球面微通道板在极紫外波段的量子探测效率

尼启良; 韩素立; 陈斌; 王海峰

doi:10.3788/OPE.20111911.2596

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球面微通道板在极紫外波段的量子探测效率

现代应用光学 | 更新时间：2020-08-12

- 球面微通道板在极紫外波段的量子探测效率
- Quantum detection efficiency of spherical microchannel plate in extreme ultraviolet
- 光学精密工程 2011年19卷第11期页码：2596-2602
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
  2. 中国科学院研究生院北京,100039
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.61077016)()
- DOI：10.3788/OPE.20111911.2596
  中图分类号： TN144
- 收稿日期：2011-06-07，
  
  修回日期：2011-08-17，
  
  网络出版日期：2011-11-25，
  
  纸质出版日期：2011-11-25
- 稿件说明：
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尼启良, 韩素立, 陈斌, 王海峰. 球面微通道板在极紫外波段的量子探测效率[J]. 光学精密工程, 2011,19(11): 2596-2602

NI Qi-liang, HAN Su-li, CHEN Bin, WANG Hai-feng. Quantum detection efficiency of spherical microchannel plate in extreme ultraviolet[J]. Editorial Office of Optics and Precision Engineering, 2011,19(11): 2596-2602
尼启良, 韩素立, 陈斌, 王海峰. 球面微通道板在极紫外波段的量子探测效率[J]. 光学精密工程, 2011,19(11): 2596-2602 DOI： 10.3788/OPE.20111911.2596.

NI Qi-liang, HAN Su-li, CHEN Bin, WANG Hai-feng. Quantum detection efficiency of spherical microchannel plate in extreme ultraviolet[J]. Editorial Office of Optics and Precision Engineering, 2011,19(11): 2596-2602 DOI： 10.3788/OPE.20111911.2596.

摘要

由于球面微通道板(MCP)的量子探测效率与极紫外(EUV)相机的灵敏度有关

本文研究了球面MCP量子探测效率的特点和测量方法。根据微通道板在EUV波段光电子产额的理论模型

计算了球面MCP在该波段下随不同入射角变化的电子产额。使用激光等离子体光源测量球面MCP在EUV波段的量子探测效率

搭建了球面MCP在该波段的量子探测效率的测量装置

测量了球面MCP在不同位置的量子探测效率随波长和入射角的变化曲线。实验结果表明

入射角为15时的量子探测效率约为入射角为0时的5倍。

Abstract

As the Quantum Detection Efficiency (QDE) of a spherical micro-channel plate in a photo-counting imaging detector is relative to the sensitivity of an Extreme Ultravialet(EUV)camera

this paper researches its characteristics and measurement. The secondary electron yield of the spherical MCP in EUV region is calculated based on the theoretical model describing secondary electron yield of the MCP

Then the QDE of the spherical MCP is measured by using a laser-produced plasma source

and an instrument for measuring the QDE of spherical MCP is built. The QDE of spherical MCP for different positions on a MCP surface is measured at different incident angles and wavelengths. The experimental results show that the QDE at an incident angle of 15 is five times of that at incident angle of 0。

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references

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