
  
  中国计量科学研究院北京,100013
- 作者简介：
- 基金信息：
  
  国家重大科技专项资助项目(No.2011ZX04014-061)();中国计量科学研究院技术改造项目(No.24-AJG1102)();中国计量科学研究院长度所基本业务
- DOI：10.3788/OPE.20111911.2551
  中图分类号： TB922;TH744.3
- 收稿日期：2011-03-28，
  
  修回日期：2011-05-17，
  
  网络出版日期：2011-11-25，
  
  纸质出版日期：2011-11-25
- 稿件说明：
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康岩辉, 张恒. 圆锥量规锥度的高精度光学干涉法测量[J]. 光学精密工程, 2011,19(11): 2551-2557

KANG Yan-hui, ZHANG Heng. High precision measurement of taper for taper gauge by optical interference method[J]. Editorial Office of Optics and Precision Engineering, 2011,19(11): 2551-2557
康岩辉, 张恒. 圆锥量规锥度的高精度光学干涉法测量[J]. 光学精密工程, 2011,19(11): 2551-2557 DOI： 10.3788/OPE.20111911.2551.

KANG Yan-hui, ZHANG Heng. High precision measurement of taper for taper gauge by optical interference method[J]. Editorial Office of Optics and Precision Engineering, 2011,19(11): 2551-2557 DOI： 10.3788/OPE.20111911.2551.

摘要

针对超精密数控机床对圆锥量规锥度高精度测量的需求

研究了一种将"大数"和"小数"相结合

准确测量圆锥量规锥度的方法。介绍了锥度测量系统的基本原理及组成

给出了实验测量结果

分析了测量系统的不确定度。该测量方法利用最大分度间隔误差为0.10的多齿分度台构成高准确度分度系统保证测量"大数"部分的准确性

采用激光偏振干涉装置及精密回转工作台组成小角度测量系统保证测量"小数"部分的精度

而双光束白光干涉系统实现了测量位置的精确定位。实验和分析结果表明

该方法在不确定度置信因子

为2时

锥度测量系统的扩展不确定度约为0.24

优于0.3

可实现圆锥量规任意锥度的高精度测量。

Abstract

For ultra-precision Numerical Control (NC) machine tools in advanced manufacturing industry

a high precision measuring method for the taper of a taper gauge was proposed by combining the integral and fractional parts together. The primary principle and the composition of the system were described

and the experimental measurement of a taper gauge was implemented. Moreover

the measurement uncertainty of the system was analyzed. In this method

the high precision indexing system containing a multi-tooth indexing table with an accuracy of 0.10 was used to ensure the precision and reliability of the integral part

and the laser polarization interference device and a precision rotary table was combined into an angle measuring system to accurately measure the fractional part. Then

the dual-beam white light interference system was used for an accurate positioning. The experiment and analysis results indicate that the measurement uncertainty can be less than 0.3 when the uncertainty confidence level (

) is 2. The method can realize the high precision taper measurement for any taper gauges.

关键词

Keywords

references

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