光学成像系统光学波前的高精度测试

邵晶; 马冬梅; 聂真威

doi:10.3788/OPE.20111911.2582

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光学成像系统光学波前的高精度测试

现代应用光学 | 更新时间：2020-08-12

- 光学成像系统光学波前的高精度测试
- Accurate test of optical wave front for optical imaging system
- 光学精密工程 2011年19卷第11期页码：2582-2588
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
  2. 中国科学院研究生院北京,100039
- 作者简介：
- 基金信息：
  
  国家科技重大专项基金资助项目(2013ZX04001091)
- DOI：10.3788/OPE.20111911.2582
  中图分类号： TH70;TH74
- 收稿日期：2011-05-10，
  
  修回日期：2011-06-21，
  
  网络出版日期：2011-11-25，
  
  纸质出版日期：2011-11-25
- 稿件说明：
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邵晶, 马冬梅, 聂真威. 光学成像系统光学波前的高精度测试[J]. 光学精密工程, 2011,19(11): 2582-2588

SHAO Jing, MA Dong-mei, NIE Zhen-wei. Accurate test of optical wave front for optical imaging system[J]. Editorial Office of Optics and Precision Engineering, 2011,19(11): 2582-2588
邵晶, 马冬梅, 聂真威. 光学成像系统光学波前的高精度测试[J]. 光学精密工程, 2011,19(11): 2582-2588 DOI： 10.3788/OPE.20111911.2582.

SHAO Jing, MA Dong-mei, NIE Zhen-wei. Accurate test of optical wave front for optical imaging system[J]. Editorial Office of Optics and Precision Engineering, 2011,19(11): 2582-2588 DOI： 10.3788/OPE.20111911.2582.

摘要

基于扩展奈波尔-泽尼克理论

分析了不同出瞳振幅分布情况对光学系统焦面处光强分布的影响。针对光学成像系统出瞳振幅实际分布状态

提出了一种新的测试光学波前的方法

解决了相位恢复算法中出瞳振幅分布不均匀和快速傅里叶变换引入计算误差的问题。通过测评实验

对一光学系统进行了测试

获得的光学系统出瞳波前(PV)值为0.196 5

RMS值为0.022 4(测试波长=632.8 nm)

此波前中主要含有像散、彗差和高阶像散等像差。该方法亦可用于分析光学系统出瞳振幅分布

数值计算其他焦面处的光强分布。测评实验证明了此方法的有效性。

Abstract

Based on the Extended Nijboer-Zernike theory

the effect of different amplitudes for exit pupils on the image intensity in the focal plane was analyzed. A novel approach was applied to testing the wavefront according to the actual condition of the amplitude in the exit pupil

which can help eliminating the error caused by the nonuniformity illuminated pupil and the Fast Fourier Transform in the original phase retrieval algorithms. A testing experiment was performed on an imaging optical system

and obtained results show that the tested wave fronts in the exit pupil of a camera lens are 0.196 5 in PV and 0.022 4 in RMS (the testing wavelength is 632.8 nm). The aberrations in the wavefront are mainly astigmatism

coma and high order astigmatism. Furthermore

the approach can also be used to analyze the amplitude in the exit pupil of a camera lens and calculate the light intensity distribution on other focal planes. The experiment proves this approach available.

关键词

Keywords

references

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